Desmear treatment device and desmear treatment method

Patent metadata

Field	Value
Publication number	US-9859131-B2
Application number	US-201515316806-A
Country	US
Kind code	B2
Filing date	May 22, 2015
Priority date	Jun 13, 2014
Publication date	Jan 2, 2018
Grant date	Jan 2, 2018

Abstract

The present invention has as its object the provision of a desmear treatment device and a desmear treatment method capable of reliably performing a desmear treatment with high treatment efficiency. In the desmear treatment method of the present invention, when irradiating a to-be-treated object disposed in a treatment space with vacuum ultraviolet rays via an ultraviolet transmitting window member to remove smear in the to-be-treated object, a treatment gas containing active species to be activated by the irradiation of the vacuum ultraviolet rays and having contained moisture is supplied into the treatment space. The desmear treatment device includes treatment gas supply means having a humidifying mechanism for causing a treatment gas containing active species to be activated by vacuum ultraviolet rays from an ultraviolet light source to contain moisture.

First claim

The invention claimed is:

1. A desmear treatment device for removing smear in a wiring board material including an insulating layer and a conductive layer layered on each other and being provided with a via hole or a through-hole, the desmear treatment device comprising:
an ultraviolet light source including a xenon excimer lamp for emitting vacuum ultraviolet rays with a center wavelength of 172 nm; a light irradiation chamber in which the ultraviolet light source is housed; a treatment chamber having a treatment space where a to-be-treated object is disposed; an ultraviolet transmitting window member for separating an inner space of the light irradiation chamber from the treatment space of the treatment chamber; a treatment stage having a supply port and discharge port formed at positions spaced apart from each other between which the to-be-treated object is disposed; and treatment gas supply means for supplying a treatment gas into the treatment space, wherein
the treatment gas supply means includes a humidifying mechanism for causing a treatment gas, having an oxygen concentration of not lower than 50% by volume and containing active species to be activated by the vacuum ultraviolet rays from the ultraviolet light source, to contain moisture and supplies, into the treatment space, the treatment gas humidified by the humidifying mechanism to have an absolute humidity by volume within a range of 10 to 70 g/m 3 , and
the desmear treatment device further comprises a dew-point instrument for measuring a dew-point temperature of the gas discharged from the treatment space; and a control mechanism for calculating the absolute humidity by volume of the treatment gas on the basis of the dew-point temperature measured by the dew-point instrument to control an amount of moisture to be contained in the treatment gas.

2. The desmear treatment device according to claim 1 , wherein
the ultraviolet light source is formed by a plurality of rod-shaped ultraviolet lamps disposed side by side such that central axes of each of the plurality of ultraviolet lamps extend parallel to one another in a same horizontal plane; and
the supply port and the discharge port in the treatment stage are formed at positions spaced apart from each other in the direction along which the ultraviolet lamps are arranged.

3. The desmear treatment device according to claim 1 , wherein the supply port and the discharge port each have an elongated slit-shaped long opening extending along a central axes of the ultraviolet light source.

4. The desmear treatment device according to claim 3 , wherein an opening area of the discharge port is larger than an opening area of the supply port.

Assignees

• Ushio Electric Inc

Inventors

• Horibe Hiroki
• Habu Tomoyuki

Classifications

• H10P50/242

  of Group IV materials · CPC title

• H10W70/095

  of vias therein · CPC title

• H10W70/097 Primary

  Cleaning · CPC title

• B08B5/00

  Cleaning by methods involving the use of air flow or gas flow (cleaning hollow articles by methods or apparatus specially adapted thereto B08B9/00) · CPC title

• B08B7/0057

  by ultraviolet radiation · CPC title