Method for manufacturing semiconductor device

Patent metadata

Field	Value
Publication number	US-9893142-B2
Application number	US-201615083688-A
Country	US
Kind code	B2
Filing date	Mar 29, 2016
Priority date	Jul 15, 2015
Publication date	Feb 13, 2018
Grant date	Feb 13, 2018

Abstract

A method of manufacturing a semiconductor device includes forming a lower metal layer, forming an interfacial oxide film on the lower metal layer, providing a metal precursor on the interfacial oxide film at a first pressure to adsorb the metal precursor into the interfacial oxide film, performing a first purge process at a second pressure to remove the unadsorbed metal precursor, the second pressure lower than the first pressure, providing an oxidizing gas at the first pressure to react with the adsorbed metal precursor, performing a second purge process at the second pressure to remove the unreacted oxidizing gas and form a dielectric film, and forming an upper metal layer on the dielectric film.

First claim

What is claimed is:

1. A method of manufacturing a semiconductor device, the method comprising:
forming a lower metal layer;
forming an interfacial oxide film on the lower metal layer;
providing a metal precursor on the interfacial oxide film at a first pressure to adsorb a first portion of the metal precursor into the interfacial oxide film;
performing a first purge process at a second pressure to remove a second portion of a remaining unadsorbed metal precursor, the second pressure lower than the first pressure;
preforming a first vacuum process at a third pressure lower than the second pressure;
providing a first portion of an oxidizing gas at the first pressure to react with the first portion of the metal precursor;
performing a second purge process at the second pressure to remove a second portion of a remaining unreacted oxidizing gas and form a dielectric film; and
forming an upper metal layer on the dielectric film.

2. The method of claim 1 , wherein the providing a metal precursor, the performing a first purge process and the performing a first vacuum process are performed sequentially and repeatedly.

3. The method of claim 1 , further comprising:
performing a second vacuum process at the third pressure after the forming a dielectric film.

4. The method of claim 3 , wherein the providing an oxidizing gas, the performing a second purge process and the performing a second vacuum process are performed sequentially and repeatedly.

5. The method of claim 1 , wherein the second pressure is 10 Pa or less.

6. The method of claim 1 , wherein the forming a lower metal layer forms the lower metal layer to have a cylindrical shape.

7. The method of claim 1 , wherein the forming a interfacial oxide film forms the interfacial oxide film at a fourth pressure lower than the first pressure and higher than the second pressure.

8. The method of claim 1 , wherein the first pressure is at least 10 times more than the second pressure.

9. A method of manufacturing a semiconductor device, the method comprising:
forming a lower electrode having a cylindrical shape, the lower electrode including a titanium nitride film;
forming an interfacial film on the lower electrode, the interfacial film including a titanium oxide film;
providing a zirconium precursor on the interfacial film to adsorb the zirconium precursor into the interfacial film;
performing a first purge process to remove a remaining portion of an unadsorbed zirconium precursor at a pressure of 10 Pa or less;
preforming a first vacuum process at a pressure of 5 Pa or less;
providing an oxidizing gas to react with the zirconium precursor adsorbed into the interfacial film to form a dielectric film; and
forming an upper electrode on the dielectric film.

10. The method of claim 9 , wherein the providing a zirconium precursor, the performing a first purge process and the performing a first vacuum process are performed sequentially and repeatedly.

11. The method of claim 9 , further comprising:
performing a second purge process to remove a portion of the oxidizing gas that does not react with the zirconium precursor at the pressure of 10 Pa or less after the providing an oxidizing gas.

12. The method of claim 11 , further comprising:
performing a second vacuum process at the pressure of 5 Pa or less after the performing a second purge process.

13. The method of claim 12 , wherein the providing an oxidizing gas, the performing a second purge process and the performing a second vacuum process are performed sequentially and repeatedly.

14. A method comprising:
forming an interfacial oxide film on a cylindrical lower electrode;
providing a metal precursor on the interfacial oxide film to adsorb a first portion of the metal precursor into the interfacial oxide film;
performing a first purge process to remove a second portion of the metal precursor that remains unadsorbed by the interfacial oxide film at a first pressure of 10 Pa or less;
performing a first vacuum process at a second pressure less than the first pressure;
providing a first portion of an oxidizing gas to react with the first portion of the metal precursor to form a dielectric film;
performing a second purge process to remove a second portion of the oxidizing gas that does not react with the metal precursor at the first pressure; and
performing a second vacuum process at the second pressure.

15. The method of claim 14 , wherein the second pressure is 5 Pa or less.

16. The method of claim 14 , wherein the providing a metal precursor, the performing a first purge process and the performing a first vacuum process are performed sequentially and repeatedly.

17. The method of claim 14 , wherein the providing an oxidizing gas, the performing a second purge process and the performing a second vacuum process are performed sequentially and repeatedly.

18. The method of claim 14 , further comprising:
forming an upper electrode on the dialect film.

Assignees

• Samsung Electronics Co Ltd

Inventors

• Ahn Se Hyoung
• Park Young Geun
• Seo Jong Bom
• Choi Jae Hyoung

Classifications

• H10P14/69397

  the material containing two or more metal elements · CPC title

• H10P14/69395

  the material containing zirconium, e.g. ZrO2 · CPC title

• H10P14/69394

  the material containing titanium, e.g. TiO2 · CPC title

• H10P14/69393

  the material containing tantalum, e.g. Ta2O5 · CPC title

• H10P14/69392

  the material containing hafnium, e.g. HfO2 · CPC title