Annealing for damage free laser processing for high efficiency solar cells
US-9214585-B2 · Dec 15, 2015 · US
US9865753B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9865753-B2 |
| Application number | US-201615230163-A |
| Country | US |
| Kind code | B2 |
| Filing date | Aug 5, 2016 |
| Priority date | Sep 27, 2013 |
| Publication date | Jan 9, 2018 |
| Grant date | Jan 9, 2018 |
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A solar cell structure includes P-type and N-type doped regions. A dielectric spacer is formed on a surface of the solar cell structure. A metal layer is formed on the dielectric spacer and on the surface of the solar cell structure that is exposed by the dielectric spacer. A metal foil is placed on the metal layer. A laser beam is used to weld the metal foil to the metal layer. A laser beam is also used to pattern the metal foil. The laser beam ablates portions of the metal foil and the metal layer that are over the dielectric spacer. The laser ablation of the metal foil cuts the metal foil into separate P-type and N-type metal fingers.
Opening claim text (preview).
What is claimed is: 1. A method of fabricating a solar cell, the method comprising: forming a dielectric spacer on a surface of a solar cell structure; depositing a metal layer on portions of the surface of the solar cell structure that are exposed by the dielectric spacer; fitting a metal foil to the metal layer; and patterning the metal foil after fitting the metal foil to the metal layer. 2. The method of claim 1 , further comprising: welding the metal foil to the metal layer after fitting the metal foil to the metal layer but before patterning the metal foil. 3. The method of claim 1 , wherein fitting the metal foil to the metal layer comprises placing a sheet of aluminum foil on the metal layer. 4. The method of claim 1 , wherein patterning the metal foil comprises directing a laser beam on the metal foil to ablate the metal foil and the metal layer. 5. The method of claim 1 , wherein depositing the metal layer on the dielectric spacer comprises depositing a blanket layer of metal on the dielectric spacer. 6. The method of claim 1 , wherein forming the dielectric spacer on the surface of the solar cell structure includes printing the dielectric spacer on the surface of the solar cell structure. 7. The method of claim 1 , further comprising: after fitting the metal foil to the metal layer but before patterning the metal foil, directing a laser beam on the metal foil to weld the metal foil to the metal layer. 8. A method of fabricating a solar cell, the method comprising: forming a dielectric spacer over an interface of adjacent P-type and N-type doped regions a solar cell structure; forming a metal layer over the dielectric spacer; fitting a metal foil to the metal layer; and patterning the metal foil in a first laser process after fitting the metal foil to the metal layer. 9. The method of claim 8 , further comprising: welding the metal foil to the metal layer after fitting the metal foil to the metal layer but before patterning the metal foil. 10. The method of claim 8 , wherein fitting the metal foil to the metal layer comprises placing a sheet of aluminum foil on the metal layer. 11. The method of claim 8 , wherein forming the metal layer on the dielectric spacer comprises depositing a blanket layer of metal on the dielectric spacer. 12. The method of claim 8 , wherein the dielectric spacer is printed over the interface of the adjacent P-type and N-type doped regions of the solar cell structure. 13. The method of claim 8 , further comprising: after fitting the metal foil to the metal layer but before patterning the metal foil, welding the metal foil to the metal layer in a second laser process. 14. The method of claim 13 , wherein the first and second laser processes are performed in-situ. 15. The method of claim 8 , further comprising: pattering the metal layer and the metal foil in the same first laser process. 16. A method of fabricating a solar cell, the method comprising: forming a dielectric spacer over a surface of a solar cell structure; forming a metal layer over the dielectric spacer; fitting a metal foil to the metal layer; patterning the metal foil in a laser ablation process after fitting the metal foil to the metal layer; and welding the metal foil to the metal layer in a laser welding process. 17. The method of claim 16 , wherein the laser ablation process and the laser welding process are performed in-situ. 18. The method of claim 16 , wherein laser ablation process patterns both the metal layer and the metal foil. 19. The method of claim 16 , wherein fitting the metal foil to the metal layer comprises placing a sheet of aluminum foil on the metal layer. 20. The method of claim 16 , wherein forming the dielectric spacer over the surface of the solar cell structure includes printing the dielectric spacer over the surface of the solar cell structure.
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