System and method for controlling ion implanter

Patent metadata

Field	Value
Publication number	US-9870896-B2
Application number	US-201314099672-A
Country	US
Kind code	B2
Filing date	Dec 6, 2013
Priority date	Dec 6, 2013
Publication date	Jan 16, 2018
Grant date	Jan 16, 2018

Abstract

A system, a method, and a non-transitory computer readable storage medium for controlling an ion implanter are disclosed herein. The system includes a sample module and a control module. The sample module is configured to generate a summarized value from process data of the ion implanter, and the process data correspond to a control parameter. The control module is configured to tune a control parameter, and the control module performs an ion implantation by releasing tools of the ion implanter in accordance with the control parameter when the summarized value meets a predetermined stability requirement.

First claim

What is claimed is:

1. A method, comprising: performing a first calculation based on an initial value of a control parameter and a predetermined adjusted value, in order to determine a first value and assigning the first value to the control parameter of an ion implanter; transforming process data of the ion implanter to a summarized value, the process data corresponding to the control parameter that is assigned with the first value; on condition that the summarized value corresponding to the first value does not meet a predetermined stability requirement, performing a second calculation to determine a difference between the initial value and the predetermined adjusted value, in order to obtain a value different from the first value based on a result of comparing the summarized value, which corresponds to the first value, with a previous summarized value which corresponds to the control parameter that is previous to being assigned with the first value, and assigning the value different from the first value to the control parameter; and controlling tools of the ion implanter to perform an ion implantation in accordance with the control parameter on condition that the summarized value meets the predetermined stability requirement.

2. The method of claim 1 , wherein performing the first calculation comprises:
determining a sum of the initial value of the control parameter and the predetermined adjusted value to obtain a first result value, wherein the first value is a smaller one of the first result value and a first threshold level.

3. The method of claim 2 , wherein performing the second calculation comprises:
determining the difference between the initial value and the predetermined adjusted value to obtain a second result value on condition that the summarized value, corresponding to the first value, does not meet the predetermined stability requirement; and
adjusting the control parameter to a second value, wherein the second value is a bigger one of the second result value and a second threshold level.

4. The method of claim 3 , further comprising:
determining a third value when the summarized value, corresponding to the second value, does not meet the predetermined stability requirement, and the summarized value, corresponding to the second value, is less than the summarized value, corresponding to the first value, wherein the third value is determined the following equation:
P =[ D 1/( D 1+ D 2)]× A +[ D 2/( D 1+ D 2)]× B,

wherein P is the third value, A is the initial value, B is the first value, D 1 is the difference between the summarized value, corresponding to the initial value, and the summarized value, corresponding to the second value, D 2 is the difference between the summarized value, corresponding to the first value, and the summarized value, corresponding to the second value.

5. The method of claim 3 , further comprising:
determining a fourth value when the summarized value, corresponding to the second value, does not meet the predetermined stability requirement, and the summarized value, corresponding to the second value, is greater than the summarized value, corresponding to the first value, wherein the fourth value is determined as follows:
D=C−w *( PA ),

wherein D is the fourth value, C is the second value, PA is the predetermined adjusted value, and w is a weighted coefficient.

6. The method of claim 1 , wherein transforming the process data comprises:
filtering high noise data of the process data; and
characterizing the rest of the process data to the summarized value.

7. The method of claim 1 , wherein the transforming the process data comprises:
removing a maximum value and a minimum value of the process data; and
averaging rest of the process data to obtain the summarized value.

8. The method of claim 1 , wherein the predetermined stability requirement comprises a lower limit and an upper limit, and the summarized value meets the predetermined stability requirement in a condition that the summarized value is within a range between the lower limit and the upper limit.

9. A system comprising:
a sample module configured to generate a summarized value from process data of an ion implanter, wherein the process data correspond to a control parameter; and
a control module configured to perform a first calculation to determine a first value based on an initial value of the control parameter and a predetermined adjusted value and assign the first value to the control parameter, wherein the control module performs an ion implantation by releasing tools of the ion implanter in accordance with the control parameter on condition that the summarized value corresponding to the first value meets a predetermined stability requirement,
wherein on condition that the summarized value corresponding to the first value does not meet the predetermined stability requirement, the control module is further configured to perform a second calculation to determine a difference between the initial value and the predetermined adjusted value, in order to obtain a value different from the first value based on a result of comparing the summarized value, which corresponds to the first value, with a previous summarized value, which corresponds to the control parameter that is previous to being assigned with the first value, in order to assign the value different from the first value to the control parameter.

10. The system of claim 9 , wherein the control module is configured to perform the first calculation by determining a sum of the initial value of the control parameter and the predetermined adjusted value, in order to obtain a first result value, wherein the first value is a smaller one of the first result value and a first threshold level.

11. The system of claim 10 , wherein the control module is further configured to perform the second calculation by determining the difference between the initial value and the predetermined adjusted value to obtain a second result value on condition that the summarized value, corresponding to the first value, does not meet the predetermined stability requirement, and to adjust the control parameter to a second value, wherein the second value is a bigger one of the second result value and a second threshold level.

12. The system of claim 11 , wherein the control module is further configured to determine a third value when the summarized value, corresponding to the second value, does not meet the predetermined stability requirement, and the summarized value, corresponding to the second value, is less than the summarized value, corresponding to the first value, wherein the third value is determined as follows:
P =[D1/( D 1+ D 2)]× A +[ D 2/( D 1+ D 2)]× B,

wherein P is the third value, A is the initial value, B is the first value, D 1 is the difference between the summarized value, corresponding to the initial value, and the summarized value, corresponding to the second value, D 2 is the difference between the summarized value, corresponding to the first value, and the summarized value corresponding to the second value.

13. The system of claim 11 , wherein the control module is further configured to determine a fourth value when the summarized value, corresponding to the second value, does not meet the predetermined stability requirement, and the summarized value, corresponding to the second value, is greater than the summarized value, responding to the first value, wherein the fourth value is determined as follows:
D=C−w *( PA ),
wherein D is the fourth value, C is the second value, PA is the predetermined adjusted value, and w is a weighted coefficient.

14. The sy

Assignees

• Taiwan Semiconductor Mfg Co Ltd

Inventors

• Tsai Po-Feng
• Ho Chia-Tong
• Liao Chia-Hsing
• Lee Sheng-Wei
• Wang Jo-Fei
• Mou Jong-I

Classifications

• H01J2237/30455

  Correction during exposure · CPC title

• H01J2237/31711

  using mask · CPC title

• H01J37/304

  Controlling tubes by information coming from the objects {or from the beam}, e.g. correction signals · CPC title

• H01J37/3171 Primary

  for ion implantation · CPC title