Spectral purity filter, lithographic apparatus, and method for manufacturing a spectral purity filter
US-9195152-B2 · Nov 24, 2015 · US
US9899112B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9899112-B2 |
| Application number | US-201715437826-A |
| Country | US |
| Kind code | B2 |
| Filing date | Feb 21, 2017 |
| Priority date | Feb 24, 2016 |
| Publication date | Feb 20, 2018 |
| Grant date | Feb 20, 2018 |
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A structure configuring a ridge filter has line symmetry about a line vertical to a depth direction passing the center of the structure. A small structure obtained in such a way that the structure is divided by this line has a bilaterally asymmetric shape about a center line in an iterative direction, and has a point symmetric shape about an intersection between the center line in the iterative direction and the center line in the depth direction. Thicknesses in the iterative direction of an uppermost stream surface and a lowermost stream surface in the depth direction are equal to each other. The structure is configured so that a thick portion in the iterative direction of the uppermost stream surface and the lowermost stream surface is not present in the depth direction.
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The invention claimed is: 1. A ridge filter for widening an energy distribution of a particle beam, comprising: a first structure and a second structure which attenuate energy of the particle beam passing therethrough, wherein when a particle beam incident direction in the ridge filter is defined as a depth direction, and one direction on a plane vertical to the particle beam incident direction is defined as an iterative direction, in the first structure, a first sectional shape on a plane including a straight line parallel to the depth direction and a straight line parallel to the iterative direction is a point symmetric shape in which the center of gravity of the first sectional shape functions as a symmetric point, wherein when an uppermost stream side in the depth direction of the first sectional shape is set to a first side and a lowermost stream side in the depth direction of the first sectional shape is set to a second side, the first side and the second side are parallel to each other, and a length of the first side and the second side is longest in the iterative direction, wherein a quadrangle having the first side and the second side is a parallelogram, wherein the second structure has a shape in which the first structure is inverted by a plane vertical to the depth direction, and wherein a plurality of the first structures and the second structures are arranged in the iterative direction. 2. The ridge filter according to claim 1 , wherein the first structure is located on an upstream side from the second structure in the depth direction. 3. The ridge filter according to claim 1 , further comprising: a base portion that fixes the first structure or the second structure on an uppermost stream surface or a lowermost stream surface in the depth direction of the first structure, or on an uppermost stream surface or a lowermost stream surface in the depth direction of the second structure; and a fixing portion that pinches a plurality of the base portions. 4. The ridge filter according to claim 3 , wherein the ridge filter is an integrally molded product. 5. The ridge filter according to claim 1 , wherein the first structure and the second structure are stacked on each other in the depth direction. 6. The ridge filter according to claim 5 , wherein a second sectional shape on a plane including the first structure and the second structure which are stacked on each other is the same shape as a third sectional shape of a gap on the plane. 7. The ridge filter according to claim 1 , wherein the first structure and the second structure have the same shape when both of these are inverted in the depth direction. 8. The ridge filter according to claim 1 , wherein when viewed in the depth direction, the first structure and the second structure are alternately arranged. 9. A particle beam therapy system comprising; a ridge filter, wherein the ridge filter has a first structure and a second structure which attenuate energy of a particle beam passing therethrough, wherein when a particle beam incident direction in the ridge filter is defined as a depth direction, and one direction on a plane vertical to the particle beam incident direction is defined as an iterative direction, in the first structure, a sectional shape on a plane including a straight line parallel to the depth direction and a straight line parallel to the iterative direction is a point symmetric shape in which the center of gravity of the sectional shape functions as a symmetric point, wherein when an uppermost stream side in the depth direction of the sectional shape is set to a first side and a lowermost stream side in the depth direction of the sectional shape is set to a second side, the first side and the second side are parallel to each other, and a length of the first side and the second side is longest in the iterative direction, wherein a quadrangle having the first side and the second side is a parallelogram, wherein the second structure has a shape in which the first structure is inverted by a plane vertical to the depth direction, and wherein a plurality of the first structures and the second structures are arranged in the iterative direction. 10. A manufacturing method of a ridge filter for widening an energy distribution of a beam, wherein the ridge filter has a first structure and a second structure which attenuate energy of a particle beam passing therethrough, wherein when a particle beam incident direction in the ridge filter is defined as a depth direction, and one direction on a plane vertical to the particle beam incident direction is defined as an iterative direction, in the first structure, a sectional shape on a plane including a straight line parallel to the depth direction and a straight line parallel to the iterative direction is a point symmetric shape in which the center of gravity of the sectional shape functions as a symmetric point, wherein when an uppermost stream side in the depth direction of the sectional shape is set to a first side and a lowermost stream side in the depth direction of the sectional shape is set to a second side, the first side and the second side are parallel to each other, and a length of the first side and the second side is longest in the iterative direction, wherein a quadrangle having the first side and the second side is a parallelogram, wherein the second structure has a shape in which the first structure is inverted by a plane vertical to the depth direction, and wherein a plurality of the first structures and the second structures are arranged in the iterative direction.
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