Method for producing differently doped semiconductors

Patent metadata

Field	Value
Publication number	US-9887313-B2
Application number	US-201515307689-A
Country	US
Kind code	B2
Filing date	Apr 17, 2015
Priority date	Apr 29, 2014
Publication date	Feb 6, 2018
Grant date	Feb 6, 2018

Abstract

The present invention relates to a liquid-phase method for doping a semiconductor substrate, characterized in that a first composition containing at least one first dopant is applied to one or more regions of the surface of the semiconductor substrate, in order to create one or more region(s) of the surface of the semiconductor substrate coated with the first composition; a second composition containing at least one second dopant is applied to one or more regions of the surface of the semiconductor substrate, in order to create one or more region(s) of the surface of the semiconductor substrate coated with the second composition, where the one or more region(s) coated with the first composition and the one or more region(s) coated with the second composition are different and do not overlap significantly and where the first dopant is an n-type dopant and the second dopant is a p-type dopant or vice versa; the regions of the surface of the semiconductor substrate coated with the first composition and with the second composition are each fully or partly activated; optionally, the unactivated regions of the surface of the semiconductor substrate coated with the first composition and with the second composition are each oxidized; and the semiconductor substrate is heated to a temperature at which the dopants diffuse out of the coating into the semiconductor substrate. The invention further relates to the semiconductor obtainable by the method and to the use thereof, especially in the production of solar cells.

First claim

The invention claimed is:

1. A liquid-phase method for doping a semiconductor substrate, the method comprising:
applying a first composition comprising at least one first dopant to one or more regions of a surface of the semiconductor substrate, thereby obtaining one or more regions of the surface of the semiconductor substrate comprising a coating of the first composition;
applying a second composition comprising at least one second dopant to one or more regions of a surface of the semiconductor substrate, thereby obtaining one or more regions of the surface of the semiconductor substrate comprising a coating of the second composition,
wherein the one or more regions comprising a coating of the first composition and the one or more regions comprising a coating of the second composition are different and do not overlap significantly, and
wherein the first dopant is an n-type dopant and the second dopant is a p-type dopant or the first dopant is a p-type dopant and the second dopant is an n-type dopant;

fully or partially activating the one or more regions of the surface of the semiconductor substrate comprising a coating of the first composition, the one or more regions of the surface of the semiconductor substrate comprising a coating of the second composition, or both;
optionally oxidizing one or more regions of the surface of the semiconductor substrate comprising a coating of the first composition that are not activated, one or more regions of the surface of the semiconductor substrate comprising a coating of the second composition that are not activated, or both;
optionally applying a third composition which does not comprise a dopant to the one or more regions of the surface of the semiconductor comprising a coating of the first composition that are at least one selected from the group consisting of fully activated, partially activated, and not activated, the one or more regions of the surface of the semiconductor comprising a coating of the second composition that are at least one selected from the group consisting of fully activated, partially activated, and not activated, or both; and
heating the semiconductor substrate to a temperature at which the first dopant diffuses out of the coating comprising the first composition into the semiconductor substrate and the second dopant diffuses out of the coating comprising the second composition into the semiconductor substrate.

2. The method according to claim 1 , wherein the fully or partially activating the one or more regions comprising a coating of the first composition, the optionally oxidizing one or more regions of the surface of the semiconductor substrate comprising a coating of the first composition that are not activated, or both is performed prior to the applying of the second composition, the fully or partially activating the one or more regions of the surface of the semiconductor substrate comprising a coating of the second composition and the optionally oxidizing one or more regions of the surface of the semiconductor substrate comprising a coating of the second composition that are not activated.

3. The method according to claim 1 , wherein the applying of the third composition is performed, and wherein the applying of the third composition is performed prior to the heating.

4. The method according to claim 1 , wherein at least one selected from the group consisting of the applying of the first composition, the applying of the second composition, and the optionally applying of the third composition is performed by a printing of spraying method.

5. The method according to claim 1 , wherein
the n-type dopant is at least one selected from the group consisting of phosphorous-containing dopants, arsenic-containing dopants, and antimony-containing dopants; and
the p-type dopant is a boron-containing dopant.

