Method and apparatus for controlling topographical variation on a milled cross-section of a structure

Patent metadata

Field	Value
Publication number	US-9852750-B2
Application number	US-201213449835-A
Country	US
Kind code	B2
Filing date	Apr 18, 2012
Priority date	Nov 18, 2003
Publication date	Dec 26, 2017
Grant date	Dec 26, 2017

Abstract

An improved method of controlling topographical variations when milling a cross-section of a structure, which can be used to reduce topographical variation on a cross-section of a write-head in order to improve the accuracy of metrology applications. Topographical variation is reduced by using a protective layer that comprises a material having mill rates at higher incidence angles that closely approximate the mill rates of the structure at those higher incidence angles. Topographical variation can be intentionally introduced by using a protective layer that comprises a material having mill rates at higher incidence angles that do not closely approximate the mill rates of the structure at those higher incidence angles.

First claim

We claim as follows:

1. A method of exposing a non-planar cross-section of a write-head pole structure composed of a first material, the method comprising:
depositing a protective overcoat layer of a second material on said write-head pole structure, said protective overcoat layer coating the exterior of the write-head pole structure, said second material having ion beam mill rates at higher incidence angles that do not closely approximate the ion beam mill rates of the first material at the same incidence angles, the difference in the ion beam mill rates of the first material and the second material being due to different material properties of the first material and second material;
directing an ion beam at the write-head pole structure;
exposing, by means of milling the write-head pole structure using the ion beam, a cross-section of the write-head pole structure; and
producing, by means of milling the write-head pole structure using the ion beam, a non-planar face on said exposed cross-section;
in which the second material is elemental tungsten.

2. The method of claim 1 , in which the first material is an alloy of nickel and iron.

3. The method of claim 2 , in which the first material is permalloy.

4. The method of claim 1 , further comprising measuring one or more dimensions of a feature on the exposed non-planar face of the cross-section.

5. The method of claim 1 in which said second material has mill rates at incidence angles greater than 75 degrees that do not closely approximate the mill rates of the first material at incidence angles greater than 75 degrees.

6. The method of claim 5 in which said second material has mill rates at incidence angles greater than 75 degrees that are substantially lower than the mill rates of the first material at incidence angles greater than 75 degrees.

7. The method of claim 1 in which said second material has mill rates at incidence angles greater than 45 degrees that do not closely approximate the mill rates of the first material at incidence angles greater than 45 degrees.

8. The method of claim 7 in which said second material has mill rates at incidence angles greater than 45 degrees that are substantially lower than the mill rates of the first material at incidence angles greater than 45 degrees.

9. The method of claim 1 in which exposing a non-planar cross-section of the write-head pole structure comprises exposing a recessed cross-section face.

Assignees

• Nadeau James P
• Zou Pei
• Arjavac Jason H
• Fei Co

Inventors

• Nadeau James P
• Zou Pei
• Arjavac Jason H

Classifications

• G11B5/3163 Primary

  Fabrication methods or processes specially adapted for a particular head structure, e.g. using base layers for electroplating, using functional layers for masking, using energy or particle beams for shaping the structure or modifying the properties of the basic layers · CPC title

• H01J2237/3114

  Machining · CPC title