Substrate temperature measuring device, substrate processing apparatus including the same, and substrate temperature measuring method using the same
US-2024019311-A1 · Jan 18, 2024 · US
US9863812B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9863812-B2 |
| Application number | US-201515124475-A |
| Country | US |
| Kind code | B2 |
| Filing date | Feb 25, 2015 |
| Priority date | Mar 17, 2014 |
| Publication date | Jan 9, 2018 |
| Grant date | Jan 9, 2018 |
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A first radiance meter that is provided so as to face an object in an atmosphere in which there is dust and measures the radiance of the object and a second radiance meter that is provided so as not to oppose the object and measures the radiance of the dust between the object and the first radiance meter are used to measure the temperature of the object on the basis of the object radiance that has been measured by the first radiance meter and the radiance of the dust between the object and the first radiance meter that has been measured by the second radiance meter.
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The invention claimed is: 1. A method for measuring a temperature of an object, the method using a first radiance meter which is provided to face the object in an atmosphere where dust is present and measures a radiance of the object and a second radiance meter which is provided without facing the object and measures a radiance of the dust present between the object and the first radiance meter so that a temperature of the object is measured from the radiance of the object measured by the first radiance meter and the radiance of the dust present between the object and the first radiance meter measured by the second radiance meter. 2. The method for measuring a temperature of an object according to claim 1 , wherein the radiance of the dust is measured at two wavelengths. 3. The method for measuring a temperature of an object according to claim 2 , wherein, at the time of measuring the radiance of the dust, the measurement is performed in a state where a temperature of a wall surface facing the second radiance meter is lowered by cooling structure. 4. The method for measuring a temperature of an object according to claim 2 , wherein, at the time of measuring the radiance of the dust, an emissivity of a wall surface facing the second radiance meter is set to 0.9 or more. 5. The method for measuring a temperature of an object according to claim 2 , wherein the radiance of the object is measured at two wavelengths. 6. The method for measuring a temperature of an object according to claim 2 , wherein a plurality of radiance meters are used as the second radiance meter to measure two or more radiances of the dust, and the measurement is made from the radiance of the object measured by the first radiance meter and the two or more radiances of the dust present between the object and the first radiance meter measured by the plurality of second radiance meters. 7. The method for measuring a temperature of an object according to claim 1 , wherein, at the time of measuring the radiance of the dust, the measurement is performed in a state where a temperature of a wall surface facing the second radiance meter is lowered by cooling structure. 8. The method for measuring a temperature of an object according to claim 7 , wherein, at the time of measuring the radiance of the dust, an emissivity of the wall surface facing the second radiance meter is set to 0.9 or more. 9. The method for measuring a temperature of an object according to claim 7 , wherein the radiance of the object is measured at two wavelengths. 10. The method for measuring a temperature of an object according to claim 7 , wherein a plurality of radiance meters are used as the second radiance meter to measure two or more radiances of the dust, and the measurement is made from the radiance of the object measured by the first radiance meter and the two or more radiances of the dust present between the object and the first radiance meter measured by the plurality of second radiance meters. 11. The method for measuring a temperature of an object according to claim 1 , wherein, at the time of measuring the radiance of the dust, an emissivity of a wall surface facing the second radiance meter is set to 0.9 or more. 12. The method for measuring a temperature of an object according to claim 11 , wherein, at the time of measuring a radiance of the dust, a blackbody cavity is provided in the wall surface facing the second radiance meter. 13. The method for measuring a temperature of an object according to claim 12 , wherein the radiance of the object is measured at two wavelengths. 14. The method for measuring a temperature of an object according to claim 12 , wherein a plurality of radiance meters are used as the second radiance meter to measure two or more radiances of the dust, and the measurement is made from the radiance of the object measured by the first radiance meter and the two or more radiances of the dust present between the object and the first radiance meter measured by the plurality of second radiance meters. 15. The method for measuring a temperature of an object according to claim 11 , wherein the radiance of the object is measured at two wavelengths. 16. The method for measuring a temperature of an object according to claim 11 , wherein a plurality of radiance meters are used as the second radiance meter to measure two or more radiances of the dust, and the measurement is made from the radiance of the object measured by the first radiance meter and the two or more radiances of the dust present between the object and the first radiance meter measured by the plurality of second radiance meters. 17. The method for measuring a temperature of an object according to claim 1 , wherein the radiance of the object is measured at two wavelengths. 18. The method for measuring a temperature of an object according to claim 17 , wherein a plurality of radiance meters are used as the second radiance meter to measure two or more radiances of the dust, and the measurement is made from the radiance of the object measured by the first radiance meter and the two or more radiances of the dust present between the object and the first radiance meter measured by the plurality of second radiance meters. 19. The method for measuring a temperature of an object according to claim 1 , wherein a plurality of radiance meters are used as the second radiance meter to measure two or more radiances of the dust, and the measurement is made from the radiance of the object measured by the first radiance meter and the two or more radiances of the dust present between the object and the first radiance meter measured by the plurality of second radiance meters.
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