Mask frame assembly, display manufacturing apparatus including mask frame assembly, and method of manufacturing display apparatus using mask frame assembly

Patent metadata

Field	Value
Publication number	US-9847485-B2
Application number	US-201615170549-A
Country	US
Kind code	B2
Filing date	Jun 1, 2016
Priority date	Nov 13, 2015
Publication date	Dec 19, 2017
Grant date	Dec 19, 2017

Abstract

A mask frame assembly includes a frame, a first support bar, split masks, and a second support bar. The frame includes an opening. The first support bar spans the opening in a first direction, the first support bar includes first ends disposed on the frame. The split masks span the opening in a second direction crossing the first direction, the split masks include first portions disposed on the first support bar and second ends disposed on the frame. The second support bar is disposed on the first support bar, the second support bar being more magnetic than the first support bar.

First claim

What is claimed is:

1. A method of manufacturing a display apparatus, the method comprising:
causing a substrate of the display apparatus to be positioned with respect to a mask frame assembly; and
causing a deposition material to be deposited on the substrate according to deposition patterns of the mask frame assembly,
wherein the mask frame assembly comprises:
a frame comprising an opening;
a first support bar spanning the opening in a first direction, the first support bar comprising first ends disposed on the frame;
split masks spanning the opening in a second direction crossing the first direction, the split masks comprising first portions disposed on the first support bar and second ends disposed on the frame; and
a second support bar disposed on the first support bar, the second support bar being more magnetic than the first support bar,

wherein the deposition patterns are formed in the split masks, and
wherein the first support bar is disposed between the split masks and the second support bar.

2. The method of claim 1 , wherein:
the substrate is positioned with respect to the mask frame assembly via a chuck; and
a first attractive force between the chuck and the second support bar is greater than a second attractive force between the chuck and the first support bar.

3. The method of claim 2 , wherein a strength of the first attractive force weakens from a central portion of the second support bar towards the second ends.

4. The method of claim 1 , wherein:
the second support bar is one of a plurality of second support bars disposed on the first support bar; and
the plurality of second support bars are spaced apart from one another in the first direction or the second direction.

5. A mask frame assembly comprising:
a frame comprising an opening;
a first support bar spanning the opening in a first direction, the first support bar comprising first ends disposed on the frame;
split masks spanning the opening in a second direction crossing the first direction, the split masks comprising first portions disposed on the first support bar and second ends disposed on the frame; and
a second support bar disposed on the first support bar, the second support bar being more magnetic than the first support bar,
wherein the first support bar is disposed between the split masks and the second support bar.

6. The mask frame assembly of claim 5 , wherein:
a thickness of the first support bar in a third direction perpendicular to the first direction and the second direction is greater than a thickness of the second support bar in the third direction; and
a width of the first support bar in the second direction is greater than a width of the second support bar in the second direction.

7. The mask frame assembly of claim 5 , wherein:
the second support bar is one of a plurality of second support bars disposed on the first support bar; and
the plurality of second support bars are spaced apart from one another in the first direction.

8. The mask frame assembly of claim 5 , wherein:
the first support bar comprises a groove; and
the second support bar is at least partially disposed in the groove.

9. The mask frame assembly of claim 5 , wherein at least one dimension of the second support bar decreases with increasing distance from a central portion of the second support bar towards the second ends.

10. The mask frame assembly of claim 5 , wherein:
the frame comprises first grooves disposed on second grooves;
the first ends interface with the first grooves; and
the second ends interface with the second grooves.

11. A display manufacturing apparatus comprising:
a mask frame assembly;
a supporter configured to support the mask frame assembly;
an electrostatic chuck configured to support a substrate in relation to the mask frame assembly; and
a vapor deposition source configured to eject a deposition material towards the substrate,
wherein the mask frame assembly comprises:
a frame comprising an opening;
a first support bar spanning the opening in a first direction, the first support bar comprising first ends disposed on the frame;
split masks spanning the opening in a second direction crossing the first direction, the split masks comprising first portions disposed on the first support bar and second ends disposed on the frame; and
a second support bar disposed on the first support bar, the second support bar being more magnetic than the first support bar, and

wherein the first support bar is disposed between the split masks and the second support bar.

12. The apparatus of claim 11 , wherein:
the substrate is disposed between the mask frame assembly and the electrostatic chuck; and
a first attractive force between the electrostatic chuck and the second support bar is greater than a second attractive force between the electrostatic chuck and the first support bar.

13. The apparatus of claim 12 , wherein a strength of the first attractive force weakens from a central portion of the second support bar towards the second ends.

14. The apparatus of claim 13 , wherein:
the frame comprises first grooves disposed on second grooves;
the first ends interface with the first grooves; and
the second ends interface with the second grooves.

15. The apparatus of claim 11 , wherein:
a thickness of the first support bar in a third direction perpendicular to the first direction and the second direction is greater than a thickness of the second support bar in the third direction; and
a width of the first support bar in the second direction is greater than a width of the second support bar in the second direction.

16. The apparatus of claim 11 , wherein:
the second support bar is one of a plurality of second support bars disposed on the first support bar; and
the plurality of second support bars are spaced apart from one another in the first direction or the second direction.

17. The apparatus of claim 11 , wherein:
the first support bar comprises a groove; and
the second support bar is at least partially disposed in the groove.

18. The apparatus of claim 11 , wherein at least one dimension of the second support bar decreases with increasing distance from a central portion of the second support bar towards the second ends.

Assignees

• Samsung Display Co Ltd

Inventors

• Min Soohyun

Classifications

• C23C14/08

  Oxides (C23C14/10 takes precedence) · CPC title

• C23C14/042

  using masks · CPC title

• H01L51/5256

  Electricity · mapped topic

• C23C14/221

  Ion beam deposition (C23C14/46, C23C14/48 take precedence) · CPC title

• C23C14/34

  Sputtering · CPC title