Method of treating joint in ceramic assembly

Patent metadata

Field	Value
Publication number	US-9868276-B2
Application number	US-201214361375-A
Country	US
Kind code	B2
Filing date	Nov 28, 2012
Priority date	Nov 29, 2011
Publication date	Jan 16, 2018
Grant date	Jan 16, 2018

Abstract

A method of forming an improved sealed joint between two or more shaped ceramic structures includes providing at least first and second ceramic structures joined together by a joint comprising one or more of silicon, a silicon alloy and a silicon compound, the joint including an exposed portion interior of the joined structures, then converting at least a portion of the one or more of silicon, a silicon alloy, and a silicon compound of the joint to silicon nitride and/or silicon carbide, desirably at least at an interior exposed portion of the joint, so as to provide increased chemical resistance for the joint when aggressive chemicals are used within device formed from the sealed-together ceramic structures. The ceramic structures desirably comprise silicon carbide.

First claim

What is claimed is:

1. A method for forming a sealed joint between at least first and second formed or shaped ceramic structures, the method comprising:
a) providing at least first and second joined ceramic structures, the first and second joined ceramic structures comprising silicon carbide and being joined together by a joint therebetween, the joint comprising one or more of silicon, a silicon alloy and a silicon compound, the joint including an exposed portion;
b) converting at least a portion of the one or more of silicon, a silicon alloy, and a silicon compound of the joint to silicon nitride,
wherein the step of converting at least a portion of the silicon, silicon alloy, or silicon compound of the joint to silicon nitride comprises heating in an inert atmosphere the at least first and second ceramic structures and the joint, to a temperature greater than 1300° C. and less than a melting point of the one or more of silicon, a silicon alloy, and a silicon compound of the joint, then, while the temperature is still less than the melting point of the one or more of silicon, a silicon alloy, and a silicon compound of the joint, switching from an inert to a reactive atmosphere, then, after switching to a reactive atmosphere, ramping the temperature of the first and second ceramic structures and the joint from less than the melting point of the one or more of silicon, a silicon alloy, and a silicon compound of the joint to greater than the melting point of the one or more of silicon, a silicon alloy, and a silicon compound of the joint.

2. The method according to claim 1 wherein the step of converting comprises converting the one or more of silicon, a silicon alloy, and a silicon compound of the joint to silicon nitride at the exposed portion of the joint.

3. The method according to claim 1 wherein the step of providing at least first and second ceramic structures having a joint therebetween further comprises brazing the first and second ceramic structures together using a brazing material comprising one or more of silicon, a silicon alloy and a silicon compound.

4. The method according claim 1 wherein the step of providing the at least first and second ceramic structures having a joint there between comprises stacking the at least first and second structures together while in a green state, in the configuration to be used for joining the first and second ceramic structures, then firing said structures together while stacked in said configuration.

5. The method according to claim 4 wherein the step of providing the at least first and second ceramic structures having a joint therebetween further comprises, after firing, brazing said at least first and second ceramic structures together without any grinding or machining.

6. The method according to claim 4 wherein the step of providing the at least first and second ceramic structures having a joint therebetween further comprises grinding and/or machining after firing followed by brazing.

7. The method according to claim 1 wherein the step of converting at least a portion of the silicon, silicon alloy, or silicon compound of the joint to silicon nitride comprises heating the at least first and second ceramic structures and the joint in a pressurized inert atmosphere.

8. The method according to claim 1 wherein the reactive atmosphere comprises a mixture of different gases.

9. The method according to claim 1 further comprising, after switching to a reactive atmosphere, maintaining the first and second ceramic structures and the joint at a temperature within the range of 1300 to 1450° C. for a holding period in the range of from 1 to 4 hours.

10. The method according to claim 1 further comprising, after switching to a reactive atmosphere, ramping the temperature of the first and second ceramic structures and the joint to a temperature ranging from 1500 to 1600° C.

11. The method according to claim 1 , the reactive atmosphere comprising nitrogen or nitrogen and hydrogen.

12. An article made according to the method of claim 1 .

13. A flow reactor comprising one or more articles of claim 12 .

Assignees

• Corning Inc

Inventors

• Layouni Khaled
• Lu Yanxia Ann
• Marques Paulo Gaspar Jorge

Classifications

• C04B2237/708

  of one or more of the interlayers · CPC title

• C04B2235/9692

  Acid, alkali or halogen resistance · CPC title

• C04B2235/6567

  Treatment time · CPC title

• Y10T156/10

  Methods of surface bonding and/or assembly therefor · CPC title

• C04B2235/662

  Annealing after sintering · CPC title