Systems and methods for MEMS-based cross-point electrical switching

Patent metadata

Field	Value
Publication number	US-9868631-B2
Application number	US-201314027818-A
Country	US
Kind code	B2
Filing date	Sep 16, 2013
Priority date	Sep 16, 2013
Publication date	Jan 16, 2018
Grant date	Jan 16, 2018

Abstract

A Microelectromechanical systems (MEMS)-based N×M cross-point switch, a MEMS-based system, and a method provide MEMS-based cross-point electrical switching for a Layer 0 flow-based switch. The N×M cross-point switch includes N inputs each at least 10 Gbps, M output each at least 10 Gbps, a plurality of Radio Frequency (RF) MEMS switches selectively interconnecting the N inputs to the M outputs; and control and addressing circuitry to selectively control the plurality of RF MEMS switches to switch each of the N inputs to a corresponding output of the M outputs. The systems and methods provide an electrical switching fabric for flow-based switching of wavelengths that can be part of a Reconfigurable Electrical Add/Drop Multiplexer (READM) with similar functionality as a ROADM in the electronic domain.

First claim

What is claimed is:

1. A Microelectromechanical systems (MEMS)-based N×M cross-point switch, comprising:
N inputs arranged in rows, each at least 10 Gbps;
M outputs arranged in columns, each at least 10 Gbps;
a plurality of Radio Frequency (RF) MEMS switches selectively electrically interconnecting, at the at least 10 Gbps, the N inputs to the M outputs at an intersection of each row and column, wherein each of the plurality of RF MEMS switches are one of closed for RF signals to flow there through and open to block the RF signals, and wherein each intersection is formed by one of two RF MEMS switches and three RF MEMS switches; and
control and addressing circuitry to selectively control the plurality of RF MEMS switches to electrically switch each of the N inputs to a corresponding output of the M outputs.

2. The MEMS-based N×M cross-point switch of claim 1 , wherein N and M are at least 32.

3. The MEMS-based N×M cross-point switch of claim 1 , wherein the plurality of RF MEMS switches are arranged in a multi-stage Clos architecture.

4. The MEMS-based N×M cross-point switch of claim 1 , wherein the plurality of RF MEMS switches are arranged in a torus architecture.

5. The MEMS-based N×M cross-point switch of claim 1 , wherein each of plurality of RF MEMS switches comprises a cantilever beam-based MEMS switch.

6. The MEMS-based N×M cross-point switch of claim 1 , wherein the plurality of RF MEMS switches are applied to differential signaling.

7. The MEMS-based N×M cross-point switch of claim 1 , wherein each of the N inputs corresponds to a wavelength in an optical communication system, and wherein the plurality of RF MEMS switches provide flow-based switching in the optical communication system for a Reconfigurable Electrical Add/Drop Multiplexer.

8. The MEMS-based N×M cross-point switch of claim 1 , wherein the plurality of RF MEMS switches are formed on a first die and the control and addressing circuitry is formed in a second die interconnected to the first die through silicon vias, micro bumps, or metal pillars.

9. The MEMS-based N×M cross-point switch of claim 8 , wherein the first die and the second die are flip-chip attached.

10. The MEMS-based N×M cross-point switch of claim 1 , wherein the plurality of RF MEMS switches form a multi-stage switch with a plurality of stages, wherein a first set of the plurality of stages is formed on a first die and a second set of the plurality of stages is formed on a second die, and wherein the first set of the plurality of stages is interconnected with the second set of the plurality of stages through silicon vias, micro bumps, or metal pillars between the first die and the second die.

11. The MEMS-based N×M cross-point switch of claim 1 , wherein the plurality of RF MEMS switches are formed on a first die with interconnections between the plurality of RF MEMS switches through one of differential semi-coax style (D-SC) and single semi-coax (S-SC) structures.

12. The MEMS-based N×M cross-point switch of claim 1 , wherein the control and addressing circuitry comprises digital control implemented on a separate substrate from the plurality of RF MEMS switches.

13. The MEMS-based N×M cross-point switch of claim 1 , wherein the control and addressing circuitry are implemented in CMOS.

14. The MEMS-based N×M cross-point switch of claim 1 , wherein a signal path from one of the N inputs to one of the M outputs comprises three RF MEMS switches of the plurality of RF MEMS switches.

15. The MEMS-based N×M cross-point switch of claim 1 , wherein a signal path from one of the N inputs to one of the M outputs comprises two RF MEMS switches of the plurality of RF MEMS switches.

16. An Microelectromechanical systems (MEMS)-based system, comprising:
one or more first die comprising a plurality of Radio Frequency (RF) MEMS switches selectively electrically interconnecting N inputs arranged in rows to M outputs arranged in columns in a cross-point switch, wherein the N inputs and the M outputs are each at least 10 Gbps and switched through the plurality of RF MEMS switches and N and M are at least 32, wherein each of the plurality of RF MEMS switches are one of closed for RF signals to flow there through and open to block the RF signals, wherein the plurality of RF MEMS switches are at an intersection of each row and column, and wherein each intersection is formed by one of two RF MEMS switches and three RF MEMS switches;
a second die comprising control and addressing circuitry to selectively control the plurality of RF MEMS switches to electrically switch each of the N inputs to a corresponding output of the M outputs; and
interconnections between the one or more first die and the second die through silicon vias, micro bumps, or metal pillars.

17. The MEMS-based system of claim 16 , wherein the one or more first die and the second die are flip-chip attached.

18. The MEMS-based system of claim 16 , further comprising:
a printed circuit board (PCB) to which the second die is disposed;
controlled collapse chip connection (C4) balls connecting a passive interposer layer to the second die and the PCB; and
micro-bump or copper pillar connections between the one or more first die and the passive interposer layer.

19. The MEMS-based system of claim 16 , wherein the cross-point switch comprises a plurality of stages, wherein a first set of the plurality of stages is formed on a first die of the one or more first die and a second set of the plurality of stages is formed on a second die the one or more first die, and wherein the first set of the plurality of stages is interconnected with the second set of the plurality of stages through silicon vias between the first die the one or more first die and the second die the one or more first die.

20. A method, comprising:
providing one or more of N inputs each at least 10 Gbps to a Microelectromechanical systems (MEMS)-based N×M cross-point switch comprising a plurality of RF MEMS switches, where N and M are at least 32, wherein each of the plurality of RF MEMS switches are one of closed for RF signals to flow there through and open to block the RF signals;
configuring control and addressing circuitry located on a separate substrate from the plurality of RF MEMS switches; and
selectively electrically switching, at the at least 10 Gbps, the one or more of N inputs to one or more of M outputs each at least 10 Gbps based on the configuration of the control and addressing circuitry,
wherein the N inputs are arranged in rows, the M outputs are arranged in columns, and the plurality of RF MEMS switches are at an intersection of each row and column, and wherein each intersection is formed by one of two RF MEMS switches and three RF MEMS switches.

Assignees

• Frankel Michael Y
• Mateosky John P
• Ciena Corp

Inventors

• Frankel Michael Y
• Mateosky John P

Classifications

• H01H59/0009

  making use of micromechanics · CPC title

• H04Q2011/0039

  Electrical control · CPC title

• H04Q2213/1304

  Coordinate switches, crossbar, 4/2 with relays, coupling field · CPC title

• H04Q2213/1302

  Relay switches · CPC title

• B81B7/008 Primary

  MEMS characterised by an electronic circuit specially adapted for controlling or driving the same (B81B7/0087 takes precedence; arrangements for starting, regulating, braking, or otherwise controlling an actuator H02N; control arrangements or circuits for visual indicators G09G3/00) · CPC title