Pixel isolation device and fabrication method

Patent metadata

Field	Value
Publication number	US-9887235-B2
Application number	US-201514967046-A
Country	US
Kind code	B2
Filing date	Dec 11, 2015
Priority date	Dec 11, 2015
Publication date	Feb 6, 2018
Grant date	Feb 6, 2018

Abstract

Backside illuminated (BSI) image sensor devices are described as having pixel isolation structures formed on a sacrificial substrate. A photolayer is epitaxially grown over the pixel isolation structures. Radiation-detecting regions are formed in the photolayer adjacent to the pixel isolation structures. The pixel isolation structures include a dielectric material. The radiation-detecting regions include photodiodes. A backside surface of the BSI image sensor device is produced by planarized removal of the sacrificial substrate to physically expose the pixel isolation structures or at least optically expose the photolayer.

First claim

What is claimed is:

1. A method for manufacturing an image sensor device, the method comprising:
depositing a dielectric material on a substrate;
patterning the dielectric material to form a pixel isolation structure;
forming an epitaxial layer over the pixel isolation structure, wherein forming the epitaxial layer comprises:
growing a first epitaxial layer over the pixel isolation structure, wherein a dislocation area is formed in the first epitaxial layer; and
performing at least one of a selective etch-back process or a thermal annealing process; and

forming a radiation-detecting region in the epitaxial layer adjacent to the pixel isolation structure.

2. The method of claim 1 , further comprising removing at least a portion of the substrate to expose at least a portion of the pixel isolation structure and the epitaxial layer.

3. The method of claim 2 , wherein removal of the substrate:
optically exposes a region of the epitaxial layer; and
physically exposes at least a portion of the dielectric material of the pixel isolation structure.

4. The method of claim 1 , wherein forming the radiation-detecting region comprises at least one of implanting a photodiode or in situ doping of the epitaxial layer.

5. The method of claim 1 , further comprising:
depositing a dopant layer over the pixel isolation structure; and
distributing a dopant from the dopant layer into the dielectric material of the pixel isolation structure to form a region of doped dielectric material.

6. The method of claim 5 , wherein the dopant comprises boron, the dopant layer comprises boron-doped polysilicon, and the dopant is distributed by a thermal diffusion process.

7. The method of claim 1 , wherein
the performing at least one of a selective etch-back process or a thermal annealing process removes the dislocation area.

8. The method of claim 7 , further comprising growing at least a second epitaxial layer over the first epitaxial layer after removal of the dislocation area.

9. The method of claim 1 , further comprising:
forming a gate oxide layer and a transfer gate over the epitaxial layer;
providing a first interconnect structure over the gate oxide layer and the transfer gate;
forming a first passivation layer over the first interconnect structure; and
attaching a logic device to the first passivation layer.

10. The method of claim 9 , wherein:
the logic device comprises an application-specific integrated circuit (ASIC) having a second interconnect structure and a second passivation layer over the second interconnect structure; and
the logic device is attached to the first passivation layer by bonding the second passivation layer to the first passivation layer.

11. The method of claim 1 , further comprising removal of at least a portion of the substrate by at least one of: chemical mechanical planarization (CMP), grinding, etching, polishing, or diamond scrubbing.

12. A method for manufacturing a backside illuminated (BSI) image sensor device, the method comprising:
patterning a dielectric material to form a plurality of pixel isolation structures on a first side of a substrate;
epitaxially depositing a photolayer over the first side of the substrate and the plurality of pixel isolation structures;
forming a plurality of radiation-detecting regions in the photolayer adjacent to and between the plurality of pixel isolation structures; and
removing at least a portion of a second side of the substrate to physically expose the plurality of pixel isolation structures and optically expose the photolayer.

13. The method of claim 12 , wherein forming the plurality of radiation-detecting regions comprises at least one of implanting a photodiode or in situ doping of the photolayer.

14. The method of claim 12 , further comprising:
depositing a dopant layer of the plurality of pixel isolation structures; and
distributing a dopant from the dopant layer into the dielectric material of the plurality of pixel isolation structures to form regions of doped dielectric material.

15. The method of claim 14 , wherein the dopant comprises boron, the dopant layer comprises boron-doped polysilicon, and the dopant is distributed by a thermal diffusion process.

16. The method of claim 12 , wherein epitaxially depositing the photolayer comprises:
growing a first epitaxial layer over the plurality of pixel isolation structures, wherein a plurality of dislocation areas are formed in the first epitaxial layer; and
performing at least one of a selective etch-back process or a thermal annealing process to remove the plurality of dislocation areas.

17. The method of claim 16 , further comprising:
forming a gate oxide layer and a plurality of transfer gates over the photolayer;
providing a first interconnect structure over the gate oxide layer and the plurality of transfer gates;
forming a first passivation layer over the first interconnect structure; and
attaching a plurality of logic devices to the first passivation layer.

18. The method of claim 17 , wherein:
each of the plurality of logic devices comprise an application-specific integrated circuit (ASIC) having a second interconnect structure and a second passivation layer over the second interconnect structure; and
each of the plurality of logic devices is attached to the first passivation layer by bonding the second passivation layer to the first passivation layer.

19. The method of claim 12 , wherein removal of at least a portion of the second side of the substrate is performed by at least one of: chemical mechanical planarization (CMP), grinding, etching, polishing, or diamond scrubbing.

20. A method comprising:
patterning a dielectric material to form a plurality of pixel isolation structures on a first side of a substrate;
depositing a photolayer over the first side of the substrate and the plurality of pixel isolation structures, wherein depositing the photolayer comprises:
depositing a first layer over the plurality of pixel isolation structures, wherein a plurality of dislocation areas are formed in the first layer; and
performing at least one of a selective etch-back process or a thermal annealing process to remove the plurality of dislocation areas;

forming a plurality of radiation-detecting regions in the photolayer adjacent to and between the plurality of pixel isolation structures; and
removing at least a portion of a second side of the substrate to physically expose the plurality of pixel isolation structures and optically expose the photolayer.

Assignees

• Taiwan Semiconductor Mfg Co Ltd

Inventors

• Cheng Yu Hung
• Lin Tung I
• Chen Wei Li
• Tu Yeur Luen

Classifications

• H01L27/14689 Primary

  Electricity · mapped topic

• H10F39/011

  Manufacture or treatment of image sensors covered by group H10F39/12 · CPC title

• H10F39/199

  Back-illuminated image sensors · CPC title

• H10F39/807

  Pixel isolation structures · CPC title

• H10F39/014 Primary

  of CMOS image sensors · CPC title