Acoustic resonator device including trench for providing stress relief

Patent metadata

Field	Value
Publication number	US-9876483-B2
Application number	US-201414229205-A
Country	US
Kind code	B2
Filing date	Mar 28, 2014
Priority date	Mar 28, 2014
Publication date	Jan 23, 2018
Grant date	Jan 23, 2018

Abstract

An microelectronic device includes a substrate, a piezoelectric component formed over the substrate, at least one trench formed in the substrate. The piezoelectric component has a corresponding resonance frequency. The at least one trench is configured to reduce mechanical stress on the piezoelectric component, in response to force applied to the substrate, for stabilizing the resonance frequency.

First claim

The invention claimed is:

1. A microelectronic device, comprising:
a base substrate having a first cavity and at least one trench respectively extending into the base substrate from a top surface of the base substrate, the at least one trench being physically separated along the top surface of the base substrate from the first cavity;
a lid substrate positioned over the base substrate, the lid substrate defining a second cavity over the first cavity and the at least one trench in the base substrate; and
an acoustic resonator, including piezoelectric material, disposed over the first cavity of the base substrate and positioned within the second cavity, the acoustic resonator having a corresponding resonance frequency,
wherein a bottom of the at least one trench is displaced away from a bottom surface of the base substrate, and a top of the at least one trench is within an outer perimeter of the second cavity, and
wherein the at least one trench is positioned such that the at least one trench expands at the top surface of the base substrate in response to a downward flexing of the base substrate, and contracts at the top surface of the base substrate in response to an upward flexing of the base substrate so as to reduce mechanical stress on the acoustic resonator, for stabilizing the resonance frequency.

2. The device of claim 1 , wherein the at least one trench is formed between an outer perimeter of the first cavity and the outer perimeter of the second cavity, and is physically separated from the outer perimeter of the second cavity along the top surface of the base substrate.

3. The device of claim 2 , wherein the at least one trench comprises a continuous loop around the acoustic resonator.

4. The device of claim 1 , wherein the acoustic resonator comprises a bottom electrode extending over the first cavity on the top surface of the base substrate, and wherein at least a portion of the at least one trench is below the bottom electrode.

5. The device of claim 1 , wherein a trench depth of the at least one trench is substantially the same as a cavity depth of the first cavity.

6. The device of claim 1 , wherein a trench depth of the at least one trench is greater than a cavity depth of the first cavity.

7. The device of claim 1 , wherein a trench depth of the at least one trench is less than a cavity depth of the first cavity.

8. The device of claim 1 , wherein the acoustic resonator comprises one of a bulk acoustic wave (BAW) resonator and a surface acoustic wave (SAW) resonator.

9. The device of claim 1 , wherein the at least one trench comprises:
an inner trench formed outside an outer perimeter of the first cavity; and
an outer trench formed outside an outer perimeter of the inner trench.

10. The device of claim 1 , wherein the at least one trench is positioned in the base substrate such that a trench depth of the at least one trench is inversely proportional to an amount of a tensile stress incurred by the acoustic resonator in response to a downward flexing force applied to the base substrate.

11. The device of claim 1 , wherein the at least one trench is positioned in the base substrate such that a trench width of the at least one trench is inversely proportional to an amount of compressive stress incurred by the acoustic resonator in response to an upward flexing force applied to the base substrate.

12. The microelectronic device of claim 2 , wherein an opening at the top of the at least one trench is in direct communication with an open area defined by the second cavity.

13. The device of claim 1 , wherein the at least one trench is disposed between the outer perimeter of the second cavity and an outer perimeter of a top electrode of the acoustic resonator, and is physically separated from the outer perimeter of the second cavity along the top surface of the base substrate.

14. The device of claim 1 , wherein the at least one trench is disposed between the outer perimeter of the second cavity and an outer perimeter of a bottom electrode of the acoustic resonator, and is physically separated from the outer perimeter of the second cavity along the top surface of the base substrate.

15. The device of claim 1 , wherein the piezoelectric material of the acoustic resonator comprises a piezoelectric layer over the top surface of the base substrate, at least a portion of the at least one trench being disposed below the piezoelectric layer.

16. The device of claim 9 , wherein each of the inner trench and the outer trench extend in parallel into the base substrate in a same direction as the first cavity extends into the base substrate.

17. The device of claim 9 , wherein the inner trench is disposed between the outer trench and the first cavity, and the outer trench is disposed between the inner trench and the outer perimeter of the second cavity.

18. The device of claim 9 , wherein the inner trench and the outer trench are single trench structures, respectively, which form concentric loops around the first cavity.

19. The device of claim 1 further comprising:
a base contact on the top surface of the base substrate, the at least one trench being disposed between the first cavity and the base contact.

20. The device of claim 1 , wherein an opening of the at least one trench is uncovered on the top surface of the base substrate, within the second cavity.

21. The device of claim 1 , wherein the at least one trench comprises inner sidewalls extending downwardly, below the top surface of the base substrate, the inner sidewalls being exposed to be in direct communication with the second cavity.

22. A bulk acoustic wave (BAW) resonator device, comprising:
a base substrate defining a base cavity and a trench extending partially into the base substrate;
a lid substrate positioned over the base substrate, the lid substrate defining a lid cavity; and
an acoustic resonator formed over the base cavity and positioned within the lid cavity, the acoustic resonator comprising a piezoelectric layer formed between a bottom electrode and a top electrode, and overlapping portions of the bottom electrode, the piezoelectric layer and the top electrode forming an acoustic stack,
wherein the trench is formed in the base substrate within a perimeter of the lid cavity and outside an outer perimeter of the acoustic stack, the trench being physically separated from each of the base cavity and the perimeter of the lid cavity along a top surface of the base substrate, and
wherein the trench is positioned to expand at the top surface of the base substrate in response to a downward flexing of the base substrate, and to contract at the top surface of the base substrate in response to an upward flexing of the base substrate so as to reduce mechanical stress on the acoustic resonator.

23. An integrated circuit (IC) package, comprising:
a base substrate;
an acoustic resonator formed on the base substrate over a base cavity in the base substrate, the base cavity enabling acoustic reflection, the acoustic resonator comprising a piezoelectric layer formed between a bottom electrode and a top electrode, wherein an acoustic stack of the acoustic resonator is defined by overlapping portions of the bottom electrode, the piezoelectric layer and the top electrode;
a lid substrate positioned over the acoustic resonator and defining a lid cavity, in which the acoustic resonator is positioned, the lid cavity being larger than the base cavity;
first and second base contacts disposed on the base

Assignees

• Avago Technologies General Ip

Inventors

• Ortiz Steven M
• Sridaran Suresh
• Bi Frank
• Small Martha K

Classifications

• H01L41/053

  Electricity · mapped topic

• H03H9/173

  Air-gaps · CPC title

• H03H9/17

  having a single resonator (crystal tuning forks H03H9/21) · CPC title

• H03H9/25 Primary

  Constructional features of resonators using surface acoustic waves {(devices for manipulating acoustic surface waves in general G10K11/36)} · CPC title

• H03H9/1014 Primary

  the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device · CPC title