Edge seal for lower electrode assembly

Patent metadata

Field	Value
Publication number	US-9859142-B2
Application number	US-201113277873-A
Country	US
Kind code	B2
Filing date	Oct 20, 2011
Priority date	Oct 20, 2011
Publication date	Jan 2, 2018
Grant date	Jan 2, 2018

Abstract

A lower electrode assembly useful for supporting a semiconductor substrate in a plasma processing chamber includes a temperature controlled lower base plate, an upper plate, a mounting groove surrounding a bond layer and an edge seal comprising an elastomeric band having an outer concave surface in an uncompressed state, the band mounted in the groove such that upper and lower ends of the band are axially compressed and a maximum outward bulging of the band is no greater than a predetermined distance.

First claim

What is claimed is:

1. An edge seal for a lower electrode assembly useful for supporting a semiconductor substrate in a plasma processing chamber, the edge seal comprising:
an annular elastomeric band having an annular horizontal upper surface, an annular horizontal lower surface, a cylindrical inner surface extending from an inner periphery of the horizontal lower surface to an inner periphery of the horizontal upper surface, and an inclined outer surface extending from an outer periphery of the horizontal lower surface to an outer periphery of the horizontal upper surface such that the band is widest at the horizontal upper surface and narrowest at the horizontal lower surface in an uncompressed state, the band dimensioned to fit in an annular mounting groove extending around the lower electrode assembly such that the horizontal upper and lower surfaces of the band are axially compressed and a maximum outward bulging of the band is no greater than a predetermined distance, the outward bulging not exceeding a maximum outer diameter of the band in the uncompressed state, wherein the predetermined distance is no greater than 0.004 inch.

2. The edge seal of claim 1 , wherein the edge seal is made of perfluoroelastomer material having a Shore Hardness A of 60 to 75 and a specific gravity of 1.9 to 2.1.

3. The edge seal of claim 1 , wherein the edge seal has an aspect ratio of height:thickness of 2 to 5.

4. The edge seal of claim 1 , wherein the cylindrical inner surface includes one or more geometrical features thereon.

5. The edge seal of claim 4 , wherein the one or more geometrical features comprise at least one depression in the cylindrical inner surface or projection on the inner surface.

6. The edge seal of claim 1 , wherein the band has a height of 0.05 to 0.15 inch, a width of 0.025 to 0.050 inch, and the cylindrical inner surface has an inner diameter of 11.3 to 11.4 inches.

7. The edge seal of claim 1 , wherein corners between the cylindrical inner surface and the horizontal upper and lower surfaces are rounded.

8. An edge seal for a lower electrode assembly useful for supporting a semiconductor substrate in a plasma processing chamber, the edge seal comprising:
an annular elastomeric band having an annular horizontal upper surface, an annular horizontal lower surface, a cylindrical inner surface extending from an inner periphery of the horizontal lower surface to an inner periphery of the horizontal upper surface, and a pair of converging outer surfaces including a lower converging outer surface extending upwardly and inwardly from an outer periphery of the horizontal lower surface and an upper converging outer surface extending downwardly and inwardly from an outer periphery of the horizontal upper surface wherein the lower converging outer surface and the upper converging outer surfaces meet to form an obtuse angle such that the band is widest at the horizontal upper and lower surfaces thereof and narrowest at a middle thereof in an uncompressed state, the band dimensioned to fit in an annular mounting groove extending around the lower electrode assembly such that the horizontal upper and lower surfaces of the band are axially compressed and a maximum outward bulging of the band is no greater than a predetermined distance, the outward bulging not exceeding a maximum outer diameter of the elastomer band in the uncompressed state, wherein the predetermined distance is no greater than 0.004 inch.

9. The edge seal of claim 8 , wherein the edge seal is made of perfluoroelastomer material having a Shore Hardness A of 60 to 75 and a specific gravity of 1.9 to 2.1.

10. The edge seal of claim 8 , wherein the edge seal has an aspect ratio of height:thickness of 2 to 5.

11. The edge seal of claim 8 , wherein the cylindrical inner surface includes one or more geometrical features thereon.

12. The edge seal of claim 11 , wherein the one or more geometrical features comprise at least one depression in the cylindrical inner surface or projection on the inner surface.

13. The edge seal of claim 8 , wherein corners between the cylindrical inner surface and the horizontal upper and lower surfaces are rounded.

14. The edge seal of claim 8 , wherein the band has a height of 0.05 to 0.15 inch, a width of 0.025 to 0.050 inch, and an inner diameter of 11.3 to 11.4 inches.

15. The edge seal of claim 8 , wherein an upper edge of the cylindrical inner surface of the band is rounded.

16. The edge seal of claim 8 , wherein the angle formed between the pair of converging surfaces is about 110° to about 140°.

17. The edge seal of claim 1 , wherein an upper edge of the cylindrical inner surface of the band is rounded.

Assignees

• Schaefer David
• Chhatre Ambarish
• Gaff Keith William
• Lee Sung
• Lam Res Corp

Inventors

• Schaefer David
• Chhatre Ambarish
• Gaff Keith William
• Lee Sung

Classifications

• H10P72/7616

  characterised by a coating, a hardness or a material · CPC title

• H10P72/722 Primary

  Details of electrostatic chucks · CPC title

• H01J37/32715

  Workpiece holder · CPC title

• H01J37/32513

  Sealing means, e.g. sealing between different parts of the vessel · CPC title

• H01J37/32724

  Temperature · CPC title