Hybrid extreme ultraviolet imaging spectrometer

Patent metadata

Field	Value
Publication number	US-9899197-B2
Application number	US-201615226307-A
Country	US
Kind code	B2
Filing date	Aug 2, 2016
Priority date	Sep 1, 2015
Publication date	Feb 20, 2018
Grant date	Feb 20, 2018

Abstract

A hybrid extreme ultraviolet (EUV) imaging spectrometer includes: a radiation source to: produce EUV radiation; subject a sample to the EUV radiation; photoionize a plurality of atoms of the sample; and form photoions from the atoms subject to photoionization by the EUV radiation, the photoions being desorbed from the sample in response to the sample being subjected to the EUV radiation; an ion detector to detect the photoions: as a function of a time-of-arrival of the photoions at the ion detector after the sample is subjected to the EUV radiation; or as a function of a position of the photoions at the ion detector; an electron source to: produce a plurality of primary electrons; subject the sample to the primary electrons; and form scattered electrons from the sample in response to the sample being subjected to the primary electrons; and an electron detector to detect the scattered electrons: as a function of a time-of-arrival of the scattered electrons at the electron detector after the sample is subjected to the EUV radiation or the primary electrons; or as a function of a position of the scattered electrons at the electron detector.

First claim

What is claimed is:

1. A hybrid extreme ultraviolet (EUV) imaging spectrometer comprising:
a radiation source to:
produce EUV radiation;
subject a sample to the EUV radiation;
sequentially photoionize with the EUV radiation:
a first atom at a first location from the sample at a first time; and
a second atom at a second location from the sample at a second time, the first atom and the second atom being field ion evaporated as single atoms from a surface of the sample; and

form photoions from the single atoms subject to photoionization by the EUV radiation;

an ion detector to detect the photoions:
as a function of a time-of-arrival of the photoions at the ion detector after the sample is subjected to the EUV radiation; or
as a function of a position of the photoions at the ion detector;

an electron source to:
produce a plurality of primary electrons;
subject the sample to the primary electrons; and
form scattered electrons from the sample in response to the sample being subjected to the primary electrons; and

an electron detector to detect the scattered electrons:
as a function of a time-of-arrival of the scattered electrons at the electron detector after the sample is subjected to the EUV radiation or the primary electrons; or
as a function of a position of the scattered electrons at the electron detector.

2. The hybrid EUV imaging spectrometer of claim 1 , further comprising:
an extraction electrode disposed proximate to the sample and interposed between the sample and the ion detector,
the extraction electrode comprising an aperture to transmit the photoions from the sample to the ion detector.

3. The hybrid EUV imaging spectrometer of claim 2 , wherein the scattered electrons comprise the primary electrons that are transmitted through the sample, and
the electron detector comprises a transmission electron imaging detector to acquire a shape of the sample.

4. The hybrid EUV imaging spectrometer of claim 2 , wherein the scattered electrons comprise the primary electrons that are diffracted by the sample, and
the electron detector comprises a diffraction detector to acquire a shape of the sample.

5. The hybrid EUV imaging spectrometer of claim 2 , wherein the scattered electrons comprise a plurality of secondary electrons that are emitted by the sample, and
the electron detector comprises a secondary electron detector to acquire a distance of separation between the sample and the extraction electrode.

6. The hybrid EUV imaging spectrometer of claim 2 , wherein the scattered electrons comprise a plurality of backscattered electrons that are backscattered by the sample from the primary electrons, and
the electron detector comprises backscatter electron detector to acquire a distance of separation between the sample and the extraction electrode.

7. The hybrid EUV imaging spectrometer of claim 2 , further comprising:
a stage to dispose and receive the sample.

8. The hybrid EUV imaging spectrometer of claim 2 , further comprising:
an analyzer to:
acquire data from the ion detector and the electron detector;
continuously analyze the data for reconstruction of a shape of the sample and a chemical composition of the sample; and
determine a tomographic shape and composition of the sample.

