Defect classification using CAD-based context attributes

Patent metadata

Field	Value
Publication number	US-9858658-B2
Application number	US-201213451486-A
Country	US
Kind code	B2
Filing date	Apr 19, 2012
Priority date	Apr 19, 2012
Publication date	Jan 2, 2018
Grant date	Jan 2, 2018

Abstract

A method for classification includes receiving an image of an area of a semiconductor wafer on which a pattern has been formed, the area containing an image location of interest, and receiving computer-aided design (CAD) data relating to the pattern comprising a CAD location of interest corresponding to the image location of interest. At least one value for one or more attributes of the image location of interest is computed based on a context of the CAD location of interest with respect to the CAD data.

First claim

What is claimed is:

1. A method comprising:
receiving an image of a portion of a semiconductor wafer that includes a defect, the image having been captured by an inspection system;
segmenting the image of the portion of the semiconductor wafer to identify one or more elements of a pattern built on the portion of the semiconductor wafer;
processing, by a processor, the segmented image to calculate a value for an attribute of the defect in the image based on at least one of:
an extent of overlap between the defect and at least one of the identified elements of the pattern;
a number of identified elements of the pattern intersected by the defect; and
a gray level value indicative of a gray level of the defect relative to a gray level of at least one of the identified elements of the pattern; and

classifying the defect based on the value for the attribute of the defect and an amount of distance between the defect and at least one element of the pattern built on a surface of the portion of the semiconductor wafer that is not in a field of view associated with the image.

2. The method of claim 1 , wherein the extent of overlap is selected from the group constituted by: an area of overlap between the defect and at least one of the one or more identified elements of the pattern; an area of overlap between the defect and all identified elements of the pattern; a relationship between an area of at least one identified element and its area overlapped with the defect; and a relationship between an area of all identified elements and their area overlapped with the defect.

3. The method of claim 1 , wherein the value for the attribute of the defect is calculated further based on computer-aided design (CAD) data associated with the pattern built on the semiconductor wafer.

4. The method of claim 3 , wherein the value for the attribute of the defect is calculated further based on a portion of the CAD data associated with an underlying layer below a surface of the semiconductor wafer.

5. The method of claim 1 , wherein the value for the attribute of the defect is calculated further based on a portion of the CAD data associated with at least one element of the pattern that is not in the field of view associated with the image.

6. The method of claim 5 , wherein the at least one element of the pattern is in an area of the semiconductor wafer outside the area corresponding to the image of the portion of the semiconductor wafer.

7. The method of claim 1 , wherein the value for the attribute of the defect is calculated further based on a spatial relationship between the defect and the at least one of the identified elements of the pattern.

8. The method of claim 1 , wherein the segmenting of the image of the portion of the semiconductor wafer is provided using computer-aided design (CAD) data.

9. The method of claim 1 , wherein the image of the portion of the semiconductor wafer comprises a scanning electronic microscope (SEM) image.

10. The method of claim 1 , wherein the value for the attribute of the defect is calculated further based on a topographical feature of the defect.

11. A system comprising:
a memory; and
a processor, operatively coupled with the memory, to:
receive an image of a portion of a semiconductor wafer that includes a defect, the image having been captured by an inspection system;
segment the image of the portion of the semiconductor wafer to identify one or more elements of a pattern built on the portion of the semiconductor wafer;
process the segmented image to calculate a value for an attribute of the defect in the image based on at least one of:
an extent of overlap between the defect and at least one of the identified elements of the pattern;
a number of identified elements of the pattern intersected by the defect; and
a gray level value indicative of a gray level of the defect relative to a gray level of at least one of the identified elements of the pattern; and

classify the defect based on the value for the attribute of the defect and an amount of distance between the defect and at least one element of the pattern built on a surface of the portion of the semiconductor wafer that is not in a field of view associated with the image.

12. The system of claim 11 , wherein the extent of overlap is selected from the group constituted by: an area of overlap between the defect and at least one of the one or more identified elements of the pattern; an area of overlap between the defect and all identified elements of the pattern; a relationship between an area of at least one identified element and its area overlapped with the defect; and a relationship between an area of all identified elements and their area overlapped with the defect.

13. The system of claim 11 , wherein the value for the attribute of the defect is calculated further based on computer-aided design (CAD) data associated with the pattern built on the semiconductor wafer.

14. The system of claim 13 , wherein the value for the attribute of the defect is calculated further based on a portion of the CAD data associated with an underlying layer below a surface of the semiconductor wafer.

15. The system of claim 11 , wherein the value for the attribute of the defect is calculated further based on a portion of the CAD data associated with at least one element of the pattern that is not in the field of view associated with the image.

16. The system of claim 15 , wherein the at least one element of the pattern is in an area of the semiconductor wafer outside the area corresponding to the image of the portion of the semiconductor wafer.

17. The system of claim 11 , wherein the value for the attribute of the defect is calculated further based on a spatial relationship between the defect and the at least one of the identified elements of the pattern.

18. The system of claim 11 , wherein the segmenting of the image of the portion of the semiconductor wafer is provided using computer-aided design (CAD) data.

19. The system of claim 11 , wherein the image of the portion of the semiconductor wafer comprises a scanning electronic microscope (SEM) image.

20. The system of claim 11 , wherein the value for the attribute of the defect is calculated further based on a topographical feature of the defect.

21. A non-transitory computer readable medium comprising instructions that, when executed by a processor, cause the processor to perform operations comprising:
receiving an image of a portion of a semiconductor wafer that includes a defect, the image having been captured by an inspection system;
segmenting the image of the portion of the semiconductor wafer to identify one or more elements of a pattern built on the portion of the semiconductor wafer;
processing, by the processor, the segmented image to calculate a value for an attribute of the defect in the image based on at least one of:
an extent of overlap between the defect and at least one of the identified elements of the pattern;
a number of identified elements of the pattern intersected by the defect; and
a gray level value indicative of a gray level of the defect relative to a gray level of at least one of the identified elements of the pattern; and

classifying the defect based on the value for the attribute of the defect and an amount of distance between the defect and at least one element of the pattern built on a surface of the portion of the semiconductor wafer that is not in a field of view associated with the image.

22. The non-transitory comput

Assignees

• Kaizerman Idan
• Schwarzband Ishai
• Rozenman Efrat
• Applied Materials Israel Ltd

Inventors

• Kaizerman Idan
• Schwarzband Ishai
• Rozenman Efrat

Classifications

• G06T2207/30148

  Semiconductor; IC; Wafer · CPC title

• G06T2207/10061

  from scanning electron microscope · CPC title

• G06T7/001 Primary

  using an image reference approach · CPC title