Electrostatic chuck
US-2024297063-A1 · Sep 5, 2024 · US
US9845269B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9845269-B2 |
| Application number | US-201313986089-A |
| Country | US |
| Kind code | B2 |
| Filing date | Mar 29, 2013 |
| Priority date | Mar 30, 2012 |
| Publication date | Dec 19, 2017 |
| Grant date | Dec 19, 2017 |
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Multifunctional Boron Nitride nanotube-Boron Nitride (BN—BN) nanocomposites for energy transducers, thermal conductors, anti-penetrator/wear resistance coatings, and radiation hardened materials for harsh environments. An all boron-nitride structured BN—BN composite is synthesized. A boron nitride containing precursor is synthesized, then mixed with boron nitride nanotubes (BNNTs) to produce a composite solution which is used to make green bodies of different forms including, for example, fibers, mats, films, and plates. The green bodies are pyrolized to facilitate transformation into BN—BN composite ceramics. The pyrolysis temperature, pressure, atmosphere and time are controlled to produce a desired BN crystalline structure. The wholly BN structured materials exhibit excellent thermal stability, high thermal conductivity, piezoelectricity as well as enhanced toughness, hardness, and radiation shielding properties. By substituting with other elements into the original structure of the nanotubes and/or matrix, new nanocomposites (i.e., BCN, BCSiN ceramics) which possess excellent hardness, tailored photonic bandgap and photoluminescence, result.
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What is claimed is: 1. A method for forming boron nitride nanotube-boron nitride (BN—BN) nanocomposites, comprising: synthesizing a boron nitride containing ceramic precursor; combining a boron nitride nanotube solution with the boron nitride containing ceramic precursor to form a composite precursor; forming at least one green body from the composite precursor; and pyrolizing the at least one formed green body under an inert gas which is pressurized above 10 Pa and less than 1 kPa into BN—BN composite ceramics. 2. The method of claim 1 wherein the at least one green body is pyrolized at a temperature of at least 800° C. 3. The method of claim 1 wherein the at least one green body is pyrolized at a temperature of at least 1500° C. 4. The method of claim 1 wherein the at least one green body is of a form selected from the group consisting of fibers, woven mats, non-woven mats, films and plates. 5. The method of claim 1 wherein carbon is added to the boron nitride containing ceramic precursor. 6. The method of claim 1 wherein silicon is added to the boron nitride containing ceramic precursor. 7. The method of claim 1 wherein a combination of silicon and carbon is added to the boron nitride containing ceramic precursor. 8. The method of claim 1 wherein the concentration of boron nitride nanotube solution in the composite precursor is between 0.01 and 99.9% by weight. 9. The method of claim 1 wherein a combination of boron nitride, boron carbide, and silicon carbide are added to the boron nitride containing ceramic precursor. 10. A method for forming boron nitride nanotube-boron nitride (BN—BN) nanocomposites, comprising: synthesizing a boron nitride containing ceramic precursor; combining a boron nitride nanotube solution with the boron nitride containing ceramic precursor to form a composite precursor; forming at least one green body from the composite precursor; and pyrolizing the formed green body under ammonia which is pressurized above 10 Pa and less than 1 kPa into BN—BN composite ceramics. 11. The method of claim 10 wherein the at least one green body is pyrolized at a temperature of at least 800° C. 12. The method of claim 10 wherein the at least one green body is pyrolized at a temperature of at least 1500° C. 13. The method of claim 10 wherein the at least one green body is of a form selected from the group consisting of fibers, woven mats, non-woven mats, films and plates. 14. The method of claim 10 wherein carbon is added to the boron nitride containing ceramic precursor. 15. The method of claim 10 wherein silicon is added to the boron nitride containing ceramic precursor. 16. The method of claim 10 wherein a combination of silicon and carbon is added to the boron nitride containing ceramic precursor. 17. The method of claim 10 wherein the concentration of boron nitride nanotube solution in the composite precursor is between 0.01 and 99.9% by weight. 18. The method of claim 10 wherein a combination of boron nitride, boron carbide, and silicon carbide are added to the boron nitride containing ceramic precursor.
Boron carbides · CPC title
Products characterised by their shape · CPC title
Silicon carbides · CPC title
Two-dimensional, e.g. woven structures · CPC title
Boron nitrides · CPC title
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