On-tool mass flow controller diagnostic systems and methods

Patent metadata

Field	Value
Publication number	US-9846073-B2
Application number	US-201715459838-A
Country	US
Kind code	B2
Filing date	Mar 15, 2017
Priority date	Mar 14, 2013
Publication date	Dec 19, 2017
Grant date	Dec 19, 2017

Abstract

Mass flow controllers with on-tool diagnostic capabilities and methods for on-tool diagnosis of mass flow controllers are disclosed herein. One method includes opening a control valve to a fixed position and closing an upstream valve to produce a flow rate that decreases from a high flow rate, across a range of flow rates, to a low flow rate. A pressure signal is generated that is indicative of a pressure of the fluid within a volume between the upstream valve and a sensor tube, and a flow sensor signal is provided with the mass flow sensor that is indicative of a mass flow rate of the fluid through the main flow path. Ratio curves are produced that relate, across the range of flow rates, a rate of change of the pressure signal to the flow sensor signal and comparing a test ratio curve to a previously generated baseline ratio curve.

First claim

What is claimed is:

1. A mass flow control system with diagnostics capability comprising:
a main flow path for a fluid;
a control component and control valve to control a flow rate of the fluid;
a mass flow sensor coupled to the main flow path, the mass flow sensor is configured to provide a flow sensor signal that is indicative of a mass flow rate of the fluid through the main flow path, the mass flow sensor including a sensor tube and a bypass disposed to direct a portion of the fluid through the sensor tube;
an upstream valve disposed upstream of the mass flow sensor and configured to open to allow the fluid to flow to the mass flow sensor and close to prevent the fluid from flowing to the mass flow sensor;
a pressure sensor configured to generate a pressure signal indicative of a pressure of the fluid within a volume between the upstream valve and the mass flow sensor;
an on tool diagnostic portion configured to:
set the control valve to a fixed open position;
close the upstream valve while the control valve is fixed at the open position to produce a flow rate through the mass flow sensor that decreases from a high flow rate, across a range of flow rates, to a low flow rate;
produce ratio curves that relate, across the range of flow rates, a rate of change of the pressure signal to the flow sensor signal; and
compare a test ratio curve to a previously generated baseline ratio curve wherein differences between the test ratio curve and the previously generated baseline ratio curve are indicative of a problem with the mass flow control system.

2. The mass flow control system of claim 1 , wherein the on tool diagnostic portion is configured to compare a shape of the test ratio curve to the baseline curve.

3. The mass flow control system of claim 2 , wherein the on tool diagnostic portion is configured to:
calculate a characterization value for the test ratio curve and the baseline curve, wherein the characterization value=(max_value−min_value)/(average_value) where max_value is a maximum value of a curve, min_value is a minimum value of the curve, and the average_value is an average_value of the curve; and
the on tool diagnostic portion is configured to compare the characterization values for the test ratio curve and the baseline curve to determine whether there is a problem with the mass flow control system.

4. The mass flow control system of claim 2 , wherein the on tool diagnostic portion is configured to:
calculate a characterization value for the test ratio curve and the baseline curve, wherein the characterization value=((ratio_100%+ratio_20%)/(ratio_60%)) where ratio_100% is a value of the ratio curve at 100% flow; ratio_20% is a value of the ratio curve at 20% flow; and ratio_60% is a value of the ratio curve at 60% of flow; and
the on tool diagnostic portion is configured to compare the characterization values for the test ratio curve and the baseline curve to determine whether there is a problem with the mass flow control system.

5. The mass flow control system of claim 1 , wherein the on tool diagnostic portion is configured to compare the test ratio curve to the previously generated baseline ratio curve at flow rates above 90% to determine whether there is contamination in either of the sensor tube or the bypass.

6. The mass flow control system of claim 1 , wherein the upstream valve is external to a housing for the control valve, the mass flow sensor, the bypass, the pressure sensor, and the on tool diagnostic portion.

