Piezoelectric and electromagnetic type two-dimensional optical deflector and its manufacturing method
US-9632309-B2 · Apr 25, 2017 · US
US9864164B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9864164-B2 |
| Application number | US-201615368959-A |
| Country | US |
| Kind code | B2 |
| Filing date | Dec 5, 2016 |
| Priority date | Dec 10, 2015 |
| Publication date | Jan 9, 2018 |
| Grant date | Jan 9, 2018 |
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An optical deflector includes a mirror rotatable around a rotating shaft of the optical deflector, the mirror including a base made of metal and a reflective surface, the reflective surface being parallel to an axial direction of the rotating shaft of the mirror. The mirror has a length that is twice a length from a center of the rotating shaft to the reflective surface, which is shorter than a length of the reflective surface in the direction of the rotating shaft.
Opening claim text (preview).
The invention claimed is: 1. An optical deflector, comprising: a rotatable shaft; a mirror rotatable around the rotatable shaft of the optical deflector, the mirror including a base made of metal and a reflective surface, the reflective surface being parallel to an axial direction of the rotatable shaft of the mirror; and a motor to rotate the rotatable shaft and the mirror through at least a complete revolution, wherein a length that is twice a length of the mirror from a center of the rotatable shaft to the reflective surface is shorter than a length of the reflective surface in the direction of the rotatable shaft. 2. The optical deflector according to claim 1 , wherein the rotatable shaft is a separate element from the mirror and integrated with the mirror by shrink fitting. 3. The optical deflector according to claim 2 , wherein the mirror further includes: a reference surface orthogonal to the reflective surface; and a contact surface parallel to the rotatable shaft of the mirror, the reference surface and the contact surface being integral with the mirror, wherein, while the mirror is being held by a holding device for processing, the reference surface and the contact surface are pressed against a first member and a second member of the holding device, respectively, to secure a position of the mirror in vertical and horizontal directions. 4. The optical deflector according to claim 3 , wherein a distance from the rotatable shaft to the contact surface is larger than a distance from the rotatable shaft to the reference surface. 5. The optical deflector according to claim 3 , wherein the contact surface includes a recess forming an inside wall on the contact surface, the inside wall being a polyhedral inside wall including a plurality of intersecting planes. 6. The optical deflector according to claim 3 , wherein the contact surface includes a through-hole forming a curved inside wall on the contact surface. 7. A light detection and ranging (LiDAR) device comprising the optical deflector according to claim 1 . 8. A method for mirror finishing by cutting of a mirror for an optical deflector which includes the mirror which is rotatable around a rotatable shaft of the optical deflector, the mirror including a base made of metal and a reflective surface, the reflective surface being parallel to an axial direction of the rotatable shaft of the mirror, wherein a length that is twice a length of the mirror from a center of the rotatable shaft to the reflective surface is shorter than a length of the reflective surface in the direction of the rotatable shaft, wherein the mirror further includes a reference surface orthogonal to the reflective surface; and a contact surface parallel to the rotatable shaft of the mirror, the reference surface and the contact surface being integral with the mirror, wherein, while the mirror is being held by a holding device for processing, the reference surface and the contact surface are pressed against a first member and a second member of the holding device, respectively, to secure a position of the mirror in vertical and horizontal directions, the method comprising: applying mirror finishing by cutting on the reflective surface of the mirror, while holding the mirror with the first member and second member, the first member and the second member respectively being pressed against the reference surface and the contact surface. 9. An optical deflector, comprising: a mirror rotatable around a rotating shaft of the optical deflector, the mirror including a base made of metal and a reflective surface, the reflective surface being parallel to an axial direction of the rotating shaft of the mirror, wherein a length that is twice a length of the mirror from a center of the rotating shaft to the reflective surface is shorter than a length of the reflective surface in the direction of the rotating shaft, wherein the rotatable shaft is a separate element from the mirror and integrated with the mirror by shrink fitting, wherein the mirror further includes: a reference surface orthogonal to the reflective surface; and a contact surface parallel to the rotating shaft of the mirror, the reference surface and the contact surface being integral with the mirror, wherein, while the mirror is being held by a holding device for processing, the reference surface and the contact surface are pressed against a first member and a second member of the holding device, respectively, to secure a position of the mirror in vertical and horizontal directions, wherein the contact surface includes a recess forming an inside wall on the contact surface, the inside wall being a polyhedral inside wall including a plurality of intersecting planes.
for rotating or oscillating mirrors · CPC title
with one or more pivoting mirrors or galvano-mirrors (G02B26/101 takes precedence) · CPC title
relating to scanning · CPC title
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