Energy beam size verification

Patent metadata

Field	Value
Publication number	US-9897513-B2
Application number	US-201715495318-A
Country	US
Kind code	B2
Filing date	Apr 24, 2017
Priority date	Aug 20, 2014
Publication date	Feb 20, 2018
Grant date	Feb 20, 2018

Abstract

A method for verifying a size of an energy beam spot, said method comprising the steps of providing a first beam spot having a predetermined size and power at a first position on a work piece, varying a focus and/or astigmatism lens setting for said first beam spot until max intensity for the beam spot is detected, comparing the detected settings of said focus lens and/or astigmatism lens for said maximum intensity of the beam spot with stored settings of said focus lens and/or astigmatism lens for the beam spot with said predetermined size and power, repeating step a-c for different predetermined beam powers, repeating step a-d for different positions on said work piece, wherein said beam spot size is verified if each detected settings of said focus lens and/or astigmatism lens are deviating less than a predetermined value from corresponding stored settings of said focus lens and/or astigmatism lens.

First claim

That which is claimed:

1. A computer program product comprising at least one non-transitory computer readable medium having stored thereon computer-readable program code portions, the computer-readable program code portions comprising one or more executable portions configured for:
(a) generating a first energy beam spot from a first energy beam source, the first energy beam spot having a predetermined size and power at a first position on a work piece,
(b) varying at least one of a focus lens setting or an astigmatism lens setting for said first energy beam spot until a maximum intensity of the first energy beam spot is detected,
(c) comparing at least one setting of said focus lens and/or astigmatism lens associated with said detected maximum intensity of the first energy beam spot with corresponding stored settings of said focus lens and/or astigmatism lens associated with said predetermined size and power of the first energy beam spot, the stored settings being stored within a memory,
(d) repeating steps a-c for different predetermined beam powers, and
(e) repeating steps a-d for different positions on said work piece, and verifying said first energy beam spot size by verifying that each settings of said focus lens and/or astigmatism lens settings associated with the detected maximum intensity deviate less than a predetermined value from the corresponding stored settings of said focus lens and/or astigmatism lens.

2. The computer program product of claim 1 , wherein said predetermined energy beam spot size is a minimum spot size.

3. The computer program product of claim 1 , wherein the repeating step for different positions is performed before the repeating step for different predetermined beam powers.

4. The computer program product of claim 1 , wherein the first energy beam spot is an electron beam spot.

5. The computer program product of claim 4 , wherein said astigmatism lens and/or focus lens settings comprise a coil current setting to at least one astigmatism coil and/or at least one focus coil respectively.

6. The computer program product of claim 1 , wherein the first energy beam spot is a laser beam spot.

7. The computer program product of claim 6 , wherein said astigmatism lens and/or focus lens settings comprise a positioning along an optical axis of at least one astigmatism lens and/or at least one focus lens respectively.

8. The computer program product of claim 1 , wherein the one or more executable portions are further configured for sending a warning signal/message when any one of said settings of said focus lens and/or astigmatism lens associated with the detected maximum intensity deviate more than a predetermined value from the corresponding stored settings of said focus lens and/or astigmatism lens.

9. The computer program product of claim 1 , wherein the one or more executable portions are further configured for:
providing a second energy beam spot from a second energy beam source, the second energy beam spot having a predetermined size and power at said first position on said work piece,
varying a focus and/or astigmatism lens setting for said second energy beam spot until a maximum intensity for said second energy beam spot is detected, and
comparing said detected maximum intensity for said first energy beam spot with said detected maximum intensity for said second energy beam spot, and verifying said first and second energy beam spot sizes by verifying that said detected maximum intensity of said first energy beam spot deviates less than a predetermined value from said detected maximum intensity of said second energy beam spot.

10. The computer program product of claim 9 , wherein said first and second energy beam spots have equal maximum beam spot powers.

11. The computer program product of claim 1 , wherein the one or more executable portions are further configured for:
providing said first energy beam spot at said first position during a first predetermined time duration where a first intensity is detected,
providing said first energy beam spot at said first position during a second predetermined time duration where a second intensity is detected, and
calculating a ratio between said first and second intensities, and verifying said first energy beam spot size and/or beam spot power by verifying that said calculated ratio between said first and second intensities deviates less than a predetermined value from a corresponding calibrated ratio of said first beam energy spot with said first and second time durations.

12. The computer program product of claim 11 , wherein the steps recited therein are repeated for different beam powers and/or time durations.

13. The computer program product of claim 1 , wherein the one or more executable portions are further configured for receiving and storing, within one or more memory storage areas, a model of at least one three-dimensional article.

14. The computer program product of claim 1 , the one or more executable portions are configured for verifying a deflection speed of the first energy beam spot by:
generating a predetermined pattern on a work table with said first energy beam spot while deflecting said first energy beam spot with a first deflection speed;
detecting first positions of said first energy beam spot on said work table created with said first deflection speed;
generating said predetermined pattern on the work table with said first energy beam spot while deflecting said first energy beam spot with a second deflection speed;
detecting second positions of said first energy beam spot on said work table created with said second deflection speed; and
comparing said first and second positions, verifying that each one of said first positions deviate less than a predetermined distance from corresponding ones of said second positions.

15. The computer program product of claim 1 , wherein the first position is detected via utilization of at least one of an IR-camera, a CCD-camera, a digital camera, a CMOS camera, or a NIR-camera.

16. A non-transitory computer readable medium having stored thereon a program element configured and arranged when executed on a computer to implement a method for automatically verifying a size of at least one energy beam spot, said method comprising the steps of:
(a) generating a first energy beam spot from a first energy beam source, the first energy beam spot having a predetermined size and power at a first position on a work piece,
(b) varying at least one of a focus lens setting or an astigmatism lens setting for said first energy beam spot until a maximum intensity of the first energy beam spot is detected,
(c) comparing at least one setting of said focus lens and/or astigmatism lens associated with said detected maximum intensity of the first energy beam spot with corresponding stored settings of said focus lens and/or astigmatism lens associated with said predetermined size and power of the first energy beam spot, the stored settings being stored within a memory,
(d) repeating steps a-c for different predetermined beam powers, and
(e) repeating steps a-d for different positions on said work piece, and verifying said first energy beam spot size by verifying that each settings of said focus lens and/or astigmatism lens settings associated with the detected maximum intensity deviate less than a predetermined value from the corresponding stored settings of said focus lens and/or astigmatism lens.

17. The non-transitory computer readable medium of claim 16 , wherein the first position is detected via utilization of at least one of an IR-camera, a CCD-camera,

Assignees

• Arcam Ab

Inventors

• Snis Anders

Classifications

• G01M11/02 Primary

  Testing optical properties · CPC title

• B23K15/02 Primary

  Control circuits therefor · CPC title

• B22F12/90

  Means for process control, e.g. cameras or sensors · CPC title

• B22F12/52

  Hoppers · CPC title

• B22F10/31

  Calibration of process steps or apparatus settings, e.g. before or during manufacturing · CPC title