Apparatus for treating substrate

Patent metadata

Field	Value
Publication number	US-9895645-B2
Application number	US-201615014051-A
Country	US
Kind code	B2
Filing date	Feb 3, 2016
Priority date	Sep 21, 2015
Publication date	Feb 20, 2018
Grant date	Feb 20, 2018

Abstract

An apparatus for treating a substrate, including a chamber; a substrate treater in the chamber; a purifier connected to the chamber, the purifier to purify polluted air in the chamber; a light source in the chamber, the light source to irradiate light; and a light-shield to block the light irradiated by the light source from arriving at the substrate treater.

First claim

What is claimed is:

1. An apparatus for treating a substrate, comprising:
a sealable chamber;
a substrate treater in the chamber;
a purifier connected to the chamber, the purifier to purify polluted air in the chamber;
a light or microwave source in the chamber, the light or microwave source to irradiate light or microwaves inside the chamber; and
a light or microwave-shield to block the light or microwaves irradiated by the light or microwave source from arriving at the substrate treater,
wherein the substrate treater is a printing device including a plurality of nozzles.

2. The apparatus as claimed in claim 1 , wherein:
the polluted air contains moisture and oxygen, and
the purifier includes a moisture absorption portion and an oxygen removal portion, the moisture absorption portion to remove the moisture from the polluted air and the oxygen removal portion to remove the oxygen from the polluted air.

3. The apparatus as claimed in claim 2 , wherein the moisture absorption portion includes a first filter, the first filter including a moisture absorbent.

4. The apparatus as claimed in claim 3 , wherein the moisture absorbent is a molecular sieve.

5. The apparatus as claimed in claim 2 , wherein the oxygen removal portion includes a second filter, the second filter including a copper catalyst.

6. The apparatus as claimed in claim 1 , wherein the light or microwave source emits ultraviolet light, infrared light, or microwaves.

7. The apparatus as claimed in claim 1 , wherein the light or microwave-shield is a film covering the plurality of nozzles.

8. The apparatus as claimed in claim 7 , wherein:
the plurality of nozzles include jet orifices, and
the light or microwave-shield covers entire surfaces of the plurality of nozzles except for the jet orifices.

9. The apparatus as claimed in claim 1 , wherein the light or microwave-shield is on a path of the light or microwaves irradiated by the light or microwave source, the light or microwave-shield to block the light or microwaves irradiated by the light or microwave source from being directly applied onto the substrate treater.

10. The apparatus as claimed in claim 1 , further comprising:
openings formed at one side of the chamber; and
gloves extending from the openings, respectively, into the chamber.

11. The apparatus as claimed in claim 1 , further comprising a heater in the chamber, the heater to heat inner surfaces of the chamber.

12. The apparatus as claimed in claim 1 , further comprising an entrance to open or close an inner space of the chamber.

13. The apparatus as claimed in claim 12 , further comprising a transferrer to transfer a target object to be treated in response to the target object being introduced through the entrance.

14. The apparatus as claimed in claim 12 , further comprising a sub-chamber connected to the entrance.

15. The apparatus as claimed in claim 14 , wherein the sub-chamber includes a sub-entrance and an atmosphere controller, the sub-entrance to open or close the sub-chamber and the atmosphere controller to adjust an atmosphere in the sub-chamber.

16. The apparatus as claimed in claim 15 , wherein the atmosphere controller includes a vacuum forming portion and a gas injection portion, the vacuum forming portion to form a vacuum in the sub-chamber and the gas injection portion to inject a gas into the sub-chamber.

17. The apparatus as claimed in claim 1 , wherein the light or microwave source emits infrared light or microwaves.

Assignees

• Samsung Display Co Ltd

Inventors

• Kang Jin Goo

Classifications

• B01D2259/40098

  with other heating means · CPC title

• B01D2258/0216

  from CVD treatment or semi-conductor manufacturing · CPC title

• B01D2253/1122

  Metals · CPC title

• B01D2253/108

  Zeolites · CPC title

• B01D53/869

  Multiple step processes · CPC title