Current detection circuit and magnetic detection device provided with same

Patent metadata

Field	Value
Publication number	US-9841440-B2
Application number	US-201414907002-A
Country	US
Kind code	B2
Filing date	Jul 23, 2014
Priority date	Jul 24, 2013
Publication date	Dec 12, 2017
Grant date	Dec 12, 2017

Abstract

A current detection circuit includes a coil that is constituted by a metal wiring formed on a semiconductor substrate, a resistor that is provided in a position near the coil on the semiconductor substrate, constituted by a metal wiring formed on the semiconductor substrate, which is made of a metal material being same as that of the coil, and arranged so as to prevent any magnetic field from being generated due to a current flowing in the resistor, an output circuit that outputs currents in accordance with a resistance ratio between the coil and the resistor to the coil and the resistor correspondingly through a common terminal, and a detection circuit that detects the current flowing in the resistor to thereby detect the current flowing in the coil.

First claim

The invention claimed is:

1. A current detection circuit comprising:
a coil that is constituted by a metal wiring formed on a semiconductor substrate;
a resistor that is provided in a position adjacent to the coil on the semiconductor substrate, constituted by a metal wiring formed on the semiconductor substrate, which is made of a metal material being same as that of the coil, and arranged so as to prevent any magnetic field from being generated due to a current flowing in the resistor;
an output circuit that outputs currents in accordance with a resistance ratio between the coil and the resistor to the coil and the resistor correspondingly through a common terminal at which one end of the coil and one end of the resistor are connected to each other; and
a detection circuit that detects the current flowing in the resistor to thereby detect the current flowing in the coil.

2. The current detection circuit according to claim 1 , wherein the resistor is constituted by a plurality of metal wirings which is made of a metal material being same as that of the coil, an even number of the metal wirings being arranged in parallel to each other.

3. The current detection circuit according to claim 1 , wherein the resistor has a resistance value larger than that of the coil.

4. The current detection circuit according to claim 1 , wherein the semiconductor substrate has a multilayer structure, and the coil and the resistor are formed in a specific metal wiring layer in the semiconductor substrate.

5. The current detection circuit according to claim 1 , wherein the coil includes a first coil and a second coil; and
wherein the first coil is constituted by a spiral metal wiring pattern arranged clockwise and gradually inward from a first contact point to a second contact point, the second coil is constituted by a spiral metal wiring pattern arranged counterclockwise and gradually outward from a third contact point to a fourth contact point, and the second contact point and the third contact point are electrically conductive to each other.

6. A magnetic detection device comprising:
a current detection circuit according to claim 5 ; and
a magnetic detection portion that detects an external magnetic field,
wherein the coil is disposed in a place adjacent to the magnetic detection portion;
wherein the output circuit applies, to the coil, a current for generating a magnetic field to cancel the external magnetic field detected by the magnetic detection portion;
wherein the detection circuit detects a current flowing in the resistor to thereby output a current or a voltage in accordance with the external magnetic field;
wherein coil currents flowing respectively in the first coil and the second coil flow in the same direction in an area between the second contact point and the third contact point so that a fixed-direction magnetic field occurs above or below the area; and
wherein the magnetic detection portion is disposed above or below the area.

7. A magnetic detection device comprising:
a current detection circuit according to claim 1 ; and
a magnetic detection portion that detects an external magnetic field,
wherein the coil is disposed in a place adjacent to the magnetic detection portion;
wherein the output circuit applies, to the coil, a current for generating a magnetic field to cancel the external magnetic field detected by the magnetic detection portion; and
wherein the detection circuit detects a current flowing in the resistor to thereby output a current or a voltage in accordance with the external magnetic field.

8. The current detection circuit according to claim 1 , wherein the resistor and the coil are connected through the common terminal so that a current flowing through the resistor and a current flowing in the coil are proportional with a resistance value of the resistor and a resistance value of the coil.

9. A magnetic detection device comprising:
a coil that is constituted by a metal wiring formed on a semiconductor substrate;
a resistor that is provided in a position adjacent to the coil on the semiconductor substrate, constituted by a metal wiring formed on the semiconductor substrate, which is made of a metal material being same as that of the coil, and arranged so as to prevent any magnetic field from being generated due to a current flowing in the resistor;
a magnetic detection portion that is disposed in a place adjacent to the coil and detects an external magnetic field; and
a circuit that applies currents to the coil and the resistor respectively when the magnetic detection portion detects the external magnetic field.

10. The magnetic detection device according to claim 9 , further comprising:
a detection circuit that detects the current flowing in the resistor to thereby detect the current flowing in the coil.

11. The magnetic detection device according to claim 9 , wherein the resistor is constituted by a plurality of metal wirings which is made of a metal material being same as that of the coil, an even number of the metal wirings being arranged in parallel to each other.

12. The magnetic detection device according to claim 9 , wherein the resistor has a resistance value larger than that of the coil.

13. The magnetic detection device according to claim 9 , wherein the semiconductor substrate has a multilayer structure, and the coil and the resistor are formed in a specific metal wiring layer in the semiconductor substrate.

14. The magnetic detection device according to claim 9 , wherein the coil includes a first coil and a second coil; and
wherein the first coil is constituted by a spiral metal wiring pattern arranged clockwise and gradually inward from a first contact point to a second contact point, the second coil is constituted by a spiral metal wiring pattern arranged counterclockwise and gradually outward from a third contact point to a fourth contact point, and the second contact point and the third contact point are electrically conductive to each other.

15. The magnetic detection device according to claim 14 , wherein coil currents flowing correspondingly in the first coil and the second coil flow in the same direction in an area between the second contact point and the third contact point so that a fixed-direction magnetic field occurs above or below the area; and
wherein the magnetic detection portion is disposed above or below the area.

Assignees

• Yamaha Corp

Inventors

• Hirano Katsuya
• Sekimoto Yasuhiko
• Kawagishi Norihiro

Classifications

• G01R15/148 Primary

  involving the measuring of a magnetic field or electric field (G01R15/18, G01R15/20, G01R15/24, G01R15/26 take precedence) · CPC title

• G01R33/09

  Magnetoresistive devices · CPC title

• G01R15/205

  using magneto-resistance devices, e.g. field plates · CPC title

• G01R19/0092

  Measuring current only · CPC title

• G01R33/093

  using multilayer structures, e.g. giant magnetoresistance sensors (thin magnetic films H01F10/00) · CPC title