Microdevices and methods of manufacture

Patent metadata

Field	Value
Publication number	US-9890259-B2
Application number	US-201615143626-A
Country	US
Kind code	B2
Filing date	May 1, 2016
Priority date	Aug 9, 2012
Publication date	Feb 13, 2018
Grant date	Feb 13, 2018

Abstract

Illustrative embodiments of microdevices and methods of manufacturing such microdevices are disclosed. In at least one illustrative embodiment, one or more microdevices may be formed on a substrate, with each of the one or more microdevices comprising a body micromachined from a continuous film formed on the substrate, the continuous film having a controlled microstructure of cellulose nanocrystals (CNC).

First claim

The invention claimed is:

1. Apparatus comprising:
one or more microdevices formed on a substrate, each of the one or more microdevices comprising a body micromachined from a continuous film formed on the substrate, the continuous film having a controlled microstructure of cellulose nanocrystals (CNC).

2. The apparatus of claim 1 , wherein the controlled microstructure of the CNC is an isotropic microstructure.

3. The apparatus of claim 1 , wherein the controlled microstructure of the CNC comprises one or more anisotropic domains and one or more isotropic domains.

4. The apparatus of claim 1 , wherein the controlled microstructure of the CNC comprises one or more anisotropic domains retained from a liquid crystalline microstructure of a liquid dispersion used to form the solid film.

5. The apparatus of claim 1 , wherein the CNC have a tailored surface chemistry configured to control at least one of a mechanical property, an electrical property, an optical property, and a biological property of the one or more microdevices.

6. Apparatus comprising:
one or more microdevices formed on a substrate, each of the one or more microdevices comprising a body processed from a cellulose nanocrystal (CNC) film formed on the substrate.

7. The apparatus of claim 6 , wherein the CNC film has a controlled isotropic microstructure.

8. The apparatus of claim 6 , wherein the CNC film has a controlled microstructure comprising one or more anisotropic domains.

9. The apparatus of claim 8 , wherein the controlled microstructure of the CNC film further comprises one or more isotropic domains.

10. The apparatus of claim 6 , wherein the CNC film comprises CNC with tailored surface chemistry configured to control at least one of a mechanical property, an electrical property, an optical property, and a biological property of the CNC film.

11. The apparatus of claim 6 , wherein at least one of a mechanical property, an electrical property, an optical property, and a biological property of at least one domain of the CNC film has a first value along a first direction that is parallel to the substrate and a second value along a second direction that is both parallel to the substrate and perpendicular to the first direction, the first value being different from the second value.

12. The apparatus of claim 6 , wherein at least one of a mechanical property, an electrical property, an optical property, and a biological property of the CNC film has a substantially constant value throughout at least one domain of the CNC film.

13. The apparatus of claim 6 , wherein the CNC film formed on the substrate has an average thickness between about 0.1 micrometers and about 100 micrometers.

14. The apparatus of claim 13 , wherein an average roughness of the CNC film is less than about 500 nanometers.

15. Apparatus for use in manufacturing microdevices, the apparatus comprising:
a continuous solid film formed on a substrate, wherein the continuous solid film has a controlled microstructure of cellulose nanocrystals (CNC) comprising one or more isotropic domains.

16. The apparatus of claim 15 , wherein the controlled microstructure of the continuous solid film further comprises one or more anisotropic domains.

17. The apparatus of claim 15 , wherein the CNC have tailored surface chemistry configured to control at least one of a mechanical property, an electrical property, an optical property, and a biological property of the continuous solid film.

18. The apparatus of claim 15 , wherein at least one of a mechanical property, an electrical property, an optical property, and a biological property of at least one domain of the continuous solid film has a first value along a first direction that is parallel to the substrate and a second value along a second direction that is both parallel to the substrate and perpendicular to the first direction, the first value being different from the second value.

19. The apparatus of claim 15 , wherein at least one of a mechanical property, an electrical property, an optical property, and a biological property of the continuous solid film has a substantially constant value throughout at least one domain of the continuous solid film.

Assignees

• Univ Auburn
• Univ Clemson

Inventors

• Ashurst William Robert
• Davis Virginia A
• Kitchens Christopher L

Classifications

• C09K13/00

  Etching, surface-brightening or pickling compositions (for glass C03C15/00, {C03C25/66; for mortars, concrete, artificial or natural stone or ceramics C04B41/5338}; for metallic material C23F, C23G1/00, C25F1/00; {for semi-conductors H10P52/40}) · CPC title

• Y10T428/24851

  Intermediate layer is discontinuous or differential · CPC title

• B81C1/00158

  Diaphragms, membranes (manufacture process for semi-permeable inorganic membranes B01D67/0039) · CPC title

• B81C1/0015

  Cantilevers (switches using MEMS H01H1/0036; electrostatic relays using micromechanics H01H59/0009; microelectro-mechanical resonators H03H9/02244) · CPC title

• C09K2019/523

  Organic solid particles · CPC title