Gas distributor used in wafer carriers

Patent metadata

Field	Value
Publication number	US-9899246-B2
Application number	US-201514735126-A
Country	US
Kind code	B2
Filing date	Jun 9, 2015
Priority date	Jun 9, 2014
Publication date	Feb 20, 2018
Grant date	Feb 20, 2018

Abstract

The present invention relates to gas distributors used in wafer carriers. The gas distributors comprise a body having an interior space, a separator configured at the front side of the body in the interior space, and an air inlet connected with the body. One edge of the separator and the front side of the body together form a passage. The configuration of the passage in the gas distributors enables the gas distributors to evenly distribute gases.

First claim

What is claimed is:

1. A gas distributor used in wafer carriers, comprising:
a body having an interior space, wherein the interior space comprises a front side and a back side;
a separator being configured in the interior space, wherein the separator comprises a first edge and a second edge, the first edge is connected with the front side of the interior space and the second edge reaches the back side of the interior space, forming a passage;
wherein the separator divides the interior space into:
a first room connected with an air inlet, wherein the air inlet is configured in a bottom of the first room; and
a second room connected with at least one air outlet, wherein the at least one air outlet is configured on the front side of the interior space;
wherein the separator further comprises an extended member which is connected with the second edge of the separator, and the extended member is parallel to the back side of an interior space in the first room; wherein the extended member has a first end and a second end; wherein the first end is located at the bottom of the first room, and the second end is located on top of the first room;
wherein a first width of the extended member between the first end of the extended member and the second edge of the separator is smaller than a second width of the extended member between the second end of the extended member and the second edge of the separator.

2. A gas distributor used in wafer carriers, comprising:
a body having an interior space, wherein the interior space comprises a front side and a back side;
a separator being configured in the interior space, wherein the separator comprises a first edge and a second edge, the first edge is connected with the front side of the interior space and the second edge reaches the back side of the interior space, forming a passage;
wherein the separator divides the interior space into:
a first room connected with an air inlet, wherein the air inlet is configured in a bottom of the first room; and
a second room connected with at least one air outlet, wherein the at least one air outlet is configured on the front side of the interior space;
wherein the separator further comprises an extended member which is connected with the second edge of the separator, and the extended member is parallel to the back side of an interior space in the first room;
wherein the extended member has at least one surface facing the front side of the interior space in the first room, and wherein the at least one surface comprises a first part and a second part having a width larger than that of the first part.

3. The gas distributor used in wafer carriers as claimed in claim 2 , wherein the width of the first part is constant and the width of the second part is greater at an end away from the air inlet.

Assignees

• Gudeng Prec Ind Co Ltd
• Gudeng Prec Ind Co Ltd

Inventors

• Lin Chin Ming
• Chiu Ming Chien
• Kao Jui Ken
• Chang Chen Hao

Classifications

• H10P72/1926 Primary

  characterised by the presence of atmosphere modifying elements inside or attached to the closed carrier · CPC title

• Y10T137/86212

  Plural compartments formed by baffles · CPC title

• H01L21/67393 Primary

  Electricity · mapped topic