Surface enhanced Raman spectroscopy detection of gases, particles and liquids through nanopillar structures

Patent metadata

Field	Value
Publication number	US-9846125-B2
Application number	US-201514621295-A
Country	US
Kind code	B2
Filing date	Feb 12, 2015
Priority date	Sep 5, 2014
Publication date	Dec 19, 2017
Grant date	Dec 19, 2017

Abstract

Methods and systems for nanopillar sensors are described. Nanopillars can be defined on a substrate, and metal deposited on the nanopillars. A thermal treatment can reflow the metal on the nanopillars forming metallic bulbs on the top end of the nanopillars. These structures can have enhanced optical detection when functionalized with biological agents, or can detect gases, particles and liquids through interaction with the metal layer on the nanopillars.

First claim

What is claimed is:

1. A method to detect gases, liquids or particles, the method comprising:
providing a sensor, the sensor comprising
a substrate,
at least one first recessed region on the substrate,
nanopillars defined in the at least one first recessed region,
at least one second recessed region on the substrate, the at least one second recessed region comprising a non-continuous metallic layer and being devoid of nanopillars,
at least one mesa between recessed regions, the at least one mesa having a height higher than the recessed regions,
metallic bulbs on a top end of the nanopillars, a height of the nanopillars being equal or less than the height of the at least one mesa;

inserting the sensor in an environment; and
illuminating the sensor inserted in the environment with a laser, by illuminating the metallic bulbs on the top end of the nanopillars, thereby detecting presence or absence of a target gas, liquid or particle.

2. The method of claim 1 , wherein the sensor further comprises a functionalizing agent on the metallic bulbs on the top end of the nanopillars.

3. The method of claim 1 , wherein the sensor further comprises a polymer layer on a top surface of the at least one first recessed region in between the nanopillars.

4. The method of claim 1 , wherein a distance between the metallic bulbs is between 5 and 50 nanometers.

5. The method of claim 1 , wherein the at least one first recessed region on the substrate comprises a plurality of first recessed regions on the substrate.

6. The method of claim 1 , wherein the at least one first recessed region is an array of first recessed regions.

7. The method of claim 1 , wherein a distance between the metallic bulbs allows electrical insulation between the metallic bulbs.

8. The method of claim 1 , wherein the substrate is silicon, the nanopillars are silicon dioxide and the metallic layer is gold.

9. The method of claim 1 , further comprising choosing the metallic layer and a thickness of the metallic layer based on the target gas, liquid or particle.

10. The method of claim 9 , wherein the substrate is silicon, the nanopillars are silicon dioxide and the metallic layer is gold, copper, aluminum, platinum, nickel or silver.

11. The method of claim 8 , wherein the target gas, liquid or particle is hydrogen sulfide.

12. The method of claim 1 , further comprising an optical fiber attached to one end of the at least one first recessed region, wherein an opposite wall of the at least one first recessed region comprises a metallic layer, thereby acting as a reflector for the optical fiber, the optical fiber being configured to shine a laser light on the metallic bulbs and collect a signal reflected from the metallic bulbs.

13. The method of claim 1 , further comprising choosing a gap between the metallic bulbs based on a desired resonant wavelength.

14. The method of claim 13 , wherein the desired resonant wavelength is 488, 514, 633, 790 or 1050 nm.

15. A method comprising:
providing a sensor, the sensor comprising
a substrate,
at least one recessed region on the substrate,
nanopillars defined in the at least one recessed region, the nanopillars having gaps between each other,
metallic bulbs on a top end of the nanopillars,
a microfluidic chamber around the at least one recessed region;

inserting a solution in the microfluidic chamber, the solution having a concentration of target molecules;
illuminating, by a laser, the metallic bulbs on the top end of the nanopillars;
concentrating, by the illuminating, the target molecules close to the gaps between the metallic bulbs;
actively removing, away from the metallic bulbs, part of the solution from the microfluidic chamber; and
turning off the laser, thereby allowing the target molecules to diffuse within a remaining part of the solution within the microfluidic chamber, and thereby increasing the concentration of target molecules.

Assignees

• California Inst Of Techn

Inventors

• Walavalkar Sameer
• Scherer Axel
• Tombrello Thomas A

Classifications

• G01N21/658 Primary

  enhancement Raman, e.g. surface plasmons · CPC title

• A61B5/00

  Measuring for diagnostic purposes (radiation diagnosis A61B6/00; diagnosis by ultrasonic, sonic or infrasonic waves A61B8/00); Identification of persons · CPC title

• G01N33/483

  Physical analysis of biological material · CPC title

• G01N33/0004

  Gaseous mixtures, e.g. polluted air · CPC title

• G01N33/18

  Water · CPC title