Holding device, method of determining attraction abnormality in holding device, lithography apparatus, and method of manufacturing article
US-2024393682-A1 · Nov 28, 2024 · US
US9877920B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9877920-B2 |
| Application number | US-201514658386-A |
| Country | US |
| Kind code | B2 |
| Filing date | Mar 16, 2015 |
| Priority date | Dec 19, 2003 |
| Publication date | Jan 30, 2018 |
| Grant date | Jan 30, 2018 |
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The presently disclosed subject matter describes the use of fluorinated elastomer-based materials, in particular perfluoropolyether (PFPE)-based materials, in high-resolution soft or imprint lithographic applications, such as micro- and nanoscale replica molding, and the first nano-contact molding of organic materials to generate high fidelity features using an elastomeric mold. Accordingly, the presently disclosed subject matter describes a method for producing free-standing, isolated nanostructures of any shape using soft or imprint lithography technique.
Opening claim text (preview).
What is claimed is: 1. A plurality of particles, each comprising: a therapeutically or pharmaceutically active agent dispersed substantially throughout the entire particle, wherein each particle of the plurality of particles: has a non-spherical engineered shape comprising: (i) six substantially planar surfaces that each span respective entire sides of the non-spherical engineered shape, said six substantially planar surfaces include a top surface; and (ii) a maximum cross-sectional dimension of less than about 10 micrometers, and is substantially congruent relative to another particle of the plurality of particles. 2. The plurality of particles of claim 1 , wherein the non-spherical engineered shape is a substantially cubic shape. 3. The plurality of particles of claim 1 , wherein the non-spherical engineered shape is a rectangular prism. 4. The plurality of particles of claim 1 , each particle further comprising a polymer. 5. The plurality of particles of claim 4 , wherein the polymer comprises a biodegradable or bioresorbable polymer. 6. The plurality of particles of claim 1 , wherein the therapeutically or pharmaceutically active agent is a diagnostic. 7. A plurality of particles, each comprising: a therapeutically or pharmaceutically active agent dispersed throughout the entire particle, wherein each particle of the plurality of particles has a non-spherical engineered shape comprising a cylinder having a substantially planar top surface that spans an entire side of the non-spherical engineered shape and a maximum cross-sectional dimension of less than about 10 micrometers, and wherein each particle is substantially congruent relative to another particle of the plurality of particles. 8. The plurality of particles of claim 7 , each particle further comprising a polymer. 9. The plurality of particles of claim 7 , wherein the polymer comprises a biodegradable or bioresorbable polymer. 10. The plurality of particles of claim 7 , wherein the therapeutically or pharmaceutically active agent is a diagnostic. 11. A patterned template including a plurality of particles, comprising: a pattern of two or more recesses, each recess of the two or more recesses having a shape, a volume and an opening; and a plurality of particles, each particle of the plurality comprising: a therapeutically or pharmaceutically active agent dispersed substantially throughout the entire particle, a non-spherical engineered shape comprising one substantially top planar surface corresponding with the opening of one of said recesses, the one substantially top planar surface entirely spanning an entire side of the non-spherical engineered shape, and a maximum cross-sectional dimension of less than about 10 micrometers, wherein the non-spherical engineered shape substantially corresponds to the shape of the one of said recesses, and the volume of the non-spherical engineered shape substantially corresponds to the volume of the one of said recesses. 12. The plurality of particles of claim 11 , wherein the non-spherical engineered shape is a substantially cubic shape. 13. The plurality of particles of claim 11 , wherein the non-spherical engineered shape is a rectangular prism. 14. The plurality of particles of claim 11 , wherein the non-spherical engineered shape is a substantially cylindrical shape. 15. The plurality of particles of claim 11 , each particle further comprising a polymer. 16. The plurality of particles of claim 11 , wherein the polymer comprises a bioresorbable or biodegradable polymer. 17. A plurality of particles, each particle of the plurality comprising: a therapeutically or pharmaceutically active agent dispersed throughout the entire particle, wherein: each particle of the plurality of particles has a non-spherical engineered shape and volume bounded by six substantially planar surfaces that each span respective entire sides of the non-spherical engineered shape and a maximum cross-sectional dimension of less than about 10 micrometers. 18. The plurality of particles of claim 17 , wherein the non-spherical engineered shape is a rectangular prism. 19. The plurality of particles of claim 17 , wherein one of the six substantially planar surfaces is a top surface. 20. A patterned template including a plurality of particles, comprising: a pattern of two or more recesses, wherein each respective recess of the two or more recesses has a bottom surface and an open top that is opposite to the bottom surface; and a plurality of particles, each particle of the plurality comprising: a therapeutically or pharmaceutically active agent dispersed throughout the entire particle; and a non-spherical engineered shape comprising (i) a first substantially planar surface in contact with the bottom surface of a recess of the patterned template, and (ii) a second substantially planar surface that is opposite the first substantially planar surface corresponding to the open top of the respective recess of the two or more recesses, wherein the first and second substantially planar surfaces each span respective entire sides of the non-spherical engineered shape. 21. The patterned template of claim 20 , wherein: each respective recess also comprises a side surface adjacent to the bottom surface and the open top; and, the non-spherical engineered shape further comprises a third surface that is in contact with the side surface of the recess. 22. The patterned template of claim 20 , wherein each particle has a maximum cross-sectional dimension of 100 micrometers. 23. A plurality of particles, each plurality comprising: at least two particles removed from a recess of a patterned template, wherein each particle comprises: a therapeutically or pharmaceutically active agent dispersed throughout the entire particle; and an outer surface area defining a shape consisting of six substantially planar surfaces that each span respective entire sides of the shape or a cylinder having a substantially planar top surface that entirely spans a respective side of the cylinder. 24. The plurality of particles of claim 23 , wherein one of the six substantially planar surfaces is a top surface.
using moulds and master templates, e.g. for hot-embossing · CPC title
including aperture · CPC title
Processes · CPC title
including variation in thickness · CPC title
Polyesters, e.g. poly(lactide-co-glycolide) · CPC title
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