Charge-transporting metal oxide-polymer blend thin films

Patent metadata

Field	Value
Publication number	US-9876183-B2
Application number	US-201615012770-A
Country	US
Kind code	B2
Filing date	Feb 1, 2016
Priority date	Jan 30, 2015
Publication date	Jan 23, 2018
Grant date	Jan 23, 2018

Abstract

The present teachings relate to charge-transporting metal oxide-polymer blend thin films which can be incorporated as the semiconductor component or one of the conductor components of a thin film transistor. Generally, the present charge-transporting metal oxide-polymer blend thin film includes a semiconducting or conducting metal oxide lattice and an electrically insulating polymer dispersed within the lattice. The electrically insulating polymer is present at about 20% or less by weight of the metal oxide.

First claim

What is claimed is:

1. An electronic, optical, or optoelectronic device comprising a metal oxide-polymer blend thin film semiconductor or conductor component, said component comprising a metal oxide lattice and an electrically insulating polymer dispersed therewithin, wherein the metal oxide lattice comprises an electrically semiconducting or conducting metal oxide and wherein the electrically insulating polymer is present at no more than about 20% by weight of the electrically semiconducting or conducting metal oxide.

2. The device of claim 1 , wherein the electrically insulating polymer has a dielectric constant of between about 2 and about 10.

3. The device of claim 1 , wherein the electrically insulating polymer is selected from the group consisting of polyethyleneimine (PEI), poly(allylamine), polyvinylamine, poly(4-vinyl phenol) (PVP), poly(vinyl alcohol) (PVA), poly(vinyl butyral) (PVB), polystyrene (PS), poly(methyl methacrylate) (PMMA), poly(2-hydroxyethyl methacrylate) (p-HEMA), poly[styrene-co-(4-vinylphenol)], poly(4-vinylphenol-co-methyl methacrylate), and polyethylene glycol.

4. The device of claim 1 , wherein the electrically insulating polymer is present at no more than about 10% by weight of the electrically semiconducting or conducting metal oxide.

5. The device of claim 1 , wherein the electrically insulating polymer is present at no more than about 5% by weight of the electrically semiconducting or conducting metal oxide.

6. The device of claim 1 , wherein the electrically semiconducting or conducting metal oxide is in the amorphous state.

7. The device of claim 6 , wherein the electrically semiconducting metal oxide is selected from the group consisting of α-In 2 O 3 , α-IZO, α-ZTO, α-IGO, α-IGZO, α-SnO 2 , α-NiO, α-Cu 2 O, and α-ZnO.

8. The device of claim 6 , wherein the electrically conducting metal oxide is selected from the group consisting of α-ITO, α-ZITO, α-GZO, α-AZO, α-SnO 2 :F, α-GITO, and α-CdO.

9. The device of claim 1 , wherein the device comprises both a metal oxide-polymer blend thin film semiconductor and a metal oxide-polymer blend conductor component.

10. The device of claim 1 , wherein the device comprises a metal oxide dielectric component.

11. The device of claim 10 , wherein the metal oxide dielectric component comprises a metal oxide lattice and an electrically insulating polymer dispersed therewithin, wherein the metal oxide lattice comprises an electrically insulating metal oxide and the electrically insulating polymer is present at no more than about 20% by weight of the electrically insulating metal oxide.

12. The device of claim 11 , wherein the electrically insulating metal oxide is selected from alumina (Al 2 O 3 ), cerium oxide (CeO x ), yttrium oxide (Y 2 O 3 ), titanium oxide (TiO 2 ), zirconium oxide (ZrO 2 ), hafnium oxide (HfO 2 ), tantalum oxide (Ta 2 O 5 ), and barium and strontium titanium oxide ((Ba,Sr)TiO 3 ).

13. The device of claim 1 configured as a metal oxide thin film transistor, the metal oxide thin film transistor comprising a substrate, a gate electrode, a gate dielectric component in contact with the gate electrode, source and drain electrodes, and a metal oxide-polymer blend thin film semiconductor component in contact with the gate dielectric component on one side and the source and drain electrodes on an opposite side.

14. The device of claim 13 , wherein the gate electrode comprises a metal oxide-polymer blend thin film conductor.

15. A flexible metal oxide thin film transistor comprising a metal oxide-polymer blend thin film semiconductor component, wherein the metal oxide-polymer blend thin film semiconductor component comprises an amorphous semiconducting metal oxide and an electrically insulating polymer, and wherein the flexible metal oxide thin film transistor is characterized by a charge carrier mobility of at least about 0.04 cm 2 /Vs and is capable of retaining at least 50% of said charge carrier mobility after 100 cycles of bending and relaxing, said bending comprising bending the flexible metal oxide thin film transistor to a radius ranging from about 5 mm to about 15 mm.

16. The transistor of claim 15 , wherein the amorphous semiconducting metal oxide is selected from the group consisting of α-In 2 O 3 , α-IZO, α-ZTO, α-IGO, α-IGZO, α-SnO 2 , α-NiO, α-Cu 2 O, and α-ZnO, and the electrically insulating polymer is selected from the group consisting of polyethyleneimine (PEI), poly(allylamine), polyvinylamine, poly(4-vinyl phenol) (PVP), poly(vinyl alcohol) (PVA), poly(vinyl butyral) (PVB), polystyrene (PS), poly(methyl methacrylate) (PMMA), poly(2-hydroxyethyl methacrylate) (p-HEMA), poly[styrene-co-(4-vinylphenol)], poly(4-vinylphenol-co-methyl methacrylate), and polyethylene glycol.

17. The transistor of claim 15 further comprising a dielectric component comprising an amorphous metal oxide.

18. The transistor of claim 17 , wherein the dielectric component comprises an amorphous metal oxide and an electrically insulating polymer.

19. The transistor of claim 15 , further comprising a conductor component comprising a transparent conducting thin film.

20. The transistor of claim 19 , wherein the transparent conducting thin film comprises an amorphous metal oxide.

Assignees

• Univ Northwestern
• Polyera Corp
• Flexterra Inc

Inventors

• Facchetti Antonio
• Marks Tobin J
• Yu Xinge
• Sheets William Christopher
• Huang Wei

Classifications

• H01L51/055 Primary

  Electricity · mapped topic

• H01L51/0558

  Electricity · mapped topic

• H01L51/0097

  Electricity · mapped topic

• H01L2251/308

  Electricity · mapped topic

• H01L2251/303

  Electricity · mapped topic