GaN SUBSTRATE, AND METHOD FOR MANUFACTURING GaN SUBSTRATE
US-2015368832-A1 · Dec 24, 2015 · US
US9845551B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9845551-B2 |
| Application number | US-201313939086-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jul 10, 2013 |
| Priority date | Jul 10, 2012 |
| Publication date | Dec 19, 2017 |
| Grant date | Dec 19, 2017 |
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In some embodiments, the present disclosure pertains to methods of forming single-crystal graphenes by: (1) cleaning a surface of a catalyst; (2) annealing the surface of the catalyst; (3) applying a carbon source to the surface of the catalyst; and (4) growing single-crystal graphene on the surface of the catalyst from the carbon source. Further embodiments of the present disclosure also include a step of separating the formed single-crystal graphene from the surface of the catalyst. In some embodiments, the methods of the present disclosure also include a step of transferring the formed single-crystal graphene to a substrate. Additional embodiments of the present disclosure also include a step of growing stacks of single crystals of graphene.
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What is claimed is: 1. A method of forming large-size single-crystal graphene, wherein the method comprises: cleaning a surface of a catalyst; annealing the surface of the cleaned catalyst, wherein the annealing occurs at pressures of 1,000 Torr or higher; applying a carbon source to the surface of the catalyst; and growing single-crystal graphene on the surface of the catalyst, wherein the formed single-crystal graphene has a width that ranges from 1 mm to 5 meters. 2. The method of claim 1 , wherein the catalyst is selected from the group consisting of Ni, Co, Fe, Pt, Au, Al, Cr, Cu, Mg, Mn, Mo, Rh, Si, Ta, Ti, W, U, V and Zr, mixtures thereof, and combinations thereof. 3. The method of claim 1 , wherein the catalyst is a copper foil. 4. The method of claim 1 , wherein the catalyst is in polycrystalline form. 5. The method of claim 1 , wherein the cleaning comprises electrochemical-polishing the surface of the catalyst. 6. The method of claim 1 , wherein the annealing comprises thermal annealing. 7. The method of claim 6 , wherein the thermal annealing occurs at temperatures of 500° C. or higher. 8. The method of claim 6 , wherein the thermal annealing occurs at pressures of 1,500 Torr or higher. 9. The method of claim 6 , wherein the thermal annealing occurs in a reductive environment comprising a stream of a reductive gas. 10. The method of claim 9 , wherein the reductive gas is hydrogen. 11. The method of claim 1 , wherein the applying of the carbon source occurs by chemical vapor deposition. 12. The method of claim 1 , wherein the carbon source is selected from the group consisting of hydrocarbons, polymers, non-polymeric carbon sources, small molecules, organic compounds, fullerenes, fluorenes, carbon nanotubes, phenylene, ethylenes, sucrose, sugars, polysaccharides, carbohydrates, proteins, and combinations thereof. 13. The method of claim 1 , wherein the carbon source is a hydrocarbon. 14. The method of claim 13 , wherein the hydrocarbon is methane. 15. The method of claim 1 , wherein the growing occurs at temperatures of 500° C. or higher. 16. The method of claim 1 , wherein the growing occurs at a pressure of between 100 Torr and 110 Torr. 17. The method of claim 1 , wherein the growing occurs for 2 hours or longer. 18. The method of claim 1 , wherein the growing occurs in a reductive environment comprising a stream of a reductive gas. 19. The method of claim 18 , wherein the reductive gas is hydrogen. 20. The method of claim 1 , further comprising a step of controlling the morphology of the single-crystal graphene by adjusting various growth parameters. 21. The method of claim 20 , wherein the growth parameters comprise flow rate of a reductive gas during growth, growth time, growth temperature, annealing temperature, growth pressure, type of catalyst, and combinations thereof. 22. The method of claim 1 , further comprising a step of separating the formed single-crystal graphene from the surface of the catalyst. 23. The method of claim 1 , further comprising a step of transferring the formed single-crystal graphene to a substrate. 24. The method of claim 1 , wherein the method occurs without the use of a vacuum. 25. The method of claim 1 , wherein the method occurs under positive pressure. 26. A method of forming large-size and stacked layers of single crystals of graphene, wherein the method comprises: cleaning a surface of a catalyst; annealing the surface of the cleaned catalyst, wherein the annealing occurs at pressures of 1,000 Torr or higher; applying a carbon source to the surface of the catalyst; and growing stacked layers of single crystals of graphene on the surface of the catalyst, wherein the single crystals of graphene comprise widths that range from 1 mm to 5 meters. 27. The method of claim 26 , wherein the stacked layers of single crystals of graphene comprise a bilayer. 28. The method of claim 26 , wherein the stacked layers of single crystals of graphene comprise a trilayer. 29. The method of claim 26 , wherein the stacked layers of single crystals of graphene form by repeating the applying and growing steps until a desired number of stacked layers of single crystals of graphene are formed. 30. The method of claim 26 , wherein the catalyst is selected from the group consisting of Ni, Co, Fe, Pt, Au, Al, Cr, Cu, Mg, Mn, Mo, Rh, Si, Ta, Ti, W, U, V and Zr, mixtures thereof, and combinations thereof. 31. The method of claim 26 , wherein the catalyst is a copper foil. 32. The method of claim 26 , wherein the cleaning comprises electrochemical-polishing the surface of the catalyst. 33. The method of claim 26 , wherein the annealing comprises thermal annealing. 34. The method of claim 33 , wherein the thermal annealing occurs at temperatures of 500° C. or higher and pressures of 1,500 Torr or higher. 35. The method of claim 33 , wherein the thermal annealing occurs in a reductive environment comprising a stream of a reductive gas. 36. The method of claim 26 , wherein the applying of the carbon source occurs by chemical vapor deposition. 37. The method of claim 26 , wherein the carbon source is a hydrocarbon. 38. The method of claim 26 , wherein the growing occurs at temperatures of 500° C. or higher and pressures of 100 Torr or higher. 39. The method of claim 26 , wherein the growing occurs in a reductive environment comprising a stream of a reductive gas. 40. The method of claim 26 , further comprising a step of controlling the morphologies of the single crystals of graphene by adjusting various growth parameters. 41. The method of claim 40 , wherein the growth parameters comprise flow rate of a reductive gas during growth, growth time, growth temperature, annealing temperature, growth pressure, type of catalyst, and combinations thereof. 42. The method of claim 26 , further comprising a step of separating the formed single crystals of graphene from the surface of the catalyst. 43. The method of claim 26 , further comprising a step of transferring the formed single crystals of graphene to a substrate. 44. The method of claim 1 , wherein the growing occurs at pressures below 760 Torr. 45. The method of claim 26 , wherein the growing occurs at pressures below 760 Torr.
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