Structured illumination device and structured illumination microscope device

Patent metadata

Field	Value
Publication number	US-9897790-B2
Application number	US-201614996717-A
Country	US
Kind code	B2
Filing date	Jan 15, 2016
Priority date	Jul 17, 2013
Publication date	Feb 20, 2018
Grant date	Feb 20, 2018

Abstract

A structured illumination device includes: a diffraction unit that diffracts light beams of a plurality of wavelengths that are emitted simultaneously or sequentially by a light source into a plurality of diffracted beams; and an optical system that forms interference fringes on a surface of a sample using the plurality of diffracted beams diffracted by the diffraction unit, the optical system including a first optical system and a second optical system that focuses the plurality of diffracted beams at positions on or near a pupil plane of the first optical system, and a magnification characteristic dY(λ) of the second optical system satisfying the condition of (fo·nw−afλ/P)≦dY(λ)≦(fo·NA−afλ/P), where a=1 (for M=1, 2) or a=2 (for M=3).

First claim

What is claimed is:

1. A structured illumination device, comprising:
a diffraction member that diffracts light emitted by a light source which emits a plurality of wavelengths simultaneously or sequentially; and
an optical system that forms interference fringes on a surface of a sample by interfering at least a part of diffracted light diffracted by the diffraction member,
the optical system including a first optical system and a second optical system that focuses at least a part of the diffracted light on or near a pupil plane of the first optical system, and
a magnification characteristic dY(λ) of the second optical system satisfying the following condition for each wavelength of the plurality of wavelengths:
( fo·nw−afλ/P )≦ dY (λ)≦( fo·NA−afλ/P ),

where a=1 (for M=1, 2) or a=2 (for M=3), M is a number of directions in which the diffraction member has a periodic structure, λ is any wavelength of the plurality of wavelengths, dY(λ) is a difference between an image height 2f·λ 0 /P where λ 0 is a reference wavelength for the plurality of wavelengths and an image height 2f·λ/P where λ is any wavelength of the plurality of wavelengths, fo is a focal length of the first optical system for the wavelength λ, f is a focal length of the second optical system for the wavelength λ, P is a pitch of the diffraction member, NA is a numerical aperture of the first optical system, and nw is a refractive index of the wavelength λ of the sample.

2. The structured illumination device according to claim 1 ,
wherein the diffraction member can be inserted into or removed from a light beam path, and
wherein the second optical system is interchangeable with another second optical system that has different magnification characteristics.

3. The structured illumination device according to claim 2 , wherein a component of the second optical system to be interchanged is one of the components of the second optical system.

4. The structured illumination device according to claim 3 , wherein at least the component of the second optical system to be interchanged includes a cemented lens.

5. The structured illumination device according to claim 3 , further comprising:
a control unit that switches the periodic structure of the diffraction member.

6. The structured illumination device according to claim 2 , wherein at least the component of the second optical system to be interchanged includes a cemented lens.

7. The structured illumination device according to claim 6 , further comprising:
a control unit that switches the periodic structure of the diffraction member.

8. The structured illumination device according to claim 2 , further comprising:
a control unit that switches the periodic structure of the diffraction member.

9. The structured illumination device according to claim 1 , further comprising:
a control unit that switches the periodic structure of the diffraction member.

10. The structured illumination device according to claim 1 , further comprising:
a position adjusting unit for adjusting a position at which at least a part of the diffracted light is focused in an optical axis direction of the first optical system.

11. The structured illumination device according to claim 1 , further comprising:
a phase shifting unit for shifting a phase of the interference fringes.

12. The structured illumination device according to claim 1 , further comprising:
a light selection unit that selects a diffracted light in a predetermined direction from the diffracted light in a plurality of directions diffracted by the diffraction member,
wherein the diffraction member has a periodic structure in a plurality of different directions within a plane orthogonal to an optical axis of the optical system.

13. The structured illumination device according to claim 1 , further comprising:
a rotation unit that rotates the diffracted light about an optical axis,
wherein the diffraction member has a periodic structure in a single direction within a plane orthogonal to the optical axis of the optical system.

14. The structured illumination device according to claim 1 , wherein the plurality of wavelengths are within a range of 400 to 700 nm.

15. The structured illumination device according to claim 1 , further comprising:
a switching unit that inserts and removes an optical member into and from a light beam path between the diffraction member and the pupil plane in order to switch light that illuminates a sample between structured illumination light that forms interference fringes and another type of illumination light emitted by a second light source that is different from the light source.

16. A structured illumination microscope device, comprising:
the structured illumination device described in claim 1 ; and
an imaging optical system that uses light observed from the sample when modulated by the interference fringes to form an image on a light detector.

17. The structured illumination microscope device according to claim 16 , further comprising:
a processing unit that generates a demodulated image of the sample using images generated by the light detector.

18. A structured illumination device, comprising:
a diffraction member that diffracts light emitted by a light source which emits light of a plurality of wavelengths simultaneously or sequentially; and
an optical system that forms interference fringes on a surface of a sample by interfering at least a part of a diffracted light diffracted by the diffraction member,
the optical system including a first optical system and a second optical system that focuses the at least a part of the diffracted light on or near a pupil plane of the first optical system, and
a magnification characteristic dY(λ) of the second optical system satisfying the following condition for each wavelength of the plurality of wavelengths:
(0.75 fo·NA−afλ/P )≦ dY (λ)≦( fo·NA−afλ/P ),

where a=1 (for M=1, 2) or a=2 (for M=3), M is a number of directions in which the diffraction memeber has a periodic structure, λ is any wavelength of the plurality of wavelengths, dY(λ) is a difference between an image height 2f·λ 0 /P where λ 0 is a reference wavelength for the plurality of wavelengths and an image height 2f·λ/P where λ is any wavelength of the plurality of wavelengths, fo is a focal length of the first optical system for the wavelength λ, f is a focal length of the second optical system for the wavelength λ, P is a pitch of the diffraction member, and NA is a numerical aperture of the first optical system.

Assignees

• Nikon Corp

Inventors

• Nakayama Hiroaki
• Ouchi Yumiko

Classifications

• G01N21/64

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• G02B27/58

  Optics for apodization or superresolution; Optical synthetic aperture systems · CPC title

• G01N21/6428

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