Synthesis of silicon nanocrystals by laser pyrolysis
US-9205399-B2 · Dec 8, 2015 · US
US9850137B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9850137-B2 |
| Application number | US-201314650959-A |
| Country | US |
| Kind code | B2 |
| Filing date | Dec 27, 2013 |
| Priority date | Dec 31, 2012 |
| Publication date | Dec 26, 2017 |
| Grant date | Dec 26, 2017 |
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A method of improving the operation of polysilicon fluidized bed reactors is disclosed. The present disclosure is directed to the optimization of axial temperature gradients in gas-solid fluidized bed systems. Varying the width of the particle size distribution in the reactor alters the temperature gradient within the reactor, thereby providing a means of a better control of internal temperature profiles and hence better reactor performance.
Opening claim text (preview).
What is claimed is: 1. A method of improving the operation of a polysilicon fluidized bed reactor having a distributor plate and a core bed, the method comprising: adding polysilicon seeds having a pre-determined particle size distribution into the core bed of the fluidized bed reactor; measuring the width of the particle size distribution of granules in the bed, wherein the granules consist of a mixture of newly added seeds and previously added seeds, the previously added seeds having grown and/or shrunk in size; adjusting the frequency of seed addition into the reactor to change the width of the particle size distribution of the granules in the bed as determined from the ratio of standard deviation (σ) of mass-weighted particle size distribution to the Sauter mean diameter (dsm), seeds being added to the reactor from about every 60 minutes to about every 600 minutes; depositing silicon from a thermally decomposable compound onto the previously added and newly added seeds; and, withdrawing a polysilicon product from the bed. 2. The method of claim 1 , wherein the newly added polysilicon seeds have pre-determined particle sizes ranging from about 50 μm to about 600 μm. 3. The method of claim 1 , wherein the the Sauter mean diameter (dsm) of the granules is constant at about 925 μm. 4. The method of claim 1 , wherein the temperature in the fluidized bed reactor is from about 700° F. to about 1400° F. 5. The method of claim 1 , wherein the width of the particle size distribution of the granules in the bed is further controlled by adjusting the frequency of polysilicon product withdrawal from the reactor. 6. The method of claim 1 , wherein the polysilicon product is withdrawn from the reactor from about every 15 minutes to about every 100 minutes. 7. The method of claim 1 , wherein the polysilicon polysilicon product has particle sizes ranging from about 600 μm to about 2,000 μm. 8. A method of improving the operation of a polysilicon fluidized bed reactor having a distributor plate and a core bed, the method comprising: adding polysilicon seeds having a pre-determined particle size distribution into the core bed of the fluidized bed reactor, seeds being added to the reactor from about every 60 minutes to about every 600 minutes; measuring the width of the particle size distribution of granules in the bed, wherein the granules consist of a mixture of newly added seeds and previously added seeds, the previously added seeds having mown and/or shrunk in size; adjusting the pre-determined particle size distribution of the seeds to change the width of the particle size distribution of the granules in the bed as determined from the ratio of standard deviation (a) of mass-weighted particle size distribution to the Sauter mean diameter (dsm); depositing silicon from a thermally decomposable compound onto the previously added and newly added seeds; and, withdrawing a polysilicon product from the bed. 9. The method of claim 8 , wherein the newly added polysilicon seeds have pre-determined particle sizes ranging from about 50 μm to about 600 μm. 10. The method of claim 9 , wherein the newly added polysilicon seeds have a pre-determined particle size ranging from about 50 μm to about 150 μm. 11. The method of claim 8 , wherein the Sauter mean diameter (dsm) of the granules is constant at about 925 μm. 12. The method of claim 8 , wherein the temperature in the fluidized bed reactor is from about 700° F. to about 1400° F. 13. The method of claim 8 , wherein the width of the particle size distribution of the granules in the bed is further controlled by adjusting the frequency of polysilicon product withdrawal from the reactor. 14. The method of claim 8 , wherein the polysilicon polysilicon product is withdrawn from the reactor from about every 15 minutes to about every 100 minutes. 15. The method of claim 8 , wherein the polysilicon polysilicon product has particle sizes ranging from about 600 μm to about 2,000 μm. 16. A method of improving the operation of a polysilicon fluidized bed reactor having a distributor plate and a core bed, the method comprising: adding polysilicon seeds having a pre-determined particle size distribution into the core bed of the fluidized bed reactor; measuring the width of the particle size distribution of granules in the bed, wherein the granules consist of a mixture of newly added seeds and previously added seeds, the previously added seeds having grown and/or shrunk in size; adjusting the frequency of seed addition into the reactor and adjusting the pre-determined particle size distribution of the seeds to change the width of the particle size distribution of the granules in the bed as determined from the ratio of standard deviation (a) of mass-weighted particle size distribution to the Sauter mean diameter (dsm), seeds being added to the reactor from about every 60 minutes to about every 600 minutes; depositing silicon from a thermally decomposable compound onto the previously added and newly added seeds; and, withdrawing a polysilicon product from the bed. 17. The method of claim 16 , wherein the Sauter mean diameter (dsm) of the granules is constant at about 925 μm. 18. The method of claim 16 , wherein the temperature in the fluidized bed reactor is from about 700° F. to about 1400° F. 19. The method of claim 16 , wherein the polysilicon product is withdrawn from the reactor from about every 15 minutes to about every 100 minutes. 20. The method of claim 16 , wherein the polysilicon product has particle sizes ranging from about 600 μm to about 2,000 μm.
Controlling processes · CPC title
Fouling of the reactor or the process equipment · CPC title
Particle size selection · CPC title
Controlling the temperature · CPC title
Preparation (chemical coating from the vapour phase C23C16/00) · CPC title
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