Semiconductor gas sensor using magnetic tunnel junction elements

Patent metadata

Field	Value
Publication number	US-9885697-B2
Application number	US-201514958037-A
Country	US
Kind code	B2
Filing date	Dec 3, 2015
Priority date	Dec 3, 2015
Publication date	Feb 6, 2018
Grant date	Feb 6, 2018

Abstract

A CMOS gas sensor that uses MTJ elements to capture/store gas concentration level data at high temperatures for later readout at low temperatures. Each MTJ element includes a storage layer whose magnetic orientation is switchable between parallel and anti-parallel directions relative to a fixed reference when heated above the storage layer's blocking temperature, whereby the MTJ element is switchable between low and high resistance states. During operation, reaction heat generated by a gas sensing element raises the MTJ element's temperature above the blocking temperature when ambient target gas exceeds a minimum concentration level, whereby an applied magnetic biasing force causes the storage layer's magnetic orientation to switch relative to the fixed reference, whereby the MTJ element captures measured concentration level data for later readout. In one embodiment, multiple MTJ elements connected in a NAND-type string switch at different concentration levels to provide highly accurate quantitative measurement data.

First claim

The invention claimed is:

1. A gas sensor for quantitatively determining a concentration of a target gas in an environment, the gas sensor comprising:
a plurality of magnetic tunnel junction (MTJ) elements, each of said plurality of MTJ elements including a reference layer defining an associated reference magnetic orientation and a storage layer defining an associated storage magnetic orientation, wherein said storage layer of each of said plurality of MTJ elements is configured such that said associated storage magnetic orientation is switchable between a parallel direction and an anti-parallel direction relative to said associated reference magnetic orientation, whereby a corresponding resistance state of each of said plurality of MTJ elements is respectively switchable between a first resistance value and a second resistance value;
a gas sensing element operably coupled to said plurality of MTJ elements such that said gas sensing element causes a first corresponding resistance state of a first MTJ element to switch from one of said first and second resistance values to the other of said first and second resistance values only when said concentration of said target gas in said environment is at least equal to a first concentration level during a gas sensing phase, and said gas sensing element causes a second corresponding resistance state of a second MTJ element to switch from said one of said first and second resistance values to said other of said first and second resistance values only when said concentration level of said target gas is at least equal to a second concentration level during said gas sensing phase, said second concentration level being higher than said first concentration level; and
a control circuit configured to determine final resistance values of said first and second corresponding resistance states after said gas sensing phase.

2. The gas sensor of claim 1 , further comprising a field line structure operably magnetically coupled to said plurality of MTJ elements,
wherein said control circuit is further configured to control the field line structure such that said field line structure generates a magnetic field configured to simultaneously bias the storage magnetic orientations of the storage layers of all of said plurality of MTJ elements in accordance with a magnetic direction of the magnetic field.

3. The gas sensor of claim 1 , wherein said gas sensing element comprises one of a thermal-reaction-type gas sensing element and a chemical-reaction-type gas sensing element.

4. The gas sensor of claim 1 ,
wherein said gas sensing element comprises a thermal-reaction-type gas sensing element operably thermally coupled to said plurality of MTJ elements and configured to generate reaction heat in an amount proportional to an actual concentration level of said target gas when said gas sensing element contacts said environment, and
wherein said first MTJ element is configured such that first corresponding resistance state only switches resistance values when a first MTJ temperature of said first MTJ element is above a first storage blocking temperature,
wherein said second MTJ element is configured such that second corresponding resistance state only switches resistance values when a second MTJ temperature of said second MTJ element is above a second storage blocking temperature, said second storage blocking temperature being greater than said first storage blocking temperature, and
wherein said gas sensor is configured such that said reaction heat generated by said thermal-reaction-type gas sensing element increases said first and second MTJ temperatures to said first storage blocking temperature when said actual concentration level of said target gas is at least equal to said first concentration level during said gas sensing phase, and such that said reaction heat increases said first and second MTJ temperatures to said second storage blocking temperature when said actual concentration level of said target gas is at least equal to said second concentration level during said gas sensing phase.

5. The gas sensor of claim 4 , wherein said first and second MTJ elements are further configured such that a first lateral size of said first MTJ element is smaller than a second lateral size of said second MTJ element.

6. The gas sensor of claim 4 , further comprising a heating element operably thermally coupled to said plurality of MTJ elements,
wherein said control circuit is further configured to actuate said heating element such that during a reset operating phase, said control heat generated by said heating element increases said first and second MTJ temperatures above said first and second storage blocking temperatures, and during said gas sensing operating phase, said control heat generated by said heating element maintains said first and second MTJ temperatures below said first storage blocking temperature.

7. The gas sensor of claim 1 ,
wherein said plurality of MTJ elements are disposed in a series-connected string such that a total string resistance of said series-connected string is collectively defined by the corresponding resistance values of said plurality of MTJ elements, and
wherein said control circuit configured to determine final resistance values of said first and second corresponding resistance states using a read current passed through said series-connected string.

8. The gas sensor of claim 7 , further comprising a field line structure operably magnetically coupled to said plurality of MTJ elements,
wherein said control circuit is further configured to control the field line structure such that said field line structure generates a magnetic field having sufficient magnetic force to simultaneously bias the storage magnetic orientations of the storage layers of all of said plurality of MTJ elements in accordance with a magnetic direction of the magnetic field.

9. The gas sensor of claim 7 , wherein said plurality of MTJ elements are disposed in a plurality of series-connected strings, and such that the plurality of series-connected strings are connected in parallel.

10. The gas sensor of claim 7 ,
wherein said control circuit comprises a CMOS control circuit including frontend structures disposed on a silicon substrate and backend structures disposed in a back end stack formed on the silicon substrate,
wherein said plurality of MTJ elements and said gas sensing element are disposed on a first membrane structure comprising a first portion of said back end stack that is disposed over a first cavity defined in said silicon substrate.

11. The gas sensor of claim 10 , further comprising a second plurality of MTJ elements and a second gas sensing element disposed on a second membrane structure comprising a second portion of said back end stack that is disposed over a second cavity defined in said silicon substrate,
wherein each MTJ element of said second plurality of MTJ elements has a second lateral size that is larger than a first lateral size of each of said plurality of MTJ elements disposed on said first membrane structure.

Assignees

• Tower Semiconductor Ltd

Inventors

• Roizin Yakov
• Vofsy Menachem

Classifications

• H01L43/08

  Electricity · mapped topic

• G01N33/0027

  concerning the detector · CPC title

• H01L27/22

  Electricity · mapped topic

• G01N33/0062

  concerning the measuring method or the display, e.g. intermittent measurement or digital display · CPC title

• G01N33/0065 Primary

  using more than one threshold · CPC title