Fluoride glazes from fluorine ion treatment

Patent metadata

Field	Value
Publication number	US-9850161-B2
Application number	US-201715418615-A
Country	US
Kind code	B2
Filing date	Jan 27, 2017
Priority date	Mar 29, 2016
Publication date	Dec 26, 2017
Grant date	Dec 26, 2017

Abstract

An article comprises a body having a coating. The coating comprising a mixture of a first oxide and a second oxide. The coating includes a glaze on a surface of the coating, the glaze comprising a eutectic system having a super-lattice of a first fluoride and a second fluoride.

First claim

What is claimed is:

1. A method comprising:
forming an article or a coating comprising an initial mixture comprising a first oxide and a second oxide;
heating the article or coating to a treatment temperature of at least 910° C.;
exposing the article or coating to anhydrous hydrogen fluoride gas at the treatment temperature of at least 910° C., wherein exposure of the article or coating to the anhydrous hydrogen fluoride gas at the temperature of at least 910° C. causes:
replacement of oxygen molecules in the first oxide and the second oxide with fluorine molecules at a surface of the article or the coating;
transformation of the initial mixture comprising the first oxide and the second oxide into a final mixture comprising a first fluoride and a second fluoride at the surface of the article or the coating;
formation of a eutectic system from the final mixture, the eutectic system having a super-lattice of the first fluoride and the second fluoride at the surface of the article or the coating; and
formation of a glaze from the eutectic system at the surface of the article or the coating.

2. The method of claim 1 , wherein the glaze has a thickness of 0.5 to 200 microns.

3. The method of claim 1 , wherein the formation of the eutectic system from the final mixture comprises:
melting the first fluoride, wherein the first fluoride has a first melting temperature that is below the treatment temperature;
dissolving the second fluoride by the melted first fluoride, wherein the second fluoride has a second melting temperature that is above the treatment temperature; and
combining of the melted first fluoride and the dissolved second fluoride into the eutectic system, wherein the eutectic system has a third melting temperature that is below the first melting temperature.

4. The method of claim 1 , wherein the first oxide is ZrO 2 and the second oxide is Y 2 O 3 .

5. The method of claim 1 , wherein the initial mixture comprises a ceramic compound comprising Y 4 Al 2 O 9 and a solid-solution of Y 2 O 3 —ZrO 2 , and wherein the exposure of the article or the coating to the anhydrous hydrogen fluoride gas at the temperature of at least 910° C. further causes Al to be removed from the ceramic compound at the surface of the article or the coating through formation and vaporization of AlF 3 .

6. The method of claim 5 , wherein the exposure of the article or coating to the anhydrous hydrogen fluoride gas at the temperature of at least 910° C. further causes vaporization of at least one of trace transition metals or aluminum from the surface of the article or the coating.

7. The method of claim 5 , wherein the first oxide and the second oxide are selected from a group consisting of Y 2 O 3 , Nd 2 O 3 , La 2 O 3 , Er 2 O 3 , Sc 2 O 3 , TiO 2 , ZrO 2 , HfO 2 , Al 2 O 3 and SiO 2 .

8. The method of claim 5 , wherein the article comprises a sintered ceramic article.

9. The method of claim 5 , further comprising:
forming the coating on an object by performing one of dip coating, doctor blade coating, thermal spray coating, plasma spray coating, ion assisted deposition, or physical vapor deposition.

10. The method of claim 1 , wherein the 50-100% of a thickness of the coating is converted to the glaze.

11. The method of claim 1 , wherein the initial mixture comprises the first oxide, the second oxide and a third oxide, the final mixture comprises the first fluoride and the second fluoride and a third fluoride at the surface of the article or the coating, and the eutectic system has a super-lattice of the first fluoride, the second fluoride and the third fluoride at the surface of the article or the coating.

Assignees

• Applied Materials Inc

Inventors

• Lee Chengtsin
• Sun Jennifer Y

Classifications

• C03C17/22 Primary

  with other inorganic material (C03C17/34, C03C17/44 take precedence) · CPC title

• C03C8/06

  containing halogen · CPC title

• C03C2209/00

  Compositions specially applicable for the manufacture of vitreous glazes · CPC title

• C03C2217/214

  Al2O3 · CPC title

• C03C2217/285

  Fluorides · CPC title