Efficient transfer of materials in manufacturing

Patent metadata

Field	Value
Publication number	US-9901210-B2
Application number	US-201213349601-A
Country	US
Kind code	B2
Filing date	Jan 13, 2012
Priority date	Jan 4, 2012
Publication date	Feb 27, 2018
Grant date	Feb 27, 2018

Abstract

Methods for automated handling for forming a device and automated handling systems for forming a device are presented. One of the methods includes providing a production area with a plurality of destinations and a transport system which includes transport and load/unload (U/L) units in the production area. The transport units include automated guided vehicles (AGVs) with a storage compartment for holding at least one carrier containing production material for forming the device and U/L units include AGVs with a robotic system for handling carriers. A transfer of a selected carrier from a first destination to a second destination is determined. A request to the transport system is issued to effect the transfer of the selected carrier, which includes using a selected U/L unit, a selected transport unit, or a combination of selected U/L and transport units.

First claim

What is claimed is:

1. A method for automated handling for forming a device comprising:
providing a production area with a plurality of destinations and a transport system comprising distinct transport units and load/unload (U/L) units which can freely and autonomously move in the production area to transfer carriers from one location to another location, the distinct transport units and U/L units comprise autonomously operated automated guided vehicles (AGVs), wherein
an AGV includes a navigation system with an object detection module for autonomous operation in the production area,
an AGV transport unit includes a storage compartment for holding at least one carrier containing production material for forming the device, wherein the AGV transport unit is dedicated to transport carriers from one location to another location, and
an AGV U/L unit comprises a robotic system for automatically handling carriers and transporting carriers from one location to another location, wherein
handling the carriers comprise loading a carrier into a machine from the AGV transport unit, and unloading a carrier from a machine onto the AGV transport unit, and
the AGV U/L unit transports a carrier from one location to another location if the locations are less than a threshold distance;

determining a transfer of a selected carrier from a first destination to a second destination using one or more of the distinct AGV transport units and U/L units based at least in part on the identified first and second destinations and the threshold distance; and
issuing a request to the transport system to effect the transfer of the selected carrier, wherein effecting the transfer comprises
employing a first selected U/L unit at the first destination for automatically loading the selected carrier onto a first selected transport unit,
employing the first selected transport unit to transfer the selected carrier to the second destination, and
employing a second selected U/L unit to unload the selected carrier from the first selected transport unit, or
employing the first selected U/L unit at the first destination for handling the selected carrier and transporting the selected carrier to the second destination,
wherein the transfer of the selected carrier is performed based on a lot list ranked by priority provided by a real-time dispatcher module of a production control system and based on an updated map of the production area.

2. The method of claim 1 wherein the carrier is a wafer carrier capable of containing a plurality of wafers used in forming semiconductor devices, the plurality of wafers form a lot of wafers.

3. The method of claim 1 wherein the device comprises a flat panel display device.

4. The method of claim 1 wherein the first and second destinations comprise machines which include tools, stockers, racks or a combination thereof.

5. The method of claim 4 wherein the tools are associated with indexers for reading information on a carrier tag of the selected carrier.

6. The method of claim 4 wherein:
a tool comprises a machine supervisory program (MSP) for controlling the operation of the tool; and further comprises
a production control system for tracking and controlling the flow of carriers in the production area; and
a smart communication system between the MSPs of the tools, the production control system, the AGV U/L units and AGV transport units of the transport system.

7. The method of claim 6 wherein the communication system provides direct or indirect communication between the MSPs of the tools, the production control system, the AGV U/L units and AGV transport units of the transport system.

8. The method of claim 1 wherein the AGVs contain a map of the production area, wherein the map includes routes and locations of destinations.

9. The method of claim 1 wherein effecting the transfer comprises:
unloading the selected carrier at the first destination by the first selected U/L unit; and
loading the selected carrier at the second destination by the first selected U/L unit.

10. The method of claim 1 wherein effecting the transfer comprises:
unloading the selected carrier at the first destination by the first selected U/L unit; and
loading the selected carrier at the second destination by the second selected U/L unit.

11. The method of claim 10 further comprises:
loading the selected carrier onto the selected transport unit at the first destination;
transferring the selected carrier to the second destination by the selected transport unit; and
unloading the selected carrier from the selected transport unit by the second selected U/L unit.

12. The method of claim 1 wherein the AGVs comprise the object detection module for detecting and avoiding objects for safe operation in a human environment.

13. A method for automated handling for forming a device comprising:
providing a production facility with a plurality of destinations;
providing distinct transport units and load/unload (U/L) units which can freely and autonomously move in the production facility to transfer carriers from one location to another location, the distinct transport units and U/L units comprise autonomously operated automated guided vehicles (AGVs), wherein
an AGV includes a navigation system with an object detection module for autonomous operation in a production area,
an AGV transport unit is dedicated to transport one or more carriers in a storage compartment of the AGV transport unit, a carrier contains production material for forming the device,
an AGV U/L unit includes a robotic system for automatically handling carriers and transporting carriers from one location to another location, wherein
handling the carriers comprise loading a carrier into a machine from the AGV transport unit, and unloading a carrier from a machine onto the AGV transport unit, and
the AGV U/L unit transports a carrier from one location to another location if the locations are less than a threshold distance; and

transporting a selected carrier containing material for forming the device from a first machine at a first location to a second machine at a second location, wherein the transporting of the selected carrier comprises
employing a first AGV U/L unit to unload the selected carrier from the first machine and loading the selected carrier onto a first AGV transport unit, the first AGV transport unit moving from the first location to the second location to transport the selected carrier to the second location, and
employing a second AGV U/L unit to unload the selected carrier from the first AGV transport unit and loading the selected carrier in the second machine;
wherein the transporting of the selected carrier is performed based on a lot list ranked by priority provided by a real-time dispatcher module of a production control system and based on an updated map of the production area.

14. An automated handling system for forming a device comprising:
a production facility having a plurality of locations with machines;
a carrier containing material forming the device; and
distinct load/unload (U/L) units and transport units which can freely and autonomously move for effecting transfer of the carrier from a first location to a second location in the facility, the distinct U/L units and transport units comprise autonomously operated automated guided vehicles (AGVs), wherein
an AGV includes a navigation system with an object detection module for autonomous operation in a production area,
an AGV transport unit includes a storage compartment for holding at least one carrier containing production material for forming the device, wherein the AGV transpor

Assignees

• Chan Chew Foo
• Globalfoundries Sg Pte Ltd

Inventors

• Chan Chew Foo

Classifications

• H10P72/3214

  by means of a cart or a vehicle · CPC title

• A47J37/0713 Primary

  with gas burners · CPC title

• G05B19/41815

  characterised by the cooperation between machine tools, manipulators and conveyor or other workpiece supply system, workcell · CPC title

• G05B2219/31014

  Synchronization between AGV movement and workpiece treatment chambers · CPC title

• G06Q10/08

  Logistics, e.g. warehousing, loading or distribution; Inventory or stock management · CPC title