Enclosed-channel reactor method to manufacture catalysts or support materials

Patent metadata

Field	Value
Publication number	US-9901917-B2
Application number	US-201615156916-A
Country	US
Kind code	B2
Filing date	May 17, 2016
Priority date	Nov 22, 2012
Publication date	Feb 27, 2018
Grant date	Feb 27, 2018

Abstract

The present invention provides methods and designs of enclosed-channel reactor system for manufacturing catalysts or supports. Both of the configuration designs force the gaseous precursors and purge gas flow through the channel surface of reactor. The precursors will transform to thin film or particle catalysts or supports under adequate reaction temperature, working pressure and gas concentration. The reactor body is either sealed or enclosed for isolation from atmosphere. Another method using super ALD cycles is also proposed to grow alloy catalysts or supports with controllable concentration. The catalysts prepared by the method and system in the present invention are noble metals, such as platinum, palladium, rhodium, ruthenium, iridium and osmium, or transition metals such as iron, silver, cobalt, nickel and tin, while supports are silicon oxide, aluminum oxide, zirconium oxide, cerium oxide or magnesium oxide, or refractory metals, which can be chromium, molybdenum, tungsten or tantalum.

First claim

What is claimed is:

1. A method based on an enclosed-channel reactor system for manufacture of catalysts or support materials, said system comprising a reactor body provided with a plurality of enclosed channels inside, an inlet cap connecting with the said reactor body at the upstream side and having an inlet end which links enclosed channels in said reactor body, and an outlet cap connecting with the said reactor body at the downstream side and having an outlet end which links enclosed channels in said reactor body, said method comprising steps as follows:
injecting precursors of catalyst or support materials into said enclosed channels of said reactor body through said inlet end;
injecting an inert gas via said inlet end to purge said enclosed channels and discharged from said outlet end for diluting or removing said residual precursors; and
completing deposition in said enclosed channels of said reactor body for preparation of catalysts or support materials.

2. The method based on said enclosed-channel reactor system for manufacture of catalysts or support materials according to claim 1 , wherein said precursors are compounds of noble metals or transition metals.

3. The method based on said enclosed-channel reactor system for manufacture of catalysts or support materials according to claim 2 , wherein said noble metals comprise platinum, palladium, rhodium, ruthenium, iridium or osmium.

4. The method based on said enclosed-channel reactor system for manufacture of catalysts or support materials according to claim 2 , wherein said transition metals comprise iron, silver, cobalt, nickel, or tin.

5. The method based on said enclosed-channel reactor system for manufacture of catalysts or support materials according to claim 1 , wherein said support materials are one oxide which is capable of resisting high temperature.

6. The method based on said enclosed-channel reactor system for manufacture of catalysts or support materials according to claim 5 , wherein said oxide which is capable of resisting high temperature is silicon oxide, aluminum oxide, zirconium oxide, cerium oxide.

7. The method based on said enclosed-channel reactor system for manufacture of catalysts or support materials according to claim 1 , wherein said support materials are refractory metals.

8. The method based on said enclosed-channel reactor system for manufacture of catalysts or support materials according to claim 7 , wherein said refractory metal is chromium, molybdenum, tungsten or tantalum.

9. The method based on said enclosed-channel reactor system for manufacture of catalysts or support materials according to claim 1 , wherein said inert gas is helium, neon or argon.

10. A method based on an enclosed-channel reactor system for manufacture of catalysts or support materials, said system comprising a reactor body provided with a plurality of enclosed channels inside, a reactor enclosure externally capping said reactor body, allowing one end to be adjacent to one end of said reactor body, and having an outlet end shared by said enclosed channels, and a reactor cap which has one end linking said reactor enclosure's other end in order to seal said reactor cap and said reactor enclosure and the other end on which there is an inlet end linking said enclosed channels in said reactor body, said method comprising steps as follows:
injecting precursors of catalysts or support materials into said enclosed channels of said reactor body through said inlet end;
injecting an inert gas via said inlet end to purge said enclosed channels and discharged from said outlet end for diluting or removing said residual precursors; and
completing deposition in said enclosed channels of said reactor body for growth of catalysts or support materials.

11. The method based on said enclosed-channel reactor system for manufacture of catalysts or support materials according to claim 10 , wherein said precursors are compounds of noble metals or transition metals.

12. The method based on said enclosed-channel reactor system for manufacture of catalysts or support materials according to claim 11 , wherein said noble metals comprise platinum, palladium, rhodium, ruthenium, iridium, or osmium.

13. The method based on said enclosed-channel reactor system for manufacture of catalysts or support materials according to claim 11 , wherein said transition metals comprise iron, silver, cobalt, nickel, or tin.

14. The method based on said enclosed-channel reactor system for manufacture of catalysts or support materials according to claim 10 , wherein said support materials are one oxide which is capable of resisting high temperature.

15. The method based on said enclosed-channel reactor system for manufacture of catalysts or support materials according to claim 14 , wherein said oxide which is capable of resisting high temperature is silicon oxide, aluminum oxide, zirconium oxide, cerium oxide.

16. The method based on said enclosed-channel reactor system for manufacture of catalysts or support materials according to claim 10 , wherein said support materials are one refractory metal.

17. The method based on said enclosed-channel reactor system for manufacture of catalysts or support materials according to claim 16 , wherein said refractory metal is chromium, molybdenum, tungsten or tantalum.

18. The method based on said enclosed-channel reactor system for manufacture of catalysts or support materials according to claim 10 , wherein said inert gas is helium, neon or argon.

19. A method based on an enclosed-channel reactor system for manufacture of catalysts or support materials, said system comprising a reactor body provided with a plurality of enclosed channels inside, a reactor enclosure externally capping said reactor body, allowing one end to be adjacent to one end of said reactor body, and having an outlet end shared by said enclosed channels, and a reactor cap which has one end linking said reactor enclosure's other end in order to seal said reactor cap and said reactor enclosure and the other end on which there is an inlet end linking said enclosed channels in said reactor body, said method being on the basis of an ALD cycle with steps as follows:
injecting a first precursor into said enclosed channels of said reactor body through said inlet end;
injecting an inert gas via said inlet end to purge said enclosed channels and discharged from said outlet end for diluting or removing said residual first precursor;
injecting a second precursor into said enclosed channels of said reactor body through said inlet end; and
injecting another inert gas via said inlet end to purge said enclosed channels and discharged from said outlet end for diluting or removing said residual second precursor.

20. The method based on said enclosed-channel reactor system for manufacture of catalysts or support materials according to claim 19 , wherein said inert gas is helium, neon or argon.

21. The method based on said enclosed-channel reactor system for manufacture of catalysts or support materials according to claim 19 , wherein said the thickness increase of catalysts or support materials is 0.5˜1.5Å after one cycle ALD reaction, and the growth rate of deposited catalyst or support material is linearly and positively proportional to cycle number of ALD.

22. A method based on said enclosed-channel reactor system for manufacturing catalysts or support materials, said system comprising a reactor body provided with a plurality of enclosed channels inside, a reactor enclosure e

Assignees

• Nat Applied Res Laboratories

Inventors

• Kei Chi Chung
• Liu Bo Heng
• Lin Chien Pao
• Hsiao Chien Nan
• Hsueh Yang Chih
• Perng Tsong Pyng

Classifications

• B01J23/74

  Iron group metals · CPC title

• B01J35/04

  Operations & Transport · mapped topic

• H01M4/92

  Metals of platinum group (H01M4/94 {, H01M4/9058} take precedence) · CPC title

• B01J23/38

  of noble metals · CPC title

• B01J23/14 Primary

  of germanium, tin or lead · CPC title