9. The hybrid EUV imaging spectrometer of claim 2 , further comprising:
a chamber in which the ion detector, the electron source, and the electron detector are disposed and in which the radiation source is optically coupled,
wherein a pressure of the chamber is an ultrahigh vacuum level when the sample is subjected to the EUV radiation.

10. The hybrid EUV imaging spectrometer of claim 2 , further comprising:
a transmission electron microscope comprising the electron source and the electron detector.

11. The hybrid EUV imaging spectrometer of claim 2 , wherein the radiation source comprises a high harmonic generator, an EUV laser, a synchrotron, or a free electron laser.

12. The hybrid EUV imaging spectrometer of claim 2 , wherein a wavelength of the EUV radiation is from 10 nanometers (nm) to 124 nm.

13. The hybrid EUV imaging spectrometer of claim 2 , wherein an EUV absorption length of the EUV radiation by the sample is from sub-nanometer to 500 nanometers.

14. A process for performing hybrid extreme ultraviolet (EUV) imaging spectrometry, the process comprising:
producing, by a radiation source, EUV radiation;
subjecting a sample to the EUV radiation;
sequentially photoionizing with the EUV radiation:
a first atom at a first location from the sample at a first time;
a second atom at a second location from the sample at a second time, the first atom and the second atom being field ion evaporated as single atoms from a surface of the sample;

forming photoions from the single atoms subject to photoionization by the EUV radiation;
detecting, by an ion detector, the photoions:
as a function of a time-of-arrival of the photoions at the ion detector after the sample is subjected to the EUV radiation; or
as a function of a position of the photoions at the ion detector;

producing, by an electron source, a plurality of primary electrons;
subjecting the sample to the primary electrons;
forming scattered electrons from the sample in response to the sample being subjected to the primary electrons;
detecting, by an electron detector, the scattered electrons:
as a function of a time-of-arrival of the scattered electrons at the electron detector after the sample is subjected to the EUV radiation or the primary electrons; or
as a function of a position of the scattered electrons at the electron detector; and

acquiring, by an analyzer, data from the ion detector and the electron detector to image the sample.

15. The process for performing hybrid EUV imaging spectrometry of the sample of claim 14 , further comprising:
reconstructing a shape of the sample; and
determining a chemical composition of the sample as a function of position in the sample.

16. The process for performing hybrid EUV imaging spectrometry of the sample of claim 15 , further comprising:
determining a tomographic shape and composition of the sample.

17. The process for performing hybrid EUV imaging spectrometry of the sample of claim 14 , further comprising:
transmitting, by an extraction electrode, the photoions from the sample to the ion detector,
wherein the extraction electrode comprises an aperture to transmit the photoions, and
the extraction electrode is disposed proximate to the sample and interposed between the sample and the ion detector.

18. The process for performing hybrid EUV imaging spectrometry of the sample of claim 17 , further comprising:
applying a potential difference between the sample and the extraction electrode;
decreasing the potential difference to detect the scattered electrons; and
increasing the potential difference to detect the photoions.

19. The process for performing hybrid EUV imaging spectrometry of the sample of claim 18 , wherein the sample is subjected to the EUV radiation after the potential difference is increased to form the photoions; and
detecting, by the ion detector, the photoions comprises performing time-of-flight mass spectrometry on the photoions.

20. The process for performing hybrid EUV imaging spectrometry of the sample of claim 18 , wherein the sample is subjected to the EUV radiation after the potential difference is increased to form the photoions; and
detecting, by the ion detector, the photoions comprises performing time-o

Assignees

• Us Commerce
• Colorado School Of Mines

Inventors

• Sanford Norman A
• Chiaramonti Debay Ann
• Gorman Brian P
• Diercks David R

Classifications

• G01N23/046 Primary

  using tomography, e.g. computed tomography [CT] · CPC title

• H01J49/0027

  Methods for using particle spectrometers · CPC title

• H01J49/0059 Primary

  by a photon beam, photo-dissociation · CPC title