Graphene-based magnetic hall sensor for fluid flow analysis at nanoscale level

Patent metadata

Field	Value
Publication number	US-9891294-B2
Application number	US-201715419149-A
Country	US
Kind code	B2
Filing date	Jan 30, 2017
Priority date	Oct 14, 2015
Publication date	Feb 13, 2018
Grant date	Feb 13, 2018

Abstract

A method of detecting a particle comprises magnetizing a particle using an AC magnetic field; generating an AC voltage in a sensing device having a conductive substantially 2-dimensional lattice structure from the magnetized particle; superimposing a DC magnetic field on the generated AC voltage in the sensing device; and measuring an AC Hall voltage at the sensing device.

First claim

What is claimed is:

1. An apparatus, comprising:
a first coil for providing a DC magnetic field;
a second coil for providing an AC magnetic field; and
a conductive substantially 2-dimensional lattice structure proximate the first coil and the second coil and being biased with a voltage;
wherein the first coil, and the second coil, and the conductive substantially 2-dimensional lattice structure are separated by dielectric layers.

2. The apparatus of claim 1 , further comprising a first set of contacts disposed in contact with the conductive substantially 2-dimensional lattice structure.

3. The apparatus of claim 1 , further comprising a first set of vias in contact with the first coil and a second set of vias in contact with the second coil.

4. The apparatus of claim 1 , wherein the conductive substantially 2-dimensional lattice structure comprises graphene.

5. The apparatus of claim 1 , wherein the conductive substantially 2-dimensional lattice structure comprises MoS 2 , WSe 2 , black phosphorous, carbon nanotubes, Si nanowire, or a combination of any of the foregoing materials.

6. The apparatus of claim 1 , wherein at least one of the dielectric layers is disposed on a substrate of glass, quartz, SiC, silicon nitride, plastic, or a combination of any of the foregoing materials.

7. The apparatus of claim 1 , wherein at least one of the dielectric layers comprises SiO 2 , Al 2 O 3 , HfO, or a combination of any of the foregoing materials.

8. The apparatus of claim 1 , wherein the second coil is a thin linear element.

Assignees

• IBM

Inventors

• Engel Michael
• Neumann Barros Ferreira Rodrigo
• Steiner Mathias

Classifications

• G01R33/07

  Hall effect devices · CPC title

• G01F1/708

  Measuring the time taken to traverse a fixed distance · CPC title

• G01R33/1269

  of molecules labeled with magnetic beads (magnetic particles for bio assay G01N33/54326) · CPC title

• G01R33/072 Primary

  Constructional adaptation of the sensor to specific applications · CPC title

• G01N27/745

  for detecting magnetic beads used in biochemical assays (concerning the assays G01N33/54326; sensors therefor G01R33/1269; automatic analysers therefor G01N35/0098) · CPC title