Method of inspecting a specimen and system thereof

Patent metadata

Field	Value
Publication number	US-9851714-B2
Application number	US-201514728495-A
Country	US
Kind code	B2
Filing date	Jun 2, 2015
Priority date	Jun 1, 2015
Publication date	Dec 26, 2017
Grant date	Dec 26, 2017

Abstract

There are provided a method of inspecting the inspection area and an inspection system thereof. The inspection system comprises an inspection control unit operatively coupled to an inspection tool unit and to a recipe generating unit. The inspection control unit is configured to obtain the design data and the inspection recipe; to provide local segmentation of at least one inspection PoI comprised in an inspection image captured from the inspection area by the inspection tool unit, thereby obtaining inspection structural elements comprised in the at least one inspection PoI, the local segmentation is provided using segmentation configuration data specified in the inspection recipe; to identify one or more target structural elements and design structural elements corresponding thereto, identifying is provided using design association data specified in the inspection recipe; and to enable metrology measurements for the one or more target structural elements using the identified design structural elements.

First claim

The invention claimed is:

1. A method of inspecting an inspection area of a specimen, the inspection area comprising at least one inspection pattern of interest (PoI), the method comprising:
obtaining design data informative of design structural elements in a design PoI corresponding to the PoI and an inspection recipe generated using the design data and a test image comprising at least one test PoI of substantially the same design as the at least one PoI, the inspection recipe specifying an offset between the design data and the test image and a parameter that is based on an imaging condition associated with the inspection area of the specimen and another imaging condition associated with the test image;
providing, by a processor, local segmentation of at least one inspection PoI in an inspection image captured from the inspection area to obtain inspection structural elements in the at least one inspection PoI by using segmentation configuration data specified in the inspection recipe and obtained from global segmentation of the test image captured from the inspection area;
identifying, among the inspection structural elements in the at least one inspection PoI, one or more inspection structural elements corresponding to at least one metrology target to yield one or more target structural elements;
identifying design structural elements corresponding to the one or more target structural elements by using design association data specified in the inspection recipe and obtained from associating segmented structural elements in the test PoI with the design structural elements in the design PoI; and
enabling metrology measurements for the one or more target structural elements using the identified design structural elements and the parameter from the inspection recipe.

2. The method of claim 1 further comprising:
prior to identifying design structural elements corresponding to the one or more target structural elements, registering the inspection image in design data coordinates using position calibration data specified in the inspection recipe and obtained from registering the test image in design data coordinates.

3. The method of claim 1 , wherein identifying design structural element corresponding to a given target structural element comprises matching pixels corresponding to the target structural element to corresponding pixels in the test PoI, and using the design association data for identifying design structural element associated with the identified pixels, the identified design structural element corresponding to the given target structural element.

4. The method of claim 1 , wherein at least one metrology measurement is selected from at least one of:
extracting measurement information indicative of discrepancy related to dimensions and/or shape of a target structural element in comparison to corresponding design structural element identified using the design association data;
extracting measurement information indicative of discrepancy in distances between target structural elements in comparison to corresponding design structural elements identified using the design association data; or
extracting measurement information indicative of overlay discrepancy associated with target structural elements in comparison to corresponding design structural elements identified using the design association data.

5. A system to inspect an inspection area of a specimen, the inspection area comprising at least one pattern of interest (PoI), the system comprising an inspection tool unit operatively coupled to a computerized inspection control unit configured to:
obtain the design data and a test image;
receive an inspection recipe that specifies an offset between the design data and the test image and a parameter that is based on an imaging condition associated with the inspection area of the specimen and another imaging condition associated with the test image;
provide local segmentation of at least one inspection PoI in an inspection image captured from the inspection area by the inspection tool unit to obtain inspection structural elements in the at least one inspection PoI by using segmentation configuration data specified in the inspection recipe;
identify, among the inspection structural elements in the at least one inspection PoI, one or more inspection structural elements corresponding to at least one metrology target to yield one or more target structural elements;
identify design structural elements corresponding to the one or more target structural elements by using design association data specified in the inspection recipe; and
enable metrology measurements for the one or more target structural elements using the identified design structural elements and the parameter from the inspection recipe.

6. The system of claim 5 further comprising a recipe generating unit operatively coupled to the inspection control unit, wherein the recipe generating unit is configured to:
upon obtaining the design data informative of design structural elements in a design PoI corresponding to the at least one PoI, provide global segmentation of the test image captured by the inspection tool unit from the inspection area and comprising at least one test PoI of substantially the same design as the at least one PoI to obtain segmented structural elements in the test PoI and segmentation configuration data;
associate the segmented structural elements in the test PoI with the design structural elements in the design PoI to obtain design association data; and
generate an inspection recipe comprising segmentation configuration data and design association data.

7. The system of claim 6 wherein:
the recipe generating unit is further configured to register, prior to associating the segmented structural elements with the design structural elements, the test image in design data coordinates and to obtain position calibration data and to include the position calibration data in the generated inspection recipe, and
the inspection control unit is further configured to register, prior to identifying design structural elements corresponding to the one or more target structural elements, the inspection image in design data coordinates using position calibration data in the inspection recipe.

8. The system of claim 5 , wherein the design association data comprise an association data structure associating, for each of the segmented structural elements, each of the pixels corresponding to a given segmented structural element in the test PoI with unique identifier of a design structural element associated with the given segmented structural element.

9. The system of claim 5 , wherein the computerized inspection control unit is further configured to select at least one metrology measurement from at least one of:
extracting measurement information indicative of discrepancy related to dimensions and/or shape of an inspection structural element in comparison to corresponding design structural element identified using the design association data;
extracting measurement information indicative of discrepancy in distances between inspection structural elements in comparison to corresponding design structural elements identified using the design association data; or
extracting measurement information indicative of overlay discrepancy associated with inspection structural elements in comparison to corresponding design structural elements identified using the design association data.

10. The system of claim 5 wherein the inspection control unit, in order to identify design structural element corresponding to a given target structural element, is further configured to match pixels corresponding to the target structural element to corresponding pixe

Assignees

• Applied Materials Israel Ltd
• Applied Materials Israel Ltd

Inventors

• Dalla-Torre Michele
• Batikoff Amit
• Rozenman Efrat
• KATZIR Ron
• Kissos Imry

Classifications

• G06T7/001 Primary

  using an image reference approach · CPC title

• G05B19/41875 Primary

  characterised by quality surveillance of production · CPC title

• G06T7/0004

  Industrial image inspection · CPC title

• G05B2219/37224

  Inspect wafer · CPC title

• G06T2207/30148

  Semiconductor; IC; Wafer · CPC title