Laterally diffused metal oxide semiconductor with segmented gate oxide

Patent metadata

Field	Value
Publication number	US-9865729-B1
Application number	US-201615385709-A
Country	US
Kind code	B1
Filing date	Dec 20, 2016
Priority date	Dec 20, 2016
Publication date	Jan 9, 2018
Grant date	Jan 9, 2018

Abstract

A power transistor is provided with at least one transistor finger that lies within a semiconductor material. The gate oxide is segmented into a set of segments with thick field oxide between each segment in order to reduce gate capacitance and thereby improve a resistance times gate charge figure of merit.

First claim

What is claimed is:

1. An integrated circuit comprising:
a semiconductor material substrate;
a power transistor having at least one transistor finger that lies within the semiconductor material substrate, each transistor finger including:
a source region stripe;
a drain region stripe substantially parallel to the source region stripe;
a channel region stripe located between the source region stripe and the drain region stripe;
a comb shaped gate oxide region stripe that overlies the channel region stripe, in which the comb shaped gate oxide region stripe has gate oxide fingers oriented perpendicular to the source region stripe and the drain region stripe;
a comb shaped dielectric region with dielectric fingers that lie between each of the fingers of the comb shaped gate oxide; and
a conductive gate layer that overlies the comb shaped gate oxide and the comb shaped dielectric.

2. The power transistor of claim 1 , in which the power transistor is a laterally diffused metal oxide semiconductor device having a drift region connected to the drain region stripe.

3. The integrated circuit of claim 1 , in which the at least one transistor finger has a linear topology.

4. The integrated circuit of claim 1 , in which each of the fingers of the comb shaped gate oxide has a width that is approximately equal to a width of an adjacent finger of the comb shaped dielectric.

5. The integrated circuit of claim 1 , in which a ratio of the width of a finger of the comb shaped gate oxide to the sum of the width of the finger of the gate oxide plus the width of the adjacent dielectric finger is less than one.

6. The integrated circuit of claim 1 , further including control circuitry that lies within the semiconductor material substrate with at least one output signal coupled to the conductive gate layer.

7. A method for fabricating a power transistor in an integrated circuit, the method comprising:
diffusing a first well having a first conductivity type and a second well having a second conductivity type into an epitaxial layer of a semiconductor substrate;
diffusing a source region stripe into the first well and a substantially parallel drain region stripe into the second well such that a channel region stripe is located substantially parallel to and between the source region stripe and the drain region stripe;
growing a comb shaped field oxide region stripe that overlies the channel region stripe, in which the comb shaped field oxide region stripe has fingers oriented perpendicular to the source region stripe and the drain region stripe;
growing a layer of gate oxide over the semiconductor substrate and field oxide region to form a comb shaped gate oxide region with fingers that lie between each of the fingers of the comb shaped field oxide; and
growing and patterning a conductive gate layer that overlies the comb shaped gate oxide and the comb shaped field oxide.

8. The method of claim 7 , in which the power transistor is a laterally diffused metal oxide semiconductor device and in which the second well forms a drift region.

9. The method of claim 7 , in which each of the fingers of the comb shaped gate oxide has a width that is approximately equal to a width of an adjacent finger of the comb shaped field oxide.

10. The method of claim 7 , in which a ratio of the width of a finger of the comb shaped gate oxide to the sum of the width of the finger of the gate oxide plus the width of the field oxide finger is less than one.

Assignees

• Texas Instruments Inc

Inventors

• Pendharkar Sameer
• Chuang Ming-Yeh

Classifications

• H01L29/66681

  Electricity · mapped topic

• H01L29/7816 Primary

  Electricity · mapped topic

• H01L29/408

  Electricity · mapped topic

• H01L29/0696

  Electricity · mapped topic

• H01L29/42364

  Electricity · mapped topic