Micro wideband spectroscopic analysis device
US-12163834-B2 · Dec 10, 2024 · US
US9857223B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9857223-B2 |
| Application number | US-201514947238-A |
| Country | US |
| Kind code | B2 |
| Filing date | Nov 20, 2015 |
| Priority date | Nov 20, 2015 |
| Publication date | Jan 2, 2018 |
| Grant date | Jan 2, 2018 |
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An interferometer system comprising an optical detector including a substrate and a two-dimensional array of pixels disposed on the substrate is provided. The interferometer system may further comprise an interferometer disposed proximate the optical detector without an optical element between the interferometer and the optical detector. The interferometer may include a first plate positioned proximate the substrate and extending over the two-dimensional array of pixels, a second plate spaced apart from the first plate, the first and second plates defining an optical gap between them, and at least one actuatable spacer positioned between the first plate and the second plate and configured to space apart the first and second plates from one another and to selectively alter a thickness of the optical gap.
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What is claimed is: 1. An interferometer system comprising: an optical detector including a substrate and a two-dimensional array of pixels disposed on the substrate, wherein the optical detector is a focal plane array detector; and an interferometer disposed proximate the optical detector without an optical element between the interferometer and the optical detector, the interferometer including a first plate positioned proximate the substrate and extending over the two-dimensional array of pixels and overlapping multiple pixels of the two-dimensional array of pixels, a second plate spaced apart from the first plate and extending over the two-dimensional array of pixels and overlapping the multiple pixels of the two-dimensional array of pixels, the first and second plates defining an optical gap between them, and at least two actuatable spacers positioned between and contacting the first plate and the second plate within but not completely filling the optical gap such that the at least two actuatable spacers are separated from one another by at least a portion of the optical gap, the portion of the optical gap extending over the two-dimensional array of pixels and substantially overlapping all of the multiple pixels of the two-dimensional array of pixels, the at least two actuatable spacers being configured to space apart the first and second plates from one another and to selectively alter a thickness of the optical gap. 2. The interferometer system of claim 1 , further comprising a reflective coating disposed on interior surfaces of the first plate and the second plate, the interior surfaces being surfaces that face the optical gap. 3. The interferometer system of claim 1 , further comprising a microelectromechanical system actuator configured to actuate the spacers to selectively alter the thickness of the optical gap. 4. The interferometer system of claim 1 , wherein the at least two actuatable spacers comprise piezoelectric materials. 5. The interferometer system of claim 4 , wherein the piezoelectric materials include at least one of lithium tantalite, lithium niobate, lead zirconium titanate, and lanthanum-doped lead zirconium titanate. 6. The interferometer system of claim 1 , wherein the at least two actuatable spacers are positioned between the edges of the first plate and the second plate. 7. The interferometer system of claim 1 , further comprising fore-optics, the interferometer being positioned between the fore-optics and the optical detector. 8. An interferometer system comprising: an optical detector including a substrate and a two-dimensional array of pixels disposed on the substrate, wherein the optical detector is a focal plane array detector; and an interferometer disposed proximate the optical detector without an optical element between the interferometer and the optical detector, the interferometer including a first plate positioned proximate the substrate and extending over the two-dimensional array of pixels and overlapping multiple pixels of the two-dimensional array of pixels, a second plate disposed substantially parallel to the first plate, and an annular actuatable spacer positioned between the first and second plates and configured to space apart the first and second plates from one another to provide an optical gap between the first and second plates, the annular actuatable spacer being positioned at edges of the first and second plates and defining a perimeter of the optical gap, the optical gap extending over the two-dimensional array of pixels and substantially overlapping all of the multiple pixels of the two-dimensional array of pixels, and the annular actuatable spacer being further configured to selectively alter a thickness of the optical gap. 9. The interferometer system of claim 8 , further comprising a mechanical actuator configured to actuate the annular actuatable spacer to selectively alter the thickness of the optical gap. 10. The interferometer system of claim 8 further comprising an electrical actuator configured to actuate the annular actuatable spacer to selectively alter the thickness of the optical gap. 11. The interferometer system of claim 8 wherein the annular actuatable spacer comprises a piezoelectric material. 12. The interferometer system of claim 11 wherein the piezoelectric material is selected from a group consisting of lithium tantalite (LiTaO 3 ), lithium niobate (LiNbO 3 ), lead zirconium titanate (PZT), and lanthanum-doped lead zirconium titanate (PLZT). 13. The interferometer system of claim 8 , further comprising a reflective coating disposed on interior surfaces of the first plate and the second plate, the interior surfaces being surfaces that face the optical gap.
using photoelectric array detector · CPC title
using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters · CPC title
Microstructural systems {; Auxiliary parts of microstructural devices or systems} · CPC title
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