Top notch slit profile for mems device
US-2024381034-A1 · Nov 14, 2024 · US
US9869691B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9869691-B2 |
| Application number | US-201414557614-A |
| Country | US |
| Kind code | B2 |
| Filing date | Dec 2, 2014 |
| Priority date | Dec 2, 2013 |
| Publication date | Jan 16, 2018 |
| Grant date | Jan 16, 2018 |
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A spring-mass system including a support, a mass mobile with respect to the support, at least one first and one second spring connecting the mass to the support allowing a displacement of the mass relative to the support along a first direction, the first spring being the symmetrical of the second spring with respect to an axis, each first and second spring comprising at least first and second series-connected beams arranged in zigzag, and a first closed frame surrounding the mass, at a distance from the mass and the support, each first beam having a first end connected to the support and a second end attached to the first frame and each second beam having a third end attached to the first frame and a fourth end connected to the mass.
Opening claim text (preview).
What is claimed is: 1. A spring-mass system ( 30 ) comprising: a support ( 34 ); a mass ( 32 ) mobile with respect to the support; at least one first and one second spring ( 36 A, 36 B) connecting the mass to the support and allowing a displacement of the mass relative to the support along a first direction (Ox), the first spring being the symmetrical of the second spring with respect to an axis (C), each first and second spring comprising at least first and second series-connected beams ( 38 A, 38 B, 39 A, 39 B) arranged in zigzag; and a first closed frame ( 40 ) surrounding the mass, at a distance from the mass and the support, each first beam ( 38 A, 38 B) having a first end connected to the support and a second end attached to the first frame, and each second beam ( 39 A, 39 B) having a third end attached to the first frame and a fourth end connected to the mass. 2. The spring-mass system of claim 1 , wherein at least one of the first and second beams ( 38 A, 38 B, 39 A, 39 B) comprises a bulge ( 60 A, 60 B) in its median portion. 3. The spring-mass system of claim 1 , wherein the length (L 1 ) of each first and second beam ( 38 A, 38 B, 39 A, 39 B) is greater than or equal to 1 mm. 4. The spring-mass system of claim 1 , wherein the height of each first and second beam ( 38 A, 38 B, 39 A, 39 B) measured parallel to the axis of symmetry (C) is greater than or equal to 300 μm. 5. The spring-mass system of claim 3 , wherein the width (e 1 ) of each first and second beam ( 38 A, 38 B, 39 A, 39 B) measured perpendicularly to the length in a plane perpendicular to the axis of symmetry is smaller than or equal to 100 μm. 6. The spring-mass system of claim 5 , wherein the first frame ( 40 ) is connected to each first and second beam ( 38 A, 38 B, 39 A, 39 B) by a first rounded portion ( 50 A, 52 A, 50 B, 52 B) having a radius of curvature (R 1 ) greater than or equal to ten times said width (e 1 ). 7. The spring-mass system of claim 5 , wherein the second beam ( 39 A, 39 B) is connected to the mass ( 32 ) by a second rounded portion ( 56 A, 56 B) having a radius of curvature (R 3 ) greater than or equal to ten times said width (e 1 ). 8. The spring-mass system of claim 1 , comprising at least one third and one fourth spring ( 66 A, 66 B) connecting the mass ( 32 ) to the support ( 34 ) and allowing a displacement of the mass with respect to the support along the first direction (Ox), the third spring being the symmetrical of the fourth spring with respect to said axis (C), each third and fourth spring comprising at least third and fourth series-connected beams ( 67 A, 67 B, 68 A, 68 B) arranged in zigzag, each third beam comprising a third end connected to the support and a fourth end attached to the first frame and each fourth beam comprising a fifth end attached to the first frame and a sixth end connected to the mass. 9. The spring-mass system of claim 1 , comprising, for each first and second spring ( 36 A, 36 B), at least one fifth beam ( 71 A, 71 B) in series with the second beam ( 39 A, 39 B) and in zigzag with the second beam, and a second closed frame ( 74 ) surrounding the mass ( 32 ), at a distance from the mass and the support ( 34 ), the fourth end of each second beam ( 39 A, 39 B) being attached to the second frame ( 74 ) and each fifth beam ( 71 A, 71 B) comprising a seventh end attached to the second frame and an eighth end connected to the mass. 10. The spring-mass system of claim 9 , comprising, for each first and second spring ( 36 A, 36 B), at least one sixth beam ( 72 A, 72 B) in series with the fifth beam ( 71 A, 71 B) and in zigzag with the fifth beam, and a third closed frame ( 76 ) surrounding the mass ( 32 ), at a distance from the mass and the support ( 34 ), the eighth end of each fifth beam being attached to the third frame and each sixth beam ( 72 A, 72 B) comprising a ninth end attached to the third frame and a tenth end connected to the mass. 11. The spring-mass system of claim 1 , wherein the first frame follows a closed curve selected from the group comprising a rectangle, a circle, an ellipse, and a closed broken line. 12. An energy recovery device comprising the spring-mass system ( 30 ) of claim 1 . 13. A seismometer comprising the spring-mass system ( 30 ) of claim 1 . 14. An accelerometer comprising the spring-mass system ( 30 ) of claim 1 . 15. An inclinometer comprising the spring-mass system ( 30 ) of claim 1 . 16. A magnetometer comprising the spring-mass system ( 30 ) of claim 1 and wherein at least a portion of the mass ( 32 ) is formed of a ferromagnetic material and/or of a permanent magnet. 17. A force and/or displacement sensor comprising the spring-mass system ( 30 ) of claim 1 .
For increasing stroke, i.e. achieve large displacement of actuated parts · CPC title
Measuring inclination, e.g. by clinometers, by levels · CPC title
Bridges · CPC title
For controlling stiffness, e.g. ribs · CPC title
using electric or magnetic means (G01D5/06 takes precedence) · CPC title
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