Thin-film transistor and method for forming the same

Patent metadata

Field	Value
Publication number	US-9865745-B2
Application number	US-201615011794-A
Country	US
Kind code	B2
Filing date	Feb 1, 2016
Priority date	Jul 3, 2015
Publication date	Jan 9, 2018
Grant date	Jan 9, 2018

Abstract

A thin-film transistor comprises a substrate, a first electrode on the top surface of the substrate, an insulation layer on the top surface of the substrate and covering the first electrode, a semiconductor oxide layer on the top surface of the insulation layer, a protection layer on the top surface of the semiconductor oxide layer, an organic dielectric layer on the top surface of the semiconductor oxide layer and covering the protection layer, a source electrode and a drain electrode both penetrating the organic dielectric layer from the top surface thereof. A channel thickness of the semiconductor oxide layer is not thicker than 20 nanometers. The source electrode contacts the semiconductor oxide layer at the first side of the protection layer and the drain electrode contacts the semiconductor oxide layer at the second side, opposite to the first side, of the protection layer.

First claim

What is claimed is:

1. A thin-film transistor, comprising:
a substrate;
a gate electrode disposed on a top surface of the substrate;
a gate insulator layer disposed on the top surface of the substrate and covering on the gate electrode;
a semiconductor oxide layer disposed on the top surface of the gate insulator layer and comprising a semiconductor channel, and a thickness of the semiconductor oxide layer not being larger than 20 nanometers(nm);
a protection layer disposed on a top surface of the semiconductor oxide layer and corresponding to the semiconductor channel;
an organic dielectric layer disposed over both the protection layer and the semiconductor oxide layer, the organic dielectric layer being in contact with a top surface of the protection layer, the organic dielectric layer also being in contact with the top surface of the semiconductor oxide layer on lateral sides of the semiconductor oxide layer, which are not covered by the protection layer, and comprising a plurality of through holes; and
a source electrode and a drain electrode, disposed on a top surface of the organic dielectric layer and contacting the semiconductor oxide layer through the plurality of through holes.

2. The thin-film transistor according to claim 1 , wherein the semiconductor oxide layer is made of metallic oxide, and the metallic oxide is selected from at least one of a group consisting of indium gallium zinc oxide, gallium oxide, indium oxide, zinc oxide, indium tin oxide and a combination thereof.

3. The thin-film transistor according to claim 1 , wherein the protection layer is made of an inorganic isolation material, and the inorganic isolation material is selected from at least one of a group consist of silicon nitride, silicon dioxide, silicon oxynitride, metallic oxide, and a combination thereof.

4. The thin-film transistor according to claim 1 , wherein the organic dielectric layer is made of at least one of a group consisting of organic polymer, organic photoresist and organic-inorganic hybrid material.

5. The thin-film transistor according to claim 4 , wherein the organic dielectric layer is made of an organic compound with a functional group, and the functional group is selected from a group consisting of hydroxyl, amino and mercaptan.

6. The thin-film transistor according to claim 1 , wherein the protection layer partially covers the top surface of the semiconductor oxide layer, and a bottom surface of the protection layer is substantially smaller than the top surface of the semiconductor oxide layer.

7. The thin-film transistor according to claim 6 , wherein an area of the protection layer is substantially the same as an area of the semiconductor channel.

Assignees

• Au Optronics Corp

Inventors

• Lin Liang-Yu
• Cheng Chun-Cheng

Classifications

• H10P14/3434

  being oxide semiconductor materials (Group IIB-VIA semiconductor materials H10P14/3424) · CPC title

• H10P14/3426

  Oxides · CPC title

• H10P14/265

  using solutions · CPC title

• H01L29/78618

  Electricity · mapped topic

• H01L21/02565

  Electricity · mapped topic