Coherently receiving simultaneous optical-based electrical signals

Patent metadata

Field	Value
Publication number	US-9841375-B2
Application number	US-201415328871-A
Country	US
Kind code	B2
Filing date	Aug 1, 2014
Priority date	Aug 1, 2014
Publication date	Dec 12, 2017
Grant date	Dec 12, 2017

Abstract

Systems for measuring optical properties of a specimen are disclosed. The systems are configured to sample signals related to the measurement of the properties of a specimen, and perform software-based coherent detection of the signals to generate resulting measurements are based on the signals acquired at substantially the same time instance. This facilitates the displaying or generating of the desired measurements in real time. In one configuration, the system is configured to direct a modulated light signal at a selected wavelength incident upon a specimen. In another configuration, the system is configured to direct a combined light signal, derived from a plurality of light signals at different wavelengths and modulated with different frequencies, incident upon a specimen. In yet another configuration, the system is configured to direct a plurality of light signals modulated with different frequencies incident upon different regions of a specimen.

First claim

What is claimed is:

1. A system, comprising:
a modulated light source configured to generate a modulated light signal based on a modulation frequency voltage;
a specimen measurement system configured to direct at least a portion of the modulated light signal incident upon a specimen for measurement of one or more properties of the specimen, wherein the specimen measurement system is configured to generate a plurality of measurement currents pursuant to the measurement of the one or more properties of the specimen;
a signal conditioner configured to generate a plurality of measurement voltages from the plurality of currents, respectively;
a data acquisition circuit configured to:
sample and digitize the plurality of measurement voltages to generate a plurality of measurement digital signals; and
sample and digitize the modulation frequency voltage to generate a reference digital signal, wherein the sampling of the measurement voltages and modulation frequency voltage are performed in a substantially simultaneous manner; and

a computing device configured to perform software-based coherent detection of the measurement digital signals using the reference digital signal.

2. The system of claim 1 , wherein the computing device is configured to perform the coherent detection of the measurement digital signals by at least:
mixing the measurement digital signals with a mixing signal based on the reference digital signal to generate a plurality of mixed digital signals, respectively; and
filtering the digital mixed signals to generate output digital signals.

3. The system of claim 2 , wherein the mixing signal is related to a frequency harmonic of the reference digital signal.

4. The system of claim 2 , wherein the computing device is configured to generate one or more indications of the one or more properties of the specimen based on the output digital signals.

5. The system of claim 4 , wherein the one or more indications includes an extrinsic quantum efficiency (EQE), intrinsic quantum efficiency (IQE), or both the EQE and IQE of the specimen.

6. The system of claim 1 , wherein the specimen measurement system comprises:
a reference detector configured to generate a first current of the plurality of currents, the first current being related to an intensity of the incident light signal; and
wherein a second current of the plurality of currents is generated by the specimen in response to the incident light signal.

7. The system of claim 1 , wherein the specimen measurement system comprises:
a reference detector configured to generate a first current of the plurality of currents, the first current being related to an intensity of the incident light signal;
a reflectance detector configured to generate a second current of the plurality of currents, the second current being related to an intensity of a light signal reflected by the specimen in response to the incident light signal; and
wherein a third current of the plurality of currents is generated by the specimen in response to the incident light signal.

8. A system, comprising:
a light source configured to generate a plurality of distinct wavelengths light signals modulated based on a plurality of distinct modulation frequency voltages, respectively;
an optical combiner configured to generate a combined light signal based on the plurality of distinct wavelengths light signals;
a specimen measurement system configured to direct at least a portion of the combined light signal incident upon a specimen for measurement of one or more properties of the specimen, wherein the specimen measurement system is configured to generate a plurality of measurement currents pursuant to the measurement of the one or more properties of the specimen;
a signal conditioner configured to generate a plurality of measurement voltages from the plurality of currents, respectively;
a data acquisition circuit configured to:
sample and digitize the plurality of measurement voltages to generate a plurality of measurement digital signals; and
sample and digitize the plurality of modulation frequency voltages to generate a plurality of reference digital signals, wherein the sampling of the measurement voltages and the modulation frequency voltages are performed in a substantially simultaneous manner; and

a computing device configured to perform software-based coherent detection of the measurement digital signals using the reference digital signals.

9. The system of claim 8 , wherein the computing device is configured to perform the coherent detection of the measurement digital signals by at least:
mixing the measurement digital signals with mixing signals based on the reference digital signals to generate a plurality of mixed digital signals, respectively; and
filtering the digital mixed signals to generate output digital signals.

10. The system of claim 9 , wherein the mixing signals are related to frequency harmonics of the reference digital signals, respectively.

11. The system of claim 9 , wherein the mixing signals are related to one or more beat frequencies each based on at least a pair of the reference digital signals.

12. The system of claim 9 , wherein the computing device is configured to generate one or more indications of the one or more properties of the specimen based on the output digital signals.

13. The system of claim 12 , wherein the one or more indications include an extrinsic quantum efficiency (EQE), intrinsic quantum efficiency (IQE), or both the EQE and IQE of the specimen.

14. The system of claim 8 , wherein the specimen measurement system comprises:
a reference detector configured to generate a first current of the plurality of currents, the first current being related to an intensity of the incident light signal; and
wherein a second current of the plurality of currents is generated by the specimen in response to the incident light signal.

15. The system of claim 8 , wherein the specimen measurement system comprises:
a reference detector configured to generate a first current of the plurality of currents, the first current being related to an intensity of the incident light signal;
a reflectance detector configured to generate a second current of the plurality of currents, the second current being related to an intensity of a light signal reflected by the specimen in response to the incident light signal; and
wherein a third current of the plurality of currents is generated by the specimen in response to the incident light signal.

16. A system, comprising:
a light source configured to generate a plurality of light signals modulated based on a plurality of distinct modulation frequency voltages, respectively;
a specimen measurement system configured to direct portions of the plurality of light signals incident upon distinct regions of a specimen for measurement of one or more properties of the specimen, wherein the specimen measurement system is configured to generate a plurality of measurement currents pursuant to the measurement of the one or more properties of the specimen;
a signal conditioner configured to generate a plurality of measurement voltages from the plurality of currents, respectively;
a data acquisition circuit configured to:
sample and digitize the plurality of measurement voltages to generate a plurality of measurement digital signals; and
sample and digitize the plurality of modulation frequency voltages to generate a plurality of reference digital signals, wherein the sampling of the measurement voltages and the modulation frequency voltages are performed in a substantially simultaneous manner; and

Assignees

• Newport Corp

Inventors

• Chen Anderson
• Park John

Classifications

• G01N21/55 Primary

  Specular reflectivity · CPC title

• G01J3/02

  Details · CPC title

• G01N21/474

  Details of optical heads therefor, e.g. using optical fibres · CPC title

• G01N21/59

  Transmissivity (G01N21/25 takes precedence) · CPC title

• G01N21/64

  Fluorescence; Phosphorescence · CPC title