7. The mass flow control system of claim 1 , wherein the upstream valve is within a housing along with the control valve, the mass flow sensor, the bypass, the pressure sensor, and the on tool diagnostic portion.

8. A method for assessing operation of a mass flow controller, the method comprising:
setting a control valve of the mass flow controller to a fixed open position to enable fluid to flow through the control valve and through a main flow path of the mass flow controller;
directing a portion of the fluid through a sensor tube of a mass flow sensor of the mass flow controller with a bypass;
closing an upstream valve that is upstream of the mass flow controller while the control valve is fixed at the open position to produce a flow rate through the mass flow sensor that decreases from a high flow rate, across a range of flow rates, to a low flow rate;
generating a pressure signal indicative of a pressure of the fluid within a volume between the upstream valve and the sensor tube;
providing a flow sensor signal with the mass flow sensor that is indicative of a mass flow rate of the fluid through the main flow path;
producing ratio curves that relate, across the range of flow rates, a rate of change of the pressure signal to the flow sensor signal; and
comparing a test ratio curve to a previously generated baseline ratio curve wherein differences between the test ratio curve and the previously generated baseline ratio curve are indicative of a problem with the mass flow controller.

9. The method of claim 8 , wherein comparing includes comparing a shape of the test ratio curve to the baseline curve.

10. The method of claim 9 , including:
calculating a characterization value for the test ratio curve and the baseline curve, wherein the characterization value=(max_value−min_value)/(average_value) where max_value is a maximum value of a curve, min_value is a minimum value of the curve, and the average_value is an average_value of the curve;
wherein the comparing includes comparing the characterization values for the test ratio curve and the baseline curve to determine whether there is a problem with the mass flow controller.

11. The method of claim 9 , including:
calculating a characterization value for the test ratio curve and the baseline curve, wherein the characterization value=((ratio_100%+ratio_20%)/(ratio_60%)) where ratio_100% is a value of the ratio curve at 100% flow; ratio_20% is a value of the ratio curve at 20% flow; and ratio_60% is a value of the ratio curve at 60% of flow;
wherein the comparing includes comparing the characterization values for the test ratio curve and the baseline curve to determine whether there is a problem with the mass flow controller.

12. The method of claim 8 , wherein the comparing includes comparing the test ratio curve to the previously generated baseline ratio curve at flow rates above 90% to determine whether there is contamination in either of the sensor tube or the bypass.

13. A mass flow controller with diagnostics capability comprising:
a main flow path for a fluid;
a control component and control valve to control a flow rate of the fluid;
a mass flow sensor coupled to the main flow path, the mass flow sensor is configured to provide a flow sensor signal that is indicative of a mass flow rate of the fluid through the main flow path, the mass flow sensor including a sensor tube and a bypass disposed to direct a portion of the fluid through the sensor tube;
a pressure sensor configured to generate a pressure signal indicative of a pressure of the fluid within a volume between the mass flow sensor and an upstream valve located upstream of the mass flow sensor;
an on tool diagnostic portion configured to:
set the control valve to a fixed open position;
close the upstream valve while the control valve is fixed at the open position to produce a flow rate through the mass flow sensor that decreases from a high flow rate, across a range of flow rates, to a low flow rate;
produce ratio curves that relate, across the range of flow rates, a rate of change of the pressure signal to the flow sensor signal; and
compare a test ratio curve to a previously gene

Assignees

• Hitachi Metals Ltd

Inventors

• Smirnov Alexei V
• Nagarajan Arun

Classifications

• G01F1/684 Primary

  Structural arrangements; Mounting of elements, e.g. in relation to fluid flow · CPC title

• G05D7/0635

  by action on throttling means (G05D7/0688, G05D7/0694 take precedence) · CPC title

• G01F25/0007 Primary

  Physics · mapped topic

• G01F25/0092

  for metering by volume · CPC title

• G01F5/00

  Measuring a proportion of the volume flow · CPC title