Optical system and laser processing apparatus
US-9500781-B2 · Nov 22, 2016 · US
US9851570B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9851570-B2 |
| Application number | US-201715459323-A |
| Country | US |
| Kind code | B2 |
| Filing date | Mar 15, 2017 |
| Priority date | Sep 18, 2014 |
| Publication date | Dec 26, 2017 |
| Grant date | Dec 26, 2017 |
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An optical output coupler includes an uncoated plano-concave lens having a planar side and a concave side. An optical axis of the plano-concave lens is tilted at or near a Brewster angle relative to a beam axis. A first optical element is configured to focus a beam of radiation emerging from the planar side of the plano-concave lens along a first axis that is perpendicular to the beam axis. The first optical element is disposed between the planar side of the plano-concave lens and a second optical element. The second optical element is configured to focus a beam of radiation emerging from the planar side of the plano-concave lens along a second axis that is perpendicular to the beam axis, wherein the second axis is different from the first axis.
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What is claimed is: 1. A optical output coupler, comprising: a plano-concave lens having a planar side and a concave side, wherein an optical axis of the plano-concave lens is tilted about an axis of curvature of the plano-concave lens or an axis parallel to the axis of curvature at or near a Brewster angle relative to a beam axis such that a beam of radiation is incident on a concave side of the plano-concave lens; a first optical element configured to focus a beam of radiation emerging from the planar side of the plano-concave lens along a first axis that is perpendicular to the beam axis; and a second optical element, wherein the first optical element is disposed between the planar side of the plano-concave lens and the second optical element, wherein the second optical element is configured to focus a beam of radiation emerging from the planar side of the plano-concave lens along a second axis that is perpendicular to the beam axis, wherein the second axis is different from the first axis. 2. The optical output coupler of claim 1 , wherein the plano-concave lens is made of fused silica. 3. The optical output coupler of claim 1 , wherein the plano-concave lens is made of calcium difluoride (CaF 2 ). 4. The optical output coupler of claim 1 , wherein the first axis is perpendicular to the second axis. 5. The output coupler of claim 1 , wherein an optical axis of the first optical element is aligned substantially parallel to the beam axis. 6. The output coupler of claim 1 , wherein an optical axis of the second optical element is aligned substantially parallel to the beam axis. 7. The output coupler of claim 1 , wherein an optical axis of the first optical element is aligned substantially parallel to the beam axis and an optical axis of the second optical element is aligned substantially parallel to the beam axis. 8. The output coupler of claim 1 , wherein one or more surfaces of the first optical element are coated with an anti-reflection coating. 9. The output coupler of claim 1 , wherein one or more surfaces of the second optical element are coated with an anti-reflection coating. 10. The output coupler of claim 1 , wherein one or more surfaces of the first optical element are coated with an anti-reflection coating and wherein one or more surfaces of the second optical element are coated with an anti-reflection coating. 11. The output coupler of claim 1 , wherein the plano-concave lens is configured to diverge an approximately parallel beam of radiation incident on the concave side such that a diameter of the approximately parallel beam of radiation increases to between about 250% and about 2500% of the diameter of the approximately parallel beam of radiation at the concave side of the plano-concave lens. 12. The output coupler of claim 1 , wherein a radius of curvature of the concave side of the plano-concave lens is between about 5 mm about 25 mm. 13. The output coupler of claim 1 , wherein the plano-concave lens, first optical element and second optical element are configured to collimate an elliptical radiation beam incident on the planar side of the plano-concave lens into a circular beam of radiation. 14. The output coupler of claim 1 , wherein a distance from the plano concave lens to the second cylindrical lens along the beam axis is between about 75 mm and about 250 mm. 15. The output coupler of claim 1 , wherein the plano-concave lens is made from a nonlinear optical material. 16. The output coupler of claim 1 , wherein the plano-concave lens is made from a non-linear optical material having a higher threshold for damage from light than fused silica or calcium difluoride. 17. The output coupler of claim 1 , wherein the first optical element includes a cylindrical lens. 18. The output coupler of claim 1 , wherein the second optical element includes a cylindrical lens. 19. The output coupler of claim 1 , wherein the first optical element includes a first cylindrical lens and the second optical element is a second cylindrical lens. 20. The output coupler of claim 1 , wherein the first optical element includes a prism. 21. The output coupler of claim 1 , wherein the second optical element includes a prism. 22. The output coupler of claim 1 , wherein the first optical element includes a first prism and the second optical element includes a second prism. 23. The output coupler of claim 1 , wherein the first optical element or the second optical element includes a prism and a spherical lens. 24. The output coupler of claim 1 , wherein plano-concave lens is characterized by curvature in two dimensions and negative focal lengths with respect to two orthogonal axes, wherein tilt of the plano-concave lens about the axis of curvature or the axis parallel to the axis of curvature changes focal lengths for the tangential and sagittal axes of the plano-concave lens. 25. A wavelength converter system comprising: an optical wavelength converter configured to generate a wavelength converted output beam of radiation from an input beam of radiation; and an optical output coupler configured to receive the wavelength converted output beam of radiation, wherein the optical output coupler includes a plano-concave lens having a planar side and a concave side, wherein an optical axis of the plano-concave lens is tilted about an axis of curvature of the plano-concave lens or an axis parallel to the axis of curvature at or near a Brewster angle relative to a beam axis such that a beam of radiation is incident on a concave side of the plano-concave lens; a first optical element configured to focus a beam of radiation emerging from the planar side of the plano-concave lens along a first axis that is perpendicular to the beam axis; and a second optical element, wherein the first optical element is disposed between the planar side of the plano-concave lens and the second optical element, wherein the second optical element is configured to focus a beam of radiation emerging from the planar side of the plano-concave lens along a second axis that is perpendicular to the beam axis, wherein the second axis is different from the first axis. 26. The system of claim 25 , wherein the wavelength converter includes a nonlinear optical material. 27. The system of claim 25 , wherein the wavelength converter is configured to generate the wavelength converted output beam of radiation such that an optical frequency of the output beam is greater than an optical frequency of the input beam. 28. The system of claim 25 , wherein the plano-concave lens is made from a nonlinear optical material. 29. The system of claim 25 , wherein the wavelength converter is a nonlinear optical crystal having Brewster angle or near Brewster angle output face that is concave curved and acts as the plano-concave lens. 30. The system of claim 29 , wherein a confocal parameter of the output coupler is less than a length of a nonlinear optical crystal, whereby functions of the wavelength converter and plano-concave lens are combined into a single element. 31. The system of claim 25 , wherein the plano-concave lens is made from a non-linear optical material having a higher threshold for damage from light than fused silica or calcium difluoride. 32. The system of claim 25 , wherein the first optical element includes a cylindrical lens.
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