Hard coating and target for forming hard coating

Patent metadata

Field	Value
Publication number	US-9850567-B2
Application number	US-201415027732-A
Country	US
Kind code	B2
Filing date	Nov 17, 2014
Priority date	Nov 21, 2013
Publication date	Dec 26, 2017
Grant date	Dec 26, 2017

Abstract

Provided is a hard coating having, in particular, excellent oxidation resistance, high hardness, and excellent abrasion resistance as compared with conventional hard coatings such as TiSiN, TiAlSiN, TiCrAlSiN, and AlCrSiN coatings. The hard coating according to the present invention has a compositional formula of (Ti α Cr 1-α ) 1-a Ge a (C 1-x N x ), where the atomic ratios of the elements satisfy the expressions: 0≦α≦1, 0.010≦a≦0.20, and 0.5≦x≦1.

First claim

The invention claimed is:

1. A hard coating having a compositional formula of (Ti α Cr 1-α ) 1-a-b Ge a Si b M z (C 1-x N x ), an oxidation onset temperature of 950° C. or higher, and a hardness of 25 GPa or more;
where M is at least one element selected from the group consisting of:
Group 4 elements excluding Ti;
Group 5 elements;
Group 6 elements excluding Cr;
Sc;
Y;
B; and
rare-earth elements, each specified in the periodic table; and

where the ratios α, a, b, x, and z meet the following conditions:
0≦α≦1;
0.010≦a≦0.20;
0.10≦b≦0.29;
0.15≦(a+b)≦0.30;
0.5≦x≦1; and
0≦z≦0.20 relative to all the elements comprising Ti, Cr, the at least one element M, Ge, and Si.

2. A hard coating according to claim 1 , having a compositional formula of (Ti α Cr 1-α ) 1-a-b Ge a Si b (C 1-x N x ),
the ratios α, a, b, and x of elements meeting conditions:
0≦a≦1;
0.010≦a≦0.20;
0.10≦b≦0.29;
0.15≦(a+b)≦0.30; and
0.5≦x≦1.

3. The hard coating according to claim 2 , having a compositional formula of (Ti α Cr 1-α ) 1-a-b Ge a Si b (C 1-x N x ), where 0.10≦b≦0.25.

4. The hard coating according to claim 3 , having a compositional formula of (Ti α Cr 1-α ) 1-a-b Ge a Si b (C 1-x N x ), where 0.03≦a≦0.20.

5. The hard coating according to claim 3 , having a compositional formula of (Ti α Cr 1-α ) 1-a-b Ge a Si b (C 1-x N x ), where 0.05≦a≦0.20.

6. The hard coating according to claim 1 , having a compositional formula of (Ti α Cr 1-α ) 1-a-b Ge a Si b M z (C 1-x N x ), where 0.10≦b≦0.25.

7. The hard coating according to claim 6 , having a compositional formula of (Ti α Cr 1-α ) 1-a-b Ge a Si b M z (C 1-x N x ), where 0.03≦a≦0.20.

8. The hard coating according to claim 6 , having a compositional formula of (Ti α Cr 1-α ) 1-a-b Ge a Si b M z (C 1-x N x ), where 0.05≦a≦0.20.

Assignees

• Kobe Steel Ltd

Inventors

• Yamamoto Kenji

Classifications

• C23C30/005

  on hard metal substrates · CPC title

• C23C14/3414

  Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy · CPC title

• C09D1/00

  Coating compositions, e.g. paints, varnishes or lacquers, based on inorganic substances · CPC title

• C23C14/345

  using substrate bias · CPC title

• C23C14/0641

  Nitrides (C23C14/0617 takes precedence) · CPC title