Particle charger

Patent metadata

Field	Value
Publication number	US-9875873-B2
Application number	US-201415501935-A
Country	US
Kind code	B2
Filing date	Aug 8, 2014
Priority date	Aug 8, 2014
Publication date	Jan 23, 2018
Grant date	Jan 23, 2018

Abstract

A particle charger is provided with: a filter ( 28 ) partitioning the inside of a housing ( 20 ) into a first space ( 29 ) and second space ( 30 ); a particle introducer ( 22 ) for introducing a particle into the first space; a gas ion supplier ( 10 ) for supplying the first space with a gas ion; a potential gradient creator ( 26, 27, 31 ) for creating a potential difference within the housing so as to make the gas ion and a charged particle resulting from a contact of the aforementioned particle with the gas ion move toward the second space; an AC voltage supplier ( 32, 33 ) for applying AC voltages having a phase difference to the neighboring electrodes ( 28 a, b ) included in the filter; a controller ( 35 ) for performing a control for applying, to the plurality of electrodes, predetermined voltages so as to allow the charged particle to pass through a gap between the electrodes while trapping the gas ion by the electrodes; and a charged particle extractor ( 23, 25, 34 ) for extracting the charged particle admitted to the second space to the outside of the housing. By this configuration, the occurrence frequency of the multi-charging is suppressed.

First claim

The invention claimed is:

1. A particle charger, comprising:
a) a housing;
b) a filter composed of a plurality of electrodes extending in a virtual surface partitioning an inside of the housing into a first space and a second space;
c) a particle introducer for introducing a particle to be charged into the first space;
d) a gas ion supplier for supplying the first space with a gas ion;
e) a potential gradient creator for creating a potential gradient within the housing so as to make the gas ion and a charged particle resulting from a contact of the aforementioned particle with the gas ion move from the first space toward the second space;
f) an AC voltage supplier for applying an AC voltage to each of the electrodes forming the filter, where the voltages applied to any two electrodes neighboring each other among the plurality of electrodes have a phase difference;
g) a controller for controlling the AC voltage supplier so as to apply, to the plurality of electrodes, voltages which are previously determined so that, among the charged particle and the gas ion moving from the first space toward the second space, the charged particle is allowed to pass through a gap between the electrodes while the gas ion is trapped by one of the electrodes; and
h) a charged particle extractor for extracting the charged particle admitted to the second space to an outside of the housing.

2. The particle charger according to claim 1 , wherein the charged particle extractor produces a stream of carrier gas within the second space and carries the charged particle to the outside of the housing by the stream of carrier gas.

3. The particle charger according to claim 2 , wherein the filter is composed of a plurality of rod electrodes arranged parallel to each other.

4. The particle charger according to claim 2 , wherein the filter is composed of a plurality of rod electrodes arranged in a form of a grid.

5. The particle charger according to claim 2 , wherein the filter is composed of a plurality of circular electrodes arranged in a concentric form.

6. The particle charger according to claim 1 , wherein the charged particle extractor creates a potential gradient within the second space in a direction intersecting with the potential gradient and draws the charged particle to the outside of the housing by a motion of the charged particle along the former gradient.

7. The particle charger according to claim 6 , wherein the filter is composed of a plurality of rod electrodes arranged parallel to each other.

8. The particle charger according to claim 6 , wherein the filter is composed of a plurality of rod electrodes arranged in a form of a grid.

9. The particle charger according to claim 6 , wherein the filter is composed of a plurality of circular electrodes arranged in a concentric form.

10. The particle charger according to claim 1 , wherein the filter is composed of a plurality of rod electrodes arranged parallel to each other.

11. The particle charger according to claim 1 , wherein the filter is composed of a plurality of rod electrodes arranged in a form of a grid.

12. The particle charger according to claim 1 , wherein the filter is composed of a plurality of circular electrodes arranged in a concentric form.

Assignees

• Shimadzu Corp

Inventors

• Ueno Yoshihiro
• Seki Hiroshi
• Okuda Hiroshi

Classifications

• H01J37/32532

  Electrodes · CPC title

• H01J37/32082

  Radio frequency generated discharge (H01J37/32357, H01J37/32366, H01J37/32394 and H01J37/32403 take precedence) · CPC title

• H01J49/12

  using an arc discharge, e.g. of the duoplasmatron type · CPC title

• H01J37/32009

  Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources (plasma generation in general H05H1/24) · CPC title

• H01J37/3244

  Gas supply means · CPC title