Method for manufacturing a silicon carbide semiconductor element
US-2015380248-A1 · Dec 31, 2015 · US
US9847265B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9847265-B2 |
| Application number | US-201514855487-A |
| Country | US |
| Kind code | B2 |
| Filing date | Sep 16, 2015 |
| Priority date | Nov 21, 2012 |
| Publication date | Dec 19, 2017 |
| Grant date | Dec 19, 2017 |
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Methods and systems of accurately dispensing a viscous fluid onto a substrate. In an embodiment, a method includes using an electronic flow meter device to produce electrical flow meter output signals and performing a responsive control function in a closed loop manner by adjusting at least one dispensing parameter to correct for a difference between an output data set and a reference data set. In another embodiment, a system includes a control operatively coupled to a gas flow meter device and to a weigh scale allowing for a density of an amount of viscous material to be determined. In another embodiment, a method includes using a control coupled to both a gas flow meter device and a weigh scale and performing a responsive control function in a closed loop manner by adjusting at least one dispensing parameter using gas flow meter output signals and weigh scale output signals.
Opening claim text (preview).
What is claimed is: 1. A viscous fluid dispensing system for accurately dispensing a viscous fluid onto a substrate, the system comprising: a viscous fluid dispenser including an inlet and an outlet; a viscous fluid supply adapted to hold the viscous fluid and coupled in fluid communication with the inlet of the viscous fluid dispenser to establish a flow path for the viscous fluid between the viscous fluid supply and the outlet of the viscous fluid dispenser; a gas flow meter device operatively coupled to the viscous fluid supply to produce corresponding gas flow meter output signals corresponding to a first amount of the viscous fluid; a weigh scale configured to receive and weigh the first amount and to produce corresponding weigh scale output signals; and a controller operatively coupled to the gas flow meter device and to the weigh scale, wherein the controller determines a mass of the first amount using the weigh scale output signals received from the weigh scale, determines a volume of the first amount by integrating the gas flow meter output signals received from the gas flow meter device, and then determines a density of the first amount using the mass of the first amount and the volume of the first amount. 2. The system of claim 1 , wherein the controller compares the density of the first amount to a predetermined tolerance and causes a warning a user if the density is outside of the predetermined tolerance. 3. The system of claim 1 , wherein: the gas flow meter device further produces gas flow meter output signals proportional to a volume of a second amount of the viscous fluid flowing through the flow path and dispensed through the outlet, and the controller uses the density of the first amount and the volume of the second amount to determine a mass flow rate of the second amount. 4. The system of claim 3 , wherein the controller is further configured to adjust at least one dispensing parameter to adjust the mass flow rate of the second amount. 5. The system of claim 4 , wherein the controller is configured to adjust the at least one dispensing parameter by adjusting a fluid supply pressure of the viscous fluid supply. 6. The system of claim 4 , wherein the controller is configured to adjust the at least one dispensing parameter by adjusting the frequency at which successive amounts of the viscous fluid are dispensed through the outlet. 7. The system of claim 4 , further comprising a temperature controller coupled to the controller, wherein the controller is configured to adjust the at least one dispensing parameter by using the temperature controller to adjust the temperature of the viscous fluid dispenser. 8. The system of claim 4 , wherein the viscous fluid dispenser is a jetting dispenser configured to jet dots of viscous fluid, and wherein the controller is configured to adjust the at least one dispensing parameter by adjusting a firing rate that the dots are jetted from the jetting dispenser. 9. The system of claim 4 , wherein the viscous fluid dispenser is a jetting dispenser configured to jet dots of viscous fluid, and wherein the controller is configured to adjust the at least one dispensing parameter by adjusting a number of dots jetted in a pattern. 10. The system of claim 3 , wherein the controller further detects an air bubble in the viscous fluid flowing through the viscous fluid dispenser. 11. The system of claim 1 , wherein: the viscous fluid supply further comprises a pressurized supply using pressurized air flowing through a pneumatic input of the viscous fluid supply, and the gas flow meter device is operatively coupled to the pneumatic input to produce corresponding gas flow meter output signals corresponding to the flow rate of the pressurized air flowing through the pneumatic input. 12. The system of claim 11 , wherein the controller is further configured to adjust at least one dispensing parameter by adjusting the pressure of the pressurized supply.
on active surfaces of flip-chip devices, e.g. underfills · CPC title
of encapsulations on active surfaces of flip-chip devices, e.g. forming underfills · CPC title
comprising acting in response to an ongoing measurement without interruption of processing, e.g. endpoint detection or in-situ thickness measurement · CPC title
characterised by flow controlling means, e.g. valves, located proximate the outlet (B05C5/0258, B05C5/0275 take precedence; supply valves upstream the coating head B05C11/1036) · CPC title
having means for controlling the supply or discharge · CPC title
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