Sensing element for semiconductor

Patent metadata

Field	Value
Publication number	US-9891640-B2
Application number	US-201313918842-A
Country	US
Kind code	B2
Filing date	Jun 14, 2013
Priority date	Jun 14, 2013
Publication date	Feb 13, 2018
Grant date	Feb 13, 2018

Abstract

An embodiment relates to a device comprising a high-side semiconductor, a low-side semiconductor, a first sensing element arranged adjacent to the high-side semiconductor. The first sensing element is isolated from the high-side semiconductor and the first sensing element is directly connectable to a processing device.

First claim

What is claimed is:

1. A device comprising
a high-side semiconductor,
a low-side semiconductor,
a first sensing element arranged adjacent to the high-side semiconductor, wherein the first sensing element is isolated from the high-side semiconductor, wherein the first sensing element is directly connectable to a single processing device, and
a second sensing element arranged adjacent to the low-side semiconductor, wherein the second sensing element is isolated from the low-side semiconductor and the second sensing element is directly connectable to the single processing device, wherein the first sensing element is embedded in or with the high-side semiconductor and the second sensing element is embedded in or with the low-side semiconductor, portions of the first sensing element and the second sensing element are isolated from the high-side semiconductor and from the low-side semiconductor via at least one lateral isolation and via at least one vertical isolation, the at least one vertical isolation comprises an insulating layer, portions of the insulating layer between the first sensing element and the high-side semiconductor are thicker than surrounding portions of the insulating layer on the high-side semiconductor, and portions of the insulating layer between the second sensing element and the low-side semiconductor are thicker than surrounding portions of the insulating layer on the low-side semiconductor.

2. The device according to claim 1 , wherein the lateral isolation comprises an isolation of at least 15 μm.

3. The device according to claim 1 , wherein the vertical isolation comprises an isolation in the range of 1.5 μm to 2 μm.

4. The device according to claim 1 , wherein the insulating layer comprises at least one of the following:
an oxide layer;
a thermally oxidized silicon dioxide;
a nitride layer.

5. The device according to claim 1 , comprising the single processing device, wherein the first sensing element and the second sensing element are each directly connected to the single processing device.

6. The device of claim 5 , wherein the single processing device is a microcontroller.

7. The device according to claim 1 , wherein the high-side semiconductor and/or the low-side semiconductor comprises at least one of the following:
an electronic switch;
a bipolar transistor;
a bipolar junction transistor;
a diode;
a junction field-effect transistor;
an IGBT;
a MOSFET.

8. The device according to claim 1 , wherein the single processing device is at least one of the following:
a processor;
a controller;
a microcontroller;
a signal processing unit.

9. The device according to claim 1 , wherein the single processing device is connected to a reference potential.

10. The device according to claim 9 , wherein the reference potential is ground.

11. The device according to claim 9 , wherein at least one pin of the high-side semiconductor is at least temporarily at a voltage in a range between 30 Volt and 1000V with regard to ground.

12. The device according to claim 1 , wherein the first sensing element and/or the second sensing element comprises at least one of the following:
a temperature sensor;
an integrated temperature-dependent sensor;
a hall sensor;
a pressure sensor;
a current sensor.

13. The device according to claim 1 , wherein the first sensing element and/or the second sensing element comprises at least one diode as a temperature sensor.

14. The device according to claim 1 , wherein the first sensing element and/or the second sensing element comprises a body diode of a transistor.

15. The device according to claim 1 , wherein the high-side semiconductor and the low-side semiconductor are arranged in a half-bridge configuration or are part of a full-bridge configuration.

16. The device of claim 1 , wherein the portions of the insulating layer between the first sensing element and the high-side semiconductor extend below a top surface of a substrate of the high-side semiconductor, and portions of the insulating layer between the second sensing element and the low-side semiconductor extend below a top surface of a substrate of the low-side semiconductor.

17. A circuit comprising:
a high-side semiconductor,
a low-side semiconductor,
a first sensing element embedded in or with the high-side semiconductor, wherein the first sensing element is isolated from the high-side semiconductor;
a single processing device, wherein the first sensing element is directly connected to the single processing device; and
a second sensing element embedded in or with the low-side semiconductor, wherein the second sensing element is isolated from the low-side semiconductor and the second sensing element is directly connected to the single processing device, wherein portions of the first sensing element and the second sensing element are isolated from the high-side semiconductor and from the low-side semiconductor via at least one lateral isolation and via at least one vertical isolation, the at least one vertical isolation comprises an insulating layer, portions of the insulating layer between the first sensing element and the high-side semiconductor are thicker than surrounding portions of the insulating layer on the high-side semiconductor, and portions of the insulating layer between the second sensing element and the low-side semiconductor are thicker than surrounding portions of the insulating layer on the low-side semiconductor.

18. The circuit according to claim 17 ,
wherein the high-side semiconductor and the low-side semiconductor are electronic switches or wherein at least one of the high-side semiconductor and the low-side semiconductor comprises a diode,
which are connected in series,
which are controlled via the single processing device.

19. The circuit according to claim 18 for use in a half bridge or full bridge arrangement.

20. The circuit of claim 17 , wherein the single processing device is a microcontroller.

21. A method for controlling a high-side semiconductor and a low-side semiconductor,
which are connected in series in a half bridge arrangement,
with a first sensing element embedded in or with the high-side semiconductor, wherein the first sensing element is isolated from the high-side semiconductor,
with a second sensing element embedded in or with the low-side semiconductor, wherein the second sensing element is isolated from the low-side semiconductor,
with a single processing device that is arranged to control the high-side semiconductor and the low-side semiconductor and is directly connected to the first sensing element and to the second sensing element,
wherein said single processing device is arranged to perform the method, comprising:
determining a first information based on a signal provided by the first sensing element;
determining a second information based on a signal provided by the second sensing element; and
controlling the high-side semiconductor and the low-side semiconductor based on the first information and on the second information, wherein portions of the first sensing element and the second sensing element are isolated from the high-side semiconductor and from the low-side semiconductor via at least one lateral isolation and via at least one vertical isolation, the at least one vertical isolation comprises an insulating layer, portions of the insulating layer between the first sensing element and the high-side semiconductor are thicker than surrounding portions of the insulating layer on the high-side semicondu

Assignees

• Infineon Technologies Ag

Inventors

• Willkofer Stefan
• Kiep Andreas

Classifications

• H10D84/811

  Combinations of field-effect devices and one or more diodes, capacitors or resistors · CPC title

• H10W40/00 Primary

  Arrangements for thermal protection or thermal control (integrated devices comprising arrangements for thermal protection H10D89/60) · CPC title

• H01L27/0629

  Electricity · mapped topic

• H01L2924/0002

  Electricity · mapped topic

• H01L27/02

  Electricity · mapped topic