6. The method according to claim 1 , wherein at least one selected from the group consisting of the first composition, the second composition, and the optional third composition is a precursor composition, the precursor composition comprising
(a) at least one precursor comprising silicon which is liquid under standard ambient temperature and pressure SATP conditions; or
(b) at least one solvent and at least one precursor comprising silicon, germanium, or both which is liquid or solid under standard ambient temperature and pressure SATP conditions.

7. The method according to claim 6 , wherein the precursor is at least one selected from the group consisting of
polysilanes of the general formula Si n X c wherein X=H, F, Cl, Br, I, C 1 -C 10 -alkyl, C 1 -C 10 -alkenyl, C 5 -C 20 -aryl, n≧4 and 2n≦c≦2n+2,
polysiloxanes of the general formula Si n H c O d R e wherein R=C 1 -C 10 -alkyl, C 1 -C 10 -alkenyl, C 5 -C 20 -aryl, n≧2 and (n−1)≦d≦n, 0≦c≦3n and 0≦e≦3n, and
polysilazanes of the general formula Si n H m N b R c wherein R=C 1 -C 10 -alkyl, C 1 -C 10 -alkenyl; C 5 -C 20 -aryl, C 1 -C 10 -alkoxy, n≧2, 0≦m≦3n, (n−1)≦b≦n and 0≦c≦3n.

8. The method according to claim 6 , wherein the precursor is a nanoparticle comprising silicon.

9. The method according to claim 6 , wherein the precursor composition comprises at least two precursors of which at least one precursor is a hydridosilane oligomer and at least one precursor is an optionally branched hydridosilane of the generic formula Si n H 2n+2 with n=3 to 10.

10. The method according to claim 9 , wherein the hydridosilane oligomer
(a) has a weight-average molecular weight of 200 to 10000 g/mol; and/or
(b) is obtained by an oligomerization of a noncyclic hydridosilane; and/or
(c) is obtained by a thermal conversion of a composition comprising at least one noncyclic hydridosilane having not more than 20 silicon atoms in the absence of a catalyst at a temperature of less than 235° C.

11. The method according to claim 1 , wherein the optionally oxidizing is performed and converts the one or more regions surface of the semiconductor comprising a coating of the first composition that are not activated, one or more regions of the surface of the semiconductor substrate comprising a coating of the second composition that are not activated, or both to a doped silicon oxide.

12. The method according to claim 1 , wherein the fully or partially activating is performed thermally in the presence of at least one selected from the group consisting of electromagnetic radiation, electron or ion bombardment, conducted heat, and radiated heat.

13. The method according to claim 1 , wherein
(a) the optionally oxidizing is performed and wherein the oxidizing is perform in an oxygen-containing atmosphere at a temperature of ≦300° C.; and/or
(b) the optionally oxidizing is performed and wherein the oxidizing is performed in the presence of at least one oxidizing agent selected from the group consisting of ozone, carbon dioxide, hydrogen peroxide (H 2 O 2 ), water vapour (H 2 O), a mono- or polyhydric alcohol, a ketone, a carboxylic acid, a carbonic ester, a mixture comprising trichloroacetic acid and oxygen, and a mixture comprising HCl and oxygen.

14. The method according to claim 1 , wherein the heating is conducted at a temperature of more than 700° C. for a time of 10 minutes to 1 h.

15. The method according to claim 1 , wherein the fully or partially activating the one or more regions of the surface of the semiconductor substrate comprising a coating of the first composition, the one or more regions of the surface of the semiconductor substrate comprising a coating of the second composition, or both converts the coating comprising the first substrate, the coating comprising the second substrate or both to a crys

Assignees

• Mader Christoph
• Guenther Christian
• Erz Joachim
• Martens Susanne Christine
• Lehmkuhl Jasmin
• Traut Stephan
• Wunnicke Odo
• Evonik Degussa Gmbh

Inventors

• Mader Christoph
• Guenther Christian
• Erz Joachim
• Martens Susanne Christine
• Lehmkuhl Jasmin
• Traut Stephan
• Wunnicke Odo

Classifications

• H10P32/19

  Diffusion sources · CPC title

• H10P32/16 Primary

  between a solid phase and a liquid phase · CPC title

• Y02E10/547

  Monocrystalline silicon PV cells · CPC title

• H01L31/1804 Primary

  Electricity · mapped topic

• H01L21/2225

  Electricity · mapped topic