Metamaterial thin films

Patent metadata

Field	Value
Publication number	US-9878516-B2
Application number	US-201313784856-A
Country	US
Kind code	B2
Filing date	Mar 5, 2013
Priority date	Mar 5, 2012
Publication date	Jan 30, 2018
Grant date	Jan 30, 2018

Abstract

A metamaterial thin film with plasmonic properties formed by depositing metallic films by atomic layer deposition onto a substrate to form a naturally occurring mosaic-like nanostructure having two-dimensional features with air gaps between the two-dimensional features. Due to the unique deposition nanostructure, plasmonic thin films of metal or highly conducting materials can be produced on any substrate, including fabrics and biological materials. In addition, these plasmonic materials can be used in conjunction with geometric patterns that may be used to create multiple resonance plasmonic metamaterials.

First claim

What is claimed as new and desired to be protected by Letters Patent of the United States is:

1. A method of making a metamaterial thin film, comprising:
depositing a metallic or metallic-like material using atomic layer deposition onto an arbitrary substrate to form a mosaic-like surface morphology comprising two dimensional nanostructure features resembling islands and comprising air gaps separating the two dimensional nanostructure features, wherein the air gap separation between the two dimensional nanostructure features is less than 4 nm;
wherein a dielectric spacer layer and subsequently deposited spoof or hybrid-spoof plasmon film are deposited on top of the metallic or metallic-like material;
wherein after deposition of the spoof or hybrid-spoof plasmon film, the metallic or metallic-like material exhibits plasmonic and/or metamaterial properties.

Assignees

• Glembocki Orest J
• Prokes Sharka M
• Caldwell Joshua D
• Ritala Mikko
• Leskela Markku
• Niinisto Jaakko
• Santala Eero
• Hatanpaa Timo
• Kariemi Maarit
• Us Navy

Inventors

• Glembocki Orest J
• Prokes Sharka M
• Caldwell Joshua D
• Ritala Mikko
• Leskela Markku
• Niinisto Jaakko
• Santala Eero
• Hatanpaa Timo
• Kariemi Maarit

Classifications

• B32B15/04

  comprising metal as the main or only constituent of a layer, {which is} next to another layer of {the same or of} a {different material (next to a bituminous or tarry layer B32B11/08; next to a water-setting substance layer B32B13/06; next to a glass layer B32B17/061; next to a cellulosic plastic layer B32B23/042)} · CPC title

• C23C16/50

  using electric discharges {(generation and control of plasma in discharge tubes for surface treatment H01J37/32, H01J37/34)} · CPC title

• Y10T428/24736

  Ornamental design or indicia · CPC title

• B32B3/28 Primary

  characterised by a layer comprising a deformed thin sheet {, i.e. the layer having its entire thickness deformed out of the plane}, e.g. corrugated, crumpled (B32B29/08 takes precedence) · CPC title

• C23C16/06

  characterised by the deposition of metallic material · CPC title