VTFET devices utilizing low temperature selective epitaxy

Patent metadata

Field	Value
Publication number	US-9865730-B1
Application number	US-201615338653-A
Country	US
Kind code	B1
Filing date	Oct 31, 2016
Priority date	Oct 31, 2016
Publication date	Jan 9, 2018
Grant date	Jan 9, 2018

Abstract

Low temperature epitaxial silicon deposition for forming the top source or drain regions of VTFET structures. The methods generally include epitaxially growing a silicon layer with a dopant at a temperature less 500° C. on a first surface and an additional surface to form a single crystalline silicon on the first surface and a polysilicon or amorphous silicon on the additional surface. The epitaxially grown silicon layer is then exposed to an etchant include HCl and germane at a temperature less than 500° C. for a period of time effective to selectively remove the polysilicon/amorphous silicon on the additional surface and form a germanium diffused region on and in an outer surface of the single crystalline silicon formed on the first surface.

First claim

What is claimed is:

1. A method for forming a semiconductor structure comprising:
providing a substrate comprising a first surface comprising single crystalline silicon and at least one additional surface comprising a dielectric material;
epitaxially growing a silicon layer with a dopant at a temperature less than 500° C. on the substrate to form a single crystalline silicon on the first surface and a polysilicon/amorphous silicon on the additional surface, wherein the single crystalline silicon on the first surface and the polysilicon/amorphous silicon comprise a boundary therebetween, wherein a shape of the boundary is multifaceted; and
exposing the epitaxially grown silicon layer to an etchant comprising HCl and germane at a temperature less than 500° C. to selectively remove the polysilicon/amorphous silicon on the additional surface and form a germanium diffused region on and in an outer surface of the single crystalline silicon formed on the first surface.

2. The method of claim 1 , wherein growing the silicon layer with the dopant comprises exposing the substrate to a gaseous mixture of phosphorous containing gas and a silicon containing gas selected from the group consisting of SiH 4 , Si 2 H 6 , Si 3 H 8 and Si 4 H 10 .

3. The method of claim 1 , wherein the first surface is an exposed top surface of a vertically oriented channel region of a vertical finFET structure.

4. The method of claim 1 , wherein the single crystalline silicon on the first surface defines a top source or drain region of a vertical finFET structure.

5. The method of claim 1 , wherein the growing of the silicon layer with the dopant and the exposing of the grown silicon layer to the etchant is cycled, wherein multiple layers of the germanium diffused region is formed in and on the single crystalline silicon formed on the first surface.

6. The method of claim 1 , wherein the dielectric material is an oxide or a nitride.

7. The method of claim 2 , wherein the phosphorous containing gas is phosphine.

8. A method of forming a top source or drain region in a VTFET device, the method comprising:
positioning a semiconductor substrate including a partial VTFET structure in an epitaxially deposition chamber, the partial VTFET structure comprising a substrate, a bottom doped source or drain region, a vertically oriented channel region extending from the bottom doped source or drain region, a gate stack over the channel region and between a bottom spacer overlying a portion of the bottom doped source and drain region and a top spacer, wherein a deposition surface of the partial VTFET structure includes a dielectric material and a topmost portion of the channel region;
applying first source gasses for deposition of a material layer to the deposition surface at a temperature of less than 500° C., the first source gases comprising a phosphorous containing gas and a silicon containing gas selected from the group consisting of SiH 4 , Si 2 H 6 , Si 3 H 8 and Si 4 H 10 , wherein a doped polysilicon/amorphous silicon layer is formed on the dielectric material and a doped single crystalline silicon layer is formed on the exposed topmost portion of the channel region;
applying second source gasses for surface modification and etching, the second source gasses comprising HCl and germane, wherein the surface modification selectively diffuses germanium atoms into a portion of the polysilicon/amorphous silicon to render the germanium atom diffused portion removable upon contact with the HCl etchant so as to selectively remove the portion of the doped polysilicon/amorphous silicon layer relative to the doped single crystalline silicon and form the top source or drain region in the VTFET device.

9. The method of claim 8 , wherein the dielectric material is an oxide or a nitride.

10. The method of claim 8 , wherein the doped single crystalline silicon formed on the exposed topmost portion of the channel region is multifaceted.

11. The method of claim 8 , wherein the doped single crystalline silicon formed on the exposed topmost portion of the channel region is diamond shaped.

12. The method of claim 8 , wherein the single crystalline silicon on the first surface defines a top source or drain region of the VTFET.

13. The method of claim 8 , further comprising cycling the first and second source gasses to provide multiple cycles of deposition followed by the surface modification and etching, wherein the doped single crystalline silicon includes thin layers of germanium atom diffused regions on and in the doped single crystalline silicon.

14. The method of claim 8 , wherein the dielectric is an oxide or a nitride.

15. The method of claim 8 , wherein the exposed topmost portion of the channel region extends beyond the dielectric.

16. The method of claim 8 , wherein the phosphorous containing gas is phosphine.

Assignees

• IBM

Inventors

• Jagannathan Hemanth
• Mochizuki Shogo

Classifications

• H10P50/642

  Chemical etching · CPC title

• H10P14/3458

  Monocrystalline · CPC title

• H10P14/3456

  Polycrystalline · CPC title

• H10P14/3411

  Silicon, silicon germanium or germanium · CPC title

• H10P14/3454

  Amorphous · CPC title