Extreme ultraviolet light generation device

Patent metadata

Field	Value
Publication number	US-9872372-B2
Application number	US-201615379230-A
Country	US
Kind code	B2
Filing date	Dec 14, 2016
Priority date	Jul 11, 2014
Publication date	Jan 16, 2018
Grant date	Jan 16, 2018

Abstract

An extreme ultraviolet light generation device is to generate extreme ultraviolet light by irradiating a target with a pulse laser beam and thereby turning the target into plasma. The device may include a chamber, a magnet configured to form a magnetic field in the chamber, and an ion catcher including a collision unit disposed so that ions guided by the magnetic field collide with the collision unit.

First claim

The invention claimed is:

1. An extreme ultraviolet light generation device for generating extreme ultraviolet light by irradiating a target with a pulse laser beam and thereby turning the target into plasma, comprising:
a chamber;
a magnet configured to form a magnetic field in the chamber; and
an ion catcher including a collision unit disposed so that ions guided by the magnetic field collide with the collision unit, wherein
the collision unit includes a plurality of collision surfaces disposed to be inclined with respect to the magnetic field.

2. The extreme ultraviolet light generation device according to claim 1 , further comprising
a collector mirror configured to reflect extreme ultraviolet light generated in the chamber and thereby concentrate the extreme ultraviolet light, wherein
the plurality of collision surfaces are disposed to be inclined toward an upstream side of the extreme ultraviolet light reflected by the collector mirror.

3. The extreme ultraviolet light generation device according to claim 1 , wherein
the ion catcher includes a tubular member having a first end and a second end,
the first end has an opening in a direction along the magnetic field,
the collision unit is disposed between the first end and the second end, and
the collision unit includes first and second collision units disposed near the first end and the second end, respectively.

4. The extreme ultraviolet light generation device according to claim 1 , wherein
the ion catcher includes a tubular member having a first end and a second end,
the first end has an opening in a direction along the magnetic field,
the collision unit is disposed between the first end and the second end, and
the ion catcher is configured to satisfy a relationship L/φ>3.55, where L is the length of the tubular member from the first end to the second end and φ is the maximum diameter of the opening of the tubular member.

5. The extreme ultraviolet light generation device according to claim 1 , wherein
the ion catcher includes a tubular member having a first end and a second end,
the first end has an opening in a direction along the magnetic field,
the collision unit is disposed between the first end and the second end, and
the tubular member has a polygonally-columnar shape.

6. The extreme ultraviolet light generation device according to claim 1 , wherein
the ion catcher includes a tubular member having a first end and a second end,
the first end has an opening in a direction along the magnetic field,
the collision unit is disposed between the first end and the second end,
the magnet is an electromagnet including a coil, and
at least a part of the tubular member is disposed in a bore of the coil.

7. The extreme ultraviolet light generation device according to claim 1 , wherein
the ion catcher includes a tubular member having a first end and a second end,
the first end has an opening in a direction along the magnetic field,
the collision unit is disposed between the first end and the second end, and
at least a part of the tubular member is disposed to project outside from the chamber.

8. An extreme ultraviolet light generation device for generating extreme ultraviolet light by irradiating a target with a pulse laser beam and thereby turning the target into plasma, comprising:
a chamber;
a magnet configured to form a magnetic field in the chamber; and
an ion catcher including a collision unit disposed so that ions guided by the magnetic field collide with the collision unit; and
an exhaust pump, wherein
the ion catcher includes a tubular member having a first end and a second end,
the first end has an opening in a direction along the magnetic field,
the collision unit is disposed between the first end and the second end, and
the exhaust pump is connected between the first end and the second end to exhaust gas out of the tubular member.

9. The extreme ultraviolet light generation device according to claim 8 , wherein the collision unit includes conical or polygonally-pyramidal surfaces.

10. The extreme ultraviolet light generation device according to claim 8 , wherein
the collision unit includes first and second collision units disposed near the first end and the second end, respectively.

11. The extreme ultraviolet light generation device according to claim 8 , wherein
the ion catcher is configured to satisfy a relationship L/φ>3.55, where L is the length of the tubular member from the first end to the second end and φ is the maximum diameter of the opening of the tubular member.

12. The extreme ultraviolet light generation device according to claim 8 , wherein
the tubular member has a polygonally-columnar shape.

13. The extreme ultraviolet light generation device according to claim 8 , wherein
the magnet is an electromagnet including a coil, and
at least a part of the tubular member is disposed in a bore of the coil.

14. The extreme ultraviolet light generation device according to claim 8 , wherein
at least a part of the tubular member is disposed to project outside from the chamber.

15. An extreme ultraviolet light generation device for generating extreme ultraviolet light by irradiating a target with a pulse laser beam and thereby turning the target into plasma, comprising:
a chamber;
a magnet configured to form a magnetic field in the chamber; and
an ion catcher including a collision unit disposed so that ions guided by the magnetic field collide with the collision unit, wherein
the ion catcher includes a tubular member having a first end and a second end,
the first end has an opening in a direction along the magnetic field,
the collision unit is disposed between the first end and the second end, and
the tubular member has a tapered shape.

16. The extreme ultraviolet light generation device according to claim 15 , wherein
the collision unit includes first and second collision units disposed near the first end and the second end, respectively.

17. The extreme ultraviolet light generation device according to claim 15 , wherein
the ion catcher is configured to satisfy a relationship L/φ>3.55, where L is the length of the tubular member from the first end to the second end and φ is the maximum diameter of the opening of the tubular member.

18. The extreme ultraviolet light generation device according to claim 15 , wherein the collision unit includes conical or polygonally-pyramidal surfaces.

19. The extreme ultraviolet light generation device according to claim 15 , wherein
the magnet is an electromagnet including a coil, and
at least a part of the tubular member is disposed in a bore of the coil.

20. The extreme ultraviolet light generation device according to claim 15 , wherein
at least a part of the tubular member is disposed to project outside from the chamber.

Assignees

• Gigaphoton Inc

Inventors

• Ueda Atsushi
• Nagai Shinji
• Ueno Yoshifumi
• Abe Tamotsu

Classifications

• H05G2/009

  Auxiliary arrangements not involved in the plasma generation · CPC title

• H05G2/007 Primary

  involving electric or magnetic fields in the process of plasma generation · CPC title

• G21K1/067

  using surface reflection, e.g. grazing incidence mirrors, gratings (multilayer mirrors G21K1/062) · CPC title

• H05G2/008 Primary

  involving an energy-carrying beam in the process of plasma generation · CPC title