Substrate processing apparatus, substrate transfer method and substrate transfer device
US-9530676-B2 · Dec 27, 2016 · US
US9844847B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9844847-B2 |
| Application number | US-201615213773-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jul 19, 2016 |
| Priority date | Jul 24, 2015 |
| Publication date | Dec 19, 2017 |
| Grant date | Dec 19, 2017 |
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Official abstract text for this publication.
A machine tool can prevent cutting fluid or the like, which has occurred within a cover, from leaking out through an opening when a door provided in the cover is open. The machine tool includes a door for opening and closing an opening provided in a cover for defining a work space, and a partition member which is attached, as a member separated from the door, to the cover and which shields a part of the opening to define a small opening smaller than the opening.
Opening claim text (preview).
The invention claimed is: 1. A robot system comprising: a machine tool comprising: a door which opens and closes an opening formed at a cover defining a work space; and a partition member which is a member different from the door and which is attached to the cover, the partition member covering a part of the opening so as to define a small opening smaller than the opening, the partition member configured to move relative to a wall surface defining the opening so as to change a size of the small opening; a robot configured to enter and retract from the work space when the door is opened; and a controller which controls the operation of the robot so as to move the partition member by the robot. 2. The machine tool according to claim 1 , further comprising a guide which guides the movement of the partition member, wherein the partition member slides along the guide. 3. The robot system according to claim 1 , wherein the machine tool comprises a plurality of partition members movable relative to each other. 4. The robot system according to claim 3 , wherein the machine tool comprises: a first partition member; and a second partition member movably attached to the first partition member. 5. The robot system according to claim 1 , wherein the partition member is formed with a recess, a protrusion, or a hole, wherein the robot includes an engagement part able to engage the recess, the protrusion, or the hole, and wherein the controller operates the robot so as to move the partition member when the engagement part engages the recess, the protrusion, or the hole.
by means of grippers {(B23Q7/1494 takes precedence)} · CPC title
arranged between the working area and the operator · CPC title
characterised by the tasks executed · CPC title
Relatively slidable coverings, e.g. telescopic · CPC